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FBO DAILY ISSUE OF JULY 17, 2003 FBO #0595
SOLICITATION NOTICE

66 -- PROFILOMETER

Notice Date

7/15/2003
 

Notice Type

Solicitation Notice
 

Contracting Office

Department of Commerce, National Oceanic and Atmospheric Administration (NOAA), Mountain Administrative Support Center, 325 Broadway - MC3, Boulder, CO, 80305-3328
 

ZIP Code

80305-3328
 

Solicitation Number

Reference-Number-NB814000304116MAS
 

Response Due

8/8/2003
 

Archive Date

8/23/2003
 

Point of Contact

Michelle Sandoval, Purchasing Agent, Phone (303) 497-3983, Fax (303) 497-3163,
 

E-Mail Address

michelle.sandoval@noaa.gov
 

Description

The U.S. Department of Commerce, National Institute of Standards & Technology (NIST) has a requirement for a Stylus-type Profilometer for use in microcircuit fabrication. This type of profilometer performs topographic measurements on the surface of a substrate during microcircuit fabrication. The profilometer system must meet the following technical specifications and warranty requirements: TECHNICAL REQUIREMENTS. The unit and all accessories must be new and include a complete set of manuals; operation and service. This set must include the manuals for all accessories connected to profilometer, e.g. computer. The service manual must contain electrical schematics for the profilometer unit. The electrical requirements for the complete system, including its accessories, must be 110-130 volts and 60 Hertz AC. The measuring apparatus must meet the following criteria: 1) vertical travel of 100 microns or greater. 2) horizontal scan of 10 mm or greater. 3) 30,000 data points or greater per scan. 4) adjustable stylus force range of 0.1 to 10 mg or greater. 5) step height repeatability of 1 nanometer. 6) stylus included with a 5 micron radius. 7) camera with video display with 40X to 100X zoom range or greater. 8) stage must handle up to 100 mm wafers including chips. 9) must handle a sample up to 19 mm thick. 10) isolation hood to be included. 11) only one controlling/interfacing computer. 12) user training. The interfacing/controlling computer must be PC compatible with Microsoft Windows XP as its operating system, be network compatible, and include backup CDs of all software. All software user manuals must be included. The computer monitor must be a LCD flat panel appropriate to supplied computer and software. The profilometer controlling/GUI software should include noise reduction methods, average step height measuring methods, ANSI specification calculations, and methods to calculate the maximum positive and negative deviation for the focal plane (TIR). There are three desired options features as follows: 1) vacuum chuck. 2) wafer stress measurement abilities including software. 3) vibration isolation table. REFERENCE REQUIREMENTS. Supply contact information of three current users of proposed profilometer model to use as references. WARRANTY REQUIREMENTS. All components, materials, labor and travel shall be covered by a one year warranty. Technical merit, as well as price, will be considered in selecting a vendor. Technical merit will be evaluated by the following factors: 1) Technical - 40%. 2) Warranty - 30%. 3) References - 30%. As technical merit becomes more equal price beomes a greater factor. This procurement is being conducted per FAR Part 13.1, Simplified Acquisition Procedures (NTE $100K). Technical questions must be submitted in writing to the Contracting Officer by fax or by email. You may submit your proposal by fax or by mail. Proposal must be received on or before close of business August 8, 2003. Please include delivery date, F.O.B. point, business size, Federal Taxpayer Identification Number, and Dun and Bradstreet Number. Terms and Conditions may be found on http://arnet.gov and agency level protest procedures can be fond on web site http://oamweb.osec.doc.gov/CONOPS/#REFERENCE. Hard copy in full text available from office address and phone number listed in notice. Anticipated award date August 13, 2003.
 

Place of Performance

Address: U.S. Department of Commerce, National Institute of Standards & Technology (NIST), 325 Broadway, Boulder, Colorado

Zip Code: 80305

Country: USA
 

Record

SN00371420-W 20030717/030715213249 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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