SOLICITATION NOTICE
66 -- Electron Beam Thin Film Evaporation System with In-Situ Angled Evaporation Control
- Notice Date
- 2/14/2002
- Notice Type
- Solicitation Notice
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-02-R-AT02
- Response Due
- 3/29/2002
- Archive Date
- 4/13/2002
- Point of Contact
- Evangela Toledo, Contract Specialist, Phone 202-767-2021, Fax 202-767-5896, - Wayne Carrington, Contracting Officer, Phone 202-767-0393, Fax 202-767-5896,
- E-Mail Address
-
toledo@contracts.nrl.navy.mil, carrington@contracts.nrl.navy.mil
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. The solicitation, N00173-02-R-AT02, is issued as a Request for Proposal (RFP). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2001-03. The associated NAICS code is 33413 and small business size standard is 500 . NRL has a requirement for an Electron Beam Thin Film Evaporation System with In-Situ Angled Evaporation Control. The system will be used to perform precise multi angle evaporations of the materials with multi-level resist pattern as well as routine metal depositions. Materials to be evaporated include all common metals used in semi-conductor fabrication and other insulating materials (e.g. MgO, SiO, A1O, etc). The system shall be a cryo-pumped semi-automatic electron beam evaporator with a rotating, tilting, and cooling substrate holder. The system shall be designed with two types of substrate holders and these holders shall be interchangeable. The primary substrate holder shall be designed for specific angle, off normal evaporation for edge shadowing which can be repositioned in vacuum along with continuous rotating and liquid nitrogen cooling capabilities. The secondary holder shall be a planetary for holding multiple wafers with rotating and rolling on a track. The system shall meet all the government and industry safety standards. The system shall include one set of manuals (operation, maintenance, and schematic drawings.) The contractor shall provide standard commercial warranty, including an offer of extended warranty as provided in customary commercial practice. All capabilities must be demonstrated during the initial installation and will be reviewed prior to final acceptance of the materials. The complete specification is available via the internet: HTTP://HERON.NRL.NAVY.MIL/CONTRACTS/RFPLIST.HTM. Delivery and acceptance is at NRL, 4555 Overlook Ave. SW, Washington, D.C. 20375, FOB Destination. Delivery shall be no later than 90 days from date of award. The provision at 52.212-1, Instructions to Offerors--Commercial, applies to this acquisition. The Government intends to award a contract resulting from this solicitation to that responsible offeror proposing the lowest price for the items that have been determined to comply with the requirements of the specifications and solicitation. The proposal must demonstrate an understanding of the requirement and the ability to meet the specifications. General statements that the offeror can or will comply with the requirements, that standard procedures will be used, that well-known techniques will be used, or paraphrases the RFP specifications in whole or in part will not constitute compliance with this requirement concerning the content of the technical proposal. offeror must complete and submit with its proposal, FAR 52.212-3 Offeror Representations and Certifications--Commercial Items and DFARS 252.212-7000 Offeror Representations and Certifications--CommerciaL Items., which are available electronically at : http://heron.nrl.navy.mil/contracts/reps&certs.htm. The clause at FAR 52.212-4, Contract Terms and Conditions-Commercial Items and FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders--Commercial Items, applies to this acquisition. The additional FAR clauses cited in the clause are applicable to the acquisition: FAR 52.203-6, FAR 52.219-4, FAR 52.219-8, FAR 52.222-26, FAR 52.222-35, FAR 52.222-36, FAR 52.222-37, FAR 52.232-33 and FAR 52.247-64. . The DFARs clauses at 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items is applicable. The additional DFARs clauses cited in the clause are applicable: 252.225-7001, and 252.225-7007. The following additional FAR clauses apply: 52.203-8; 52.203-10. The following additional DFARs clauses apply: 252.204-7004, 252.232-7009. Any resultant contract will be a DO Rated order under the Defense Priorities and Allocations System (DPAS). The Contract Specialist must receive any questions no later than 10 calendar days before the closing date of the proposal. An original and two (2) copies of the offeror's proposal shall be delivered to Contracting Officer, Bldg. 222, Room 115, Naval Research Laboratory, 4555 Overlook Ave. SW Washington, D.C. 20375-5326 on or before 4:00PM, local time, March 29, 2002. The package should be marked with the solicitation number and due date and time.
- Record
- SN00026939-W 20020216/020214213354 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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