SOLICITATION NOTICE
66 -- REACTIVE ION ETCHING SYSTEM
- Notice Date
- 7/16/2002
- Notice Type
- Solicitation Notice
- Contracting Office
- NASA/Ames Research Center, JA:M/S 241-1, Moffett Field, CA 94035-1000
- ZIP Code
- 94035-1000
- Solicitation Number
- RFQ2-38190-MXS
- Response Due
- 7/31/2002
- Point of Contact
- Marianne Shelley, Purchasing Agent, Phone (650) 604-4179, Fax (650) 604-4357, Email mshelley@mail.arc.nasa.gov - Ronnee R. Gonzalez, Contracting Officer, Phone (650) 604-4386, Fax (650) 604-4357, Email rgonzalez@mail.arc.nasa.gov
- E-Mail Address
-
Email your questions to Marianne Shelley
(mshelley@mail.arc.nasa.gov)
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). NASA Ames Research Center intends to purchase a Reactive Ion Etching System for use in the Center for Nanotechnology. The minimum requirements for the system are: 1. Solild state RF generator: 600W, 13.56MHz, automatic matching tuning network. 2. Reactor chamber with 8" bottom electrode, 12" top electrode (both hard anodized aluminum), and plenum. 3. Four channels mass flow controllers (200 - 500 sccm). 4. Process control system (with touch screen interface) for automatic pressure control and processing. 5. Emergency off capability. 6. Electrostatic chuck with helium backside cooling. 7. DC bias control between top and bottom electrode. 8. Rotary vane pump (18.3 cfm) charged with Fomblin oil. 9. Modular system configuration for future integration with vacuum loadlock and other peripheral PECVD system. The provisions and clauses in the RFQ are those in effect through FAC 01-07. This procurement is a total small business set-aside. See Note 1. The NAICS Code and the small business size standard for this procurement are 334516 and 500, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to ARC is required within 45 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above are due by July 31, 2002 and may be mailed or faxed to 650-604-4357, Attn: Marianne Shelley, M/S 227-4, NASA ARC, Moffett Field, CA 94035-1000 and include solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ FAR 52.212-4 is applicable. FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference: 1852.204-74 Central Contractor Registration, 1852.215-84 Ombudsman, 1852.223-72 Safety and Health, 52.232-93 Submission of Invoices-Fixed Price, 52.222-3, 52.233-3, 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.222-19, 52.225-13, 52.232-33. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Questions regarding this acquisition must be submitted in writing no later than July 23, 2002. Selection and award will be in accordance with FAR 52.212-2 with the following evaluation factors: 1. Technical Acceptability; 2. Delivery schedule; 3. Past Performance; 4. Cost. Technical acceptability will be determined by information submitted by the quoter providing a description in sufficient detail to show that the product quoted meets the Government's requirement. These requirements include: 1. Ease of use, maintenance, and support; and, 2. Quoters must provide two references of previous orders for the item quoted. Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications - Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed - See NASA Specific Note "B". Prospective quoters shall notify this office of their intent to submit a quotation. It is the quoter's responsibility to monitor the following Internet site for the release of amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=C&pin=21 Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html
- Web Link
-
Click here for the latest information about this notice
(http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=21#102371)
- Record
- SN00117876-W 20020718/020717062230 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
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