MODIFICATION
66 -- Low Pressure Chemical Vapor Deposition System
- Notice Date
- 5/28/2003
- Notice Type
- Modification
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-03-R-DL05
- Response Due
- 6/4/2003
- Archive Date
- 4/14/2004
- Point of Contact
- Dolorees Lockamy, Contract Specialist, Phone 202-767-3782, Fax 202-767-0430,
- E-Mail Address
-
lockamy@contracts.nrl.navy.mil
- Description
- This amendment is issued to answer questions from potential offerors. Question 1. The furnace should be equipped with MKS Mass Flow Controllers, can you inform me on which type of MKS Mass Flow Controller is preferred? Answer. Type 1179 or equivalent are preferred. Metal seals are to be used. Question 2. Is the solicitation for new or refurbished equipment? Can either be quoted? Answer. Either can be quoted. However a new equipment warranty is required. Question 3. If a new furnace is required, would the use of certain refurbished sub-components such as LPCVD pump and/or mass flow controllers be allowed in order to reduce the price? Answer. Yes, as long as each piece is identified as used and the system carries a complete new equipment warranty. Question 4. Regarding facilities preparation 2.0, can you provide more details regarding the "designated location"? For example, will all the necessary facilities including power, water and gas be plumbed to the furnace with the understanding that the furnace supplier will make the final connections? Please specify if other. Answer. The NRL will be responsible for providing the necessary facilities at the designated location for furnace. The contractor must make the final connections. Question 5. It appears the specification is written exclusively for a MRL furnace. Does this preclude a furnace that meets all specified performance criteria, but deviates from the over-specified design details listed in the RFQ? Are "Or Equivalent" items acceptable? Answer. Equivalent items are acceptable. Question 6. Paragraph 4.6 of the spec calls for 8 gas loops. The Nitride and Poly processes require 5 loops. Are the other 3 loops to be spares? If so is there a desired configuration for these 3 loops? Answer. 4.6 The gas module must be capable of controlling at least 8 mass flow controllers. 4.8 Note: A loop is a valve, plumbing & mass flow controller (MFC) assembly for one gas. There is no desired configuration since there are no spare loops only the gas module capacity for more mfc's. Question 7. Paragraph 8.1, Auto loading System, sub line #4 "Must fit in existing furnace footprint, and add no more than 6" to overall height". What are the maximum height, width and length dimensions for the entire furnace? Answer. Maximum dimensions are 8 ft high x 4ft deep by 8ft long. Question 8. Is a small footprint 4 stack furnace populated with 2 tubes per the spec (capable of accepting 2 additional tube in the future) desired? Or are 2 individual single tubes, tabletop or other, desired? Answer. Either configuration is acceptable as long as the required specifications are met. The Response Date is changed to June 4, 2003.
- Place of Performance
- Address: NRL
- Record
- SN00333675-W 20030530/030528213624 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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