MODIFICATION
66 -- Inductively-Coupled Plasma (ICP), Plasma-Enhanced Chemical Vapor Deposition System(PECUD)
- Notice Date
- 5/6/2002
- Notice Type
- Modification
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-02-R-HA02
- Response Due
- 5/24/2002
- Archive Date
- 4/29/2003
- Point of Contact
- Hilda Abdon, Contract Specialist, Phone 202-767-0682, Fax 202-767-5896, - Wayne Carrington, Contracting Officer, Phone 202-767-0393, Fax 202-767-5896,
- E-Mail Address
-
abdon@contracts.nrl.navy.mil, carrington@contracts.nrl.navy.mil
- Description
- This is a modification issued This is a modification to the combined synopsis/solicitation N00173-02-R-HA02 for an Inductively-Coupled Plasma (ICP), Plasma-Enhanced Chemical Vapor Deposition System (PECVD) posted on April 29, 2002. The modification is issued to correct the solicitation document to incorporate provisions and clauses in effect through Federal Acquisition Circular (FAC) #01-07 and to answer questions regarding the original synopsis. Questions and answers are as follows: Question #1: In order to achieve reasonable deposition rates (~80-800 A/min.) In a High Density deposition system (ICP/PECVD) it is necessary to use 100% silane and not the 5% silane (balanced in nitrogen) called out in the specification. Is it acceptable to propose a system, which uses 100% silane? Answer #1: No Question #2: The system produce by our company has electrodes that operate in the following temperature ranges -150C to +400C, +50C to +400C, and +50C to +700C. The -150C to 400C electrode requires the use of liquid nitrogen. Which one is preferred by NRL? Answer #2: +50C to 400C range is preferred. Question #3: While our company produces a wide range of plasma processing system complete with pumps, heater/chiller units and end point detection instrumentation we do not offer cabinets for the storage of gas bottles. Each system is provided with a "gas pod" enclosure that houses up to 6 (or 12) MFC's/gas lines, shutoff valves and mixing manifold but that will not support the actual gas bottles themselves. Is it acceptable to propose a system without the gas cabinets? Answer #3: No.
- Record
- SN00072326-W 20020508/020506213429 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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