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FBO DAILY ISSUE OF AUGUST 04, 2002 FBO #0245
SOLICITATION NOTICE

36 -- Used Wafer Stepper System

Notice Date

8/2/2002
 

Notice Type

Solicitation Notice
 

Contracting Office

Department of Commerce, National Oceanic and Atmospheric Administration (NOAA), Mountain Administrative Support Center, 325 Broadway - MC3, Boulder, CO, 80305-3328
 

ZIP Code

80305-3328
 

Solicitation Number

RA134102RP20012
 

Response Due

9/10/2002
 

Archive Date

9/30/2002
 

Point of Contact

Jan Clark, Contract Specialist, Phone (303) 497-6320, Fax (303) 497-3163, - Brenda Summers, Contract Technician, Phone (303) 497-5588, Fax (303) 497-3163,
 

E-Mail Address

jan.clark@noaa.gov, brenda.s.summers@noaa.gov
 

Description

This is a combined synopsis/solicitation for a commercial item prepared in accordance with the format in FAR Subpart 12.6, as supplemented by additional information included in this notice and in accordance with the simplified acquisition procedures authorized in FAR Part 13. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will NOT be issued. The solicitation number is RA134102RP20012 and issued as a request for proposal (RFP). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2001-08. The NAICS Code is 333295. Any amendment(s) hereto will only be published in the FedBizOps. The National Institute of Standards and Technology ( NIST) requires a full field I-line stepper to be used in its research on thin film devices. NIST uses thin film technology to make devices that are used in voltage standards, detectors, magnetic devices, quantum computing and other NIST research topics. NIST presently uses a GCA ALS 200 stepper and are upgrading their capabilities. Specifications are as follows: General Information: This is a full field reduction stepper. Field size shall be a minimum of 15mm x 15mm. The system is preferred to be less than 4 years old and not to exceed 8 years old with an expected lifetime of an additional 10 years. The system shall come with one complete set of documentation, including service and installation manuals. Trade-in of NISTs present ALS200 is preferred. Optics: A reduction of 5X is preferred, although 4X is acceptable. The system shall have i-line optics with 0.5 um or better resolution and a 1 um depth of focus over a minimum 15x15mm field. Distortion shall be less than 100 nm throughout the field. The lamp shall have a minimum intensity of 200mW per square centimeter at the wafer with uniformity of better than 2.5% over the 15x15mm field. The system shall provide automatic dose control. Reticle Handling: The stepper should handle 125 mm (5-inch) reticles, although 150 mm (6 inch) reticles are acceptable. A minimum of 6 reticle library with barcode reader, although 10 is preferred. There shall be 4 programmable masking blades for the reticle. Wafer Handling: This tool shall handle 76mm (3 inch) wafers as a SEMI-standard size with 100 mm (4 inch) wafers being used as well. The change-over from 76 mm to 100 mm shall be able to be performed by NIST personnel within 8 hours. The tool shall also be able to expose a single 1cm chip. This chip may be mounted in a 76 or 100 mm wafer fixture or another scheme that the contractor may develop. The system shall be able to auto focus and align on the single 1cm chip. There shall be an automatic wafer loader. Alignment: The overlay shall be better than 0.1 micrometer (mean plus 3 sigma) over a 76 mm wafer per SEMI spec P18-92 and 0.25 um or better alignment over a 1 cm chip when operating in single-chip mode. The system shall auto focus over a 1.0mm minimum range of thickness. There shall be some facility to manually align in a joystick mode. Computer: A modern, stable computer design is important. The computer shall be networked such that job files may be edited off-line. The computer shall have a graphical user interface to ease system operation. The system software shall be able to auto focus on a single 1cm die, as well as the entire wafer. If the software must be customized in order to perform these tasks, patches shall be supplied. If the software will no longer be supported, full software source code shall be supplied including the software patches.Stage: Stage shall have a minimum travel of 150mm with a stepping accuracy of better than 50 nm. The stage shall rotate a minimum of 1 degree on either side of the default. The stage shall have at least 1 mm of vertical travel. Physical: The system shall be adjusted to work at high altitude (1635 m). The entire unit (including enclosure and all racks) is preferred to fit into a 3.2 m wide x 1.3 m deep footprint and not to exceed 3.2m x 2.5 m deep. The system shall be able to withstand momentary loss of power (< 10 seconds) with a restart time less than 30 minutes. Longer outages must be tolerated with less than 1 hour downtime. The