MODIFICATION
66 -- High Vacuum Electron Beam Deposition System
- Notice Date
- 5/1/2003
- Notice Type
- Modification
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-03-R-CR06
- Response Due
- 5/21/2003
- Archive Date
- 5/14/2004
- Point of Contact
- Alan Crupi, Contract Specialist, Phone 202-767-3595, Fax 202-767-0430, - F. Janilea Bays, Contracting Officer, Phone 202-767-2974, Fax 202-767-0430,
- E-Mail Address
-
crupi@contracts.nrl.navy.mil, bays@contracts.nrl.navy.mil
- Description
- The purpose of this amendment is to extend the date of receipt of proposals, revise the delivery date, address questions from potential offerors, and correct a typographical error in the specification. The requirement is not sole source. It is full and open. The date for receipt of offeror proposals is extended until May 21, 2003, 4:00 PM local time at NRL. Delivery shall be no later than 120 days from date of award. At paragraph 3.9 of the specification, the last sentence should read - The lamps must be capable of heating the substrates to at least 300 degrees C. Question 1. Identify the approximate system chamber overall size. Answer to Question 1. The system chamber size must accommodate the specification at 3.2 - a stainless steel hinged bell jar of at least 20 inches in diameter. Question 2. Identify E-bean source: number of pockets, size of pockets, kW rating. Answer to Question 2. See the specification at 4.1 - The E-gun source tray must include a turret electron beam gun with at least six 15 cc pockets and designed to prevent cross-contamination between pockets. The electron beam gun must have at least a 10 kW rating. Question 3. Identify E-beam power supply kW. Answer to Question 3. See the specification at 4.2 - A 6 kilowatt (kW) constant voltage power supply must be provided for operation of one electron beam source in the chamber, operated at 208 VAC. Question 4. Identify substrate sizes and number, desired uniformity, rotation, dome, planetary. Answer to Question 4. See the specification at 3.9 - The substrate holder must include fixturing that can support five 6-inch SEMI-Standard wafers as well as reducer inserts to hold 2-in., 3-in. and 4-in. wafers and blank inserts to hold wafer pieces. The fixturing must permit normal angle-of incidence deposition in order to facilitate lift-off processing. Holder must provide for rotation of substrates. Rotation must be variable and from 0 to at least 40 rpm. Quartz lamps for infrared heating of substrates must be provided and include a thermocouple for closed loop temperature control by the system computer. Question 5. Identify heating and cooling. Answer to Question 5. See the specification at 3.9 - The lamps must be capable of heating the substrates to at least 500 degrees C. Question 6. Identify rate monitor or controller. Answer to Question 6. See the specification at 5.2 - The system must be provided with a Process controller based upon quartz crystal sensors and have an RS232 computer interface, video display programming panel, dual sensor head and shutter and single source capability, as well as a hand-held power controller and interface connectors. The performance must be equivalent to or better than an Inficon Model XTC/2 controller. Question 7. Identify degree of system automation. Answer to Question 7. See the specification at 5.3 - The contractor must provide a control system that has full automatic, manual and service modes of operation. Question 8. Identify liners. Answer to Question 8. See the specification at 3.6 and 3.7 - The system must have an installed set of stainless steel easily removable evaporation shields for ease of cleaning system. The system must have a spare set of evaporation shields (two sets total). Question 9. Is it acceptable to offer a used FC-1800 system that is refurbished and modified to meet the technical specifications? Answer to Question 9. A refurbished system is acceptable, however the system must meet or exceed a new system warranty in all respects. Question 10. What size/power of e-gun is required? What will the user be evaporating and what coating thickness is required? Answer to Question 10. See Section 4.1 of the specification - E-gun Source and Power Supply. Question 11. Is co-deposition (i.e. - two guns simultaneously) required or anticipated? Answer to Question 11. The answer is no. Question 12. What size substrates? Is rotation required? Is cooling or heating required? Answer to Question 12. See Section 3.9 of the specification. The lamps must be capable of heating the substrates to at least 300 degrees C. Question 13. Is automatic source control (e.g. rate controller and source shutters) required? Answer to Question 13. See Section 5.2 of the specification.
- Place of Performance
- Address: Contractor Facility
- Record
- SN00316317-W 20030503/030502074049 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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