Loren Data's SAM Daily™

FBO DAILY ISSUE OF AUGUST 04, 2002 FBO #0245
SOLICITATION NOTICE

66 -- Laser Interferometric Measuring System

Notice Date

8/2/2002
 

Notice Type

Solicitation Notice
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

SB1341-02-Q-0642
 

Response Due

8/16/2002
 

Point of Contact

Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884, - Patrick Staines, Contract Specialist, Phone (301)975-6335, Fax (301)975-8884,
 

E-Mail Address

carol.wood@nist.gov, Patrick.Staines@nist.gov
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 01-07.***The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This acquisition is unrestricted and all interested offerors may submit a quote.***The National Institute of Standards and Technology (NIST), Nanometer Scale Metrology Group, has a requirement for one (1) new or used, complete and working, NIKON XY-5I 130 Laser Interferometric XY Measuring System, or equal, to be used by NIST to develop semiconductor mask, overlay and 2-D grid standards.***Brand name or equal description is intended to be descriptive, but not restrictive and is to indicate the quality and characteristic of products that will be considered satisfactory to meet the agency requirement.***All responsible offerors may provide a quote for the following line items: LINE ITEM 0001: Quantity one (1) new or used, complete and working NIKON XY-5I 130 Laser Interferometric XY Measuring System, or equivalent, with the following salient characteristics: (A) MEASURED SAMPLES: Reticles, Photomasks 5, 6 and 7 inch universal holder, Wafers: Supports 3- to 8-inch wafers with optional holder; (B) COORDINATE MEASUREMENTS (HARD CHROMIUM PATTERN): Measurement Range: 203.5 X 203.5mm, Measurement Repeatability: 8nm or better (3o); Reproducibility: 8nm or better (3o); Nominal accuracy: 15nm or better (3o); (C)CRITICAL DIMENSION MEASUREMENT (HARD CHROMIUM PATTERN): Measurement Range: 0.8to 30um; Minimum Measurement Pattern: 0.8 x5.0um; Measurement Repeatability: 4nm or better (3o); (D) MEASUREMENT SPECIFICATIONS: Measurement Method: Spot-fixed, stage scan; Detection Method: Pattern edge detection through diffracted light; (E) ALIGNMENT: Auto-Alignment through image processing; (F) RETICLE AND PHOTOMASK HOLDER: Holder: Universal holder; Sample Support: 3 point, non-mechanical support; (G) AUTOMATIC RETICLE AND PHOTOMASK LOADER: Handles Reticles and Photomasks: 5-, 6-, nd 7-inch random set; Number of samples: 7; ***LINE ITEM 0002: INSTALLATION: Offeror shall provide breakdown of equipment, packing, transportation, insurance and installation at NIST. Upon completion of installation and prior to acceptance, the Government shall test the equipment to ensure performance is in accordance with stated specifications.***LINE ITEM 0003: WARRANTY: Offerors shall state warranty coverage provided for proposed equipment.***DELIVERY SHALL BE FOB DESTINATION and be completed not later than 90 days after receipt of the order. The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.***Award shall be made to the offeror whose quote offers the best value to the Government, technical, price, and other factors considered. The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, and 3) Price. Technical and Past Performance, when combined, are equal to Price .***Evaluation of Technical Capability shall be based on the information provided in the quotation. Offerors shall include the make and model of the product, manufacturer sales literature or other product literature which CLEARLY DOCUMENTS that the offered product meets or exceeds the salient characteristics identified above.***Evaluation of Past Performance shall be based on the references provided IAW FAR 52.212-1(b)(10) and/or information provided by NIST or its affiliates. Offerors shall provide a list of at least THREE (3) REFERENCES to whom the same or similar products have been sold. The list of references shall include, at a minimum: The name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed.***Past performance will be evaluated to determine the overall quality of the product and service provided by the offer. Offerors with no relevant past performance shall not be evaluated favorably or unfavorably.***The following provisions and clauses apply to this acquisition: PROVISIONS: 52.212-1, Instructions to Offerors-Commercial Items; and 52.212-3 Offeror Representations and Certifications-Commercial Items. ***CLAUSES: 52.2116 Brand Name or Equal; 52.212-4, Contract Terms and Conditions-Commercial Items; 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders--Commercial Items, including subparagraphs: (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I; (3) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns; (5) 52.219-8, Utilization of Small Business Concerns; (8)(i) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns; (11) 52.222-21, Prohibition of Segregated Facilities; (12) 52.222-26, Equal Opportunity; (13) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (14) 52.222-36, Affirmative Action for Workers with Disabilities; (15) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (16) 52.222-19 Child Labor - Cooperation With Authorities And Remedies; (20) 52.225-5, Trade Agreements; (21) Restrictions on Certain Foreign Purchases (E.O 12722, 12724, 13059, 13067, 13121, and 13129); (24) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration; and Department of Commerce Agency-Level Protest Procedures Level Above the Contracting Officer, which can be downloaded at www.nist.gov/admin/od/contract/agency.htm.***All offerors shall submit the following: 1) Two (2) copies of a quotation which addresses all Line Items; 2) Two copies of the technical description and/or product literature which CLEARLY DOCUMENTS the product meets or exceeds the salient characteristics stated above and meets the needs of the Government in essentially the same manner as the brand name; 3) Description of commercial warranty; 4) Two (2) copies of the most recent published price list(s); and 5) A completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items which may be downloaded at www.arnet.gov/far. ***All quotes should be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Carol A. Wood, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571.***Submission must be received by 3:00 p.m. local time on August 16, 2002. FAX & E-MAIL QUOTES SHALL NOT BE ACCEPTED.
 

Place of Performance

Address: NIST, Shipping & Receiving, 100 Bureau Drive, Gaithersburg, MD

Zip Code: 20899

Country: USA
 

Record

SN00131201-W 20020804/020802213149 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

---

| FSG Index  |  This Issue's Index  |  Today's FBO Daily Index Page |