system shall come with an environmental chamber to control the temperature to 0.1 degrees C, and the humidity to within 5% RH in a clean room environment. There shall be vibration isolation. Delivery and Installation: Delivery shall be not later than180 days after receipt of contract award at the Department of Commerce/ Boulder Laboratories, Building 1, 325 Broadway, Boulder, CO 80305. The Contractor shall provide all the labor, tools, and equipment necessary to install the machine. Operator level training shall be provided for 5 users at the time of installation. Extensive maintenance training shall also be provided for one person. Installation shall be performed by the contractor with NIST performing pre-installation specified by the contractor. The installation procedure shall minimize down-time to less than 20 days including de-installation of the current stepper. The Contractor is responsible for the removal of the trade-in if it is part of the award. Acceptance: Testing shall be performed by the Contractor at origin by the Contractor and shall consist of the following procedures: (1) Alignment - The Contractor shall demonstrate that the wafer stepper can consistently align exposures to wafer features at the promised registration accuracy (3 sigma). This shall be performed in accordance with the standard acceptance test procedure for system registration as detailed by the original manufacturer of the wafer stepper. This measurement shall conform to overlay measurement definitions as outlined in SEMI SPEC P18-92. (2) Lens Resolution - The Contractor shall demonstrate that the wafer stepper can produce consistent exposures at the promised lens resolution. This shall be performed in accordance with the standard acceptance test procedure for lens resolution as detailed by the original manufacturer of the wafer stepper. The Government reserves the right to have the dimensions of the photoresist images created by the wafer stepper verified by an independent source. (3) Wafer Handler Demonstration - The Contractor demonstrate that the wafer handling system performs to the specifications of the original manufacturer. The wafer stepper will be required to take a wafer from the input cassette, locate the flat with the prealigner, place the wafer on the chuck in the proper location, remove the wafer from the chuck, and place the wafer in the output cassette. This machine will be required to perform this operation successfully for 100 wafers (no assists). (4) Reticle Handler Demonstration - The Contractor shall demonstrate that the reticle handling system performs to the specifications of the original manufacturer. The wafer stepper will be required to successfully identify, load, and align 100 reticles (no assists). Certified copies of all test results shall be submitted to the Government 10 days prior to delivery of the wafer stepper. Warranty: The system shall be warranted for 1 year after installation including all parts and maintenance. Minimum maintenance requirements are: (1) regularly scheduled preventive maintenance by the Contractor at intervals no less frequent than every two months; (2) emergency service shall be up to six (6) service calls over the period of the one year term of the contract; and (3) 24/7 technical telephone support for the full year. When emergency service is necessary, the Contractor shall have a repairperson on-site within 48 hours from the time the service call is made. Trade-In: An existing 15-year-old, ALS-200 stepper manufactured by GCA Corporation that is now the property of NIST is available for trade-in. Any credit offered shall be applied toward the wafer stepper being purchased in this acquisition. The original purchase price of the trade-in stepper was $216,000, serial number ALS-1726. The trade-in is offered on an "as is", "where-is" basis and purchased in 1994. It is available for inspection at the NIST Boulder Labs, 325 Broadway, Boulder, CO. Offerors shall provide a detailed list of facilities requirements. Offerors shall provide a detailed description of how their product meets these specifications including but not limited to, 1) how does the offeror propose to handle 1 cm x 1cm chips? Offerors should describe the proposed process in detail, including pre-alignment, leveling and alignment. What performance (resolution, overlay accuracy, etc.) will be guaranteed for 1 cm x 1 cm chips? 2) What is expected lens lifetime? 3) What was the first year of production for the model being proposed? 4) What was the last year of production for the model being proposed? 5) What is the original manufacturer date for the unit being proposed? 6) If an alignment mark was lost, how may the wafer be aligned manually to some known object on the wafer? 7) In the previous question, what kind of performance degradation should be expected on the alignment accuracy? 8) What are the estimated annual maintenance costs? 9) What is the recommended maintenance schedule? 10) What is the typical up-time of this unit if maintained under a standard maintenance contract? Forms and clauses stipulated herein may be downloaded via the internet at the following address: http://www.arnet.gov/far/. Interested parties are responsible for accessing and downloading documents and forms from that (or any other) site. Firms without access to the internet may call 303/497-5588 and request that copies of the clauses, provisions, and/or forms be either mailed or faxed to them. Forms SF-1449 and 52.212-3 (provision), "Offeror Representations and Certifications - Commercial Items" are hereby provided as an attachments to this announcement. Offers shall include a properly completed and signed Standard Form 1449. The firm fixed-price for CLIN 0001 shall include the price for wafer stepper, FOB Destination and includes warranty requirements; CLIN 0002 shall include the price for installation and training; CLIN 0003 shall include the price for the Trade-In (if offered). The following provisions and clauses apply to this solicitation: FAR 52.212-1 (OCT 2000) (provision) "Instructions to Offerors - Commercial Items" // FAR 52.212-2 (JAN 1999) (provision) "Evaluation - Commercial Items" evaluation factors in descending order of importance: (1) Past performance of offeror (30%). This must be a commercial model with at least 20 similar units in the field. Offerors shall submit a minimum of 3 references with points of contact for similar units in the field. Offerors shall include a description of the company and service organization; (2) Ability of the system to be maintained for a lifetime of 10 years (20%). This includes the age of the proposed unit and subsystems, availability of spare parts, and the estimated yearly cost of operation. Yearly costs associated with operating the tool should be estimated in the proposal including typical annual maintenance costs, and a recommended maintenance schedule; (3) Description of the mechanical subsystems and its ability to meet or exceed the stated specifications (20%). This should include a detailed description of the operation of the wafer handler and stages, and description of the enclosure and overall size of the system; (4) Description of the optics and its ability to meet or exceed the stated specifications (15%). This should include a detailed description of the operation of alignment, wafer leveling, autofocus, and reticle system. Data shall also be provided concerning the expected lifetime of the lens.; (5) Usability (15%). Offerors will graded on the usability of system operation. This includes the loading and unloading of 76 mm wafers, the loading and unloading of 1 cm chips, changing reticles, and the flexibility of the alignment system; and (6) Price. Past performance (criteria 1) and technical (criteria 2-5), when combined, are more important than price. // FAR 52.212-3 (JULY 2002) (provision) "Offeror Representations and Certifications - Commercial Items" (NOTE: Offerors shall include with their offers a completed copy of the provision at FAR 52.212-3.) // FAR 52.212-4 (FEB 2002) (clause) "Contract Terms and Conditions - Commercial Items", // FAR 52.212-5 (MAY 2002) (clause) "Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items including the following additional FAR clauses referenced in FAR 52.212-5, subparagraphs (b) (1) with Alt. I, (5), (11), (12), (13), (14, (15), (16), (18), (20), (21) and (24). Award will be made to the offeror presenting the best overall value to the Government. Offers shall be evaluated in accordance with the Test Program procedures at FAR 13.500. The Government reserves the right to make award without discussions. For further information, please contact Jan Clark (303/497-6320). Offers are due at 3:00 P.M.on September 10, 2002 and shall be mailed to: BID DEPOSITORY/ DOC, NOAA, MASC, MC3, Acquisition Management Division, DSRC Room 33-GB506A, 325 Broadway, Boulder, CO 80305-3328. ALL hand-carried offers must be scanned in Building 22 at 325 Broadway in Boulder, Colorado prior to being delivered to the David Skaggs Research Center., Room 33-GB506A, 325 Broadway, Boulder, CO. If they are not scanned, they may be refused. E-MAIL OR FACSIMILE OFFERS WILL NOT BE ACCEPTED. See Numbered Note 12. EMAILADD: MASC.Solicitation@noaa.gov EMAILDESC: NOAA, MASC Acquisition Management Division
 

Web Link

Link to FedBizOpps document.
(http://www.eps.gov/spg/DOC/NOAA/MASC/RA134102RP20012/listing.html)
 

Place of Performance

Address: Department of Commerce/Boulder Laboratories National Institute of Standards and Technology 325 Broadway Boulder, CO

Zip Code: 80305-3328

Country: U.S.
 

Record

SN00131953-F 20020804/020802222147 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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