Loren Data's SAM Daily™

FBO DAILY ISSUE OF AUGUST 18, 2003 FBO #0627
SOLICITATION NOTICE

66 -- Rapid Thermal Processing System

Notice Date

8/16/2003
 

Notice Type

Solicitation Notice
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

SB1341-03-Q-0808
 

Response Due

8/29/2003
 

Archive Date

9/13/2003
 

Point of Contact

Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884, - Patrick Staines, Contract Specialist, Phone (301)975-6335, Fax (301)975-8884,
 

E-Mail Address

carol.wood@nist.gov, Patrick.Staines@nist.gov
 

Description

THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS UNDER THE AUTHORITY OF THE FEDERAL ACQUISITION REGULATION (FAR) SUBPART 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS, AND IS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THIS SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2001-15. *** The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This acquisition is unrestricted and all responsible parties may submit a quote. ***The National Institute of Standards and Technology (NIST), has a requirement for a Rapid Thermal Processing System. The system shall be used by the NIST Nanofabrication Facility to quickly (seconds to minutes) anneal semiconductor and other materials at high temperatures (up to 1300 degrees C). ***All responsible parties shall provide a quote for the following line items: LINE ITEM 0001: Rapid Thermal Processing System with the following components and meeting all of the following required specifications: (A) CHAMBER CHARACTERISTICS: Manually loaded and capable of processing substrates up to 150 mm in diameter including pieces of wafers; Semiconductor grade quartz processing chamber; (B) TEMPERATURE/HEATING CHARACTERISTICS: Tungsten-halogen lamp heating; Temperature range: 250-1300 degrees C; Switchable temperature measurement between thermocouple and pyrometer, and closed loop temperature control for 300-1300 degrees C; Steady state temperature stability: plus/minus 2 degrees C; Temperature control repeatability: plus/minus 2 degrees C; Temperature accuracy: plus/minus 2 degrees C; Heating rate: 10-250 degrees C per second, user controllable; Cooling rate: 10-150 degrees C per second; Safety interlock for low cooling water/air flow; Temperature uniformity: plus/minus 5 degrees C over a 150 mm wafer; Maximum annealing time at least 30 minutes; Temperature calibration with 150 mm thermocouple wafer having quick connector. (C) GAS LINE CHARACTERISTICS: Four (4) Mass Flow Controller (MFC) controlled gas lines with computer control and expandable to six (6) lines; Electropolished stainless steel (316 L) gas plumbing with VCR connectors; System should include gas manifold and filters. (D) COMPUTER AND SOFTWARE CHARACTERISTICS: The RTP system must be controlled by a computer including: real time process control, real time data collection, and real time graphics display. The computer shall include software for RTP system diagnostics and configuration. The software should include the ability to edit and save recipes (recipe management). The computer shall be configured (memory, speed, disc storage, video) with no less than the minimum requirement to perform the necessary tasks and shall include the monitor, all necessary cables, and software. Network hardware and software shall be included, installed, configured, interfaced, and communicate with NIST's existing network. NIST currently has the following network software running on NIST existing computers: Windows 2000 or later (XP pro is preferred), Microsoft TCP/IP (FTP, http, telnet). The computer shall have the current versions, appropriate licenses for the operating system, network software, and any other software needed to operate. (E) INSTALLATION AND TRAINING: Installation shall include unpacking and set-up of all equipment, hook up of all cables and wiring, turn-key start-up, demonstration of all specifications and troubleshooting of all problems encountered. Training shall include demonstration of all aspects of the RTP system for at least five (5) NIST personnel on-site. Delivery and installation shall be scheduled with the NIST Technical Contact who will be identified upon award. (F) WARRANTY: The Contractor shall provide a minimum one year on-site warranty covering all parts, labor and travel. The warranty period shall commence upon successful completion of delivery, installation, and demonstration of specifications. LINE ITEMS 0002, 0003, 0004, & 0005 ARE OPTION LINE ITEMS. Quoters shall provide prices for all line items. Based on the availability of funds, options may be exercised at the time of award. In price evaluation, option line item prices will be considered. LINE ITEM 0002 (OPTION): Susceptor holders and covers for 150 mm wafers to minimize deposition on tube walls and reduce cleaning requirements. Each susceptor holder should accommodate 2 inch, 3 inch, 4 inch, 5 inch, 6 inch and pieces of wafers. LINE ITEM 0003 (OPTION): Thermocouple with quick connector. LINE ITEM 0004 (OPTION): Replacement Quartz Processing Chamber including tube and tray. LINE ITEM 0005 (OPTION): Replacement tungsten-halogen lamps. ***Delivery shall be FOB DESTINATION. Delivery, installation and training are contingent on the completion of the construction of a new laboratory. Estimated completion date is December 2004. The Government shall notify the Contractor within a reasonable time to allow for production, delivery and installation of all equipment. Delivery, installation and training shall be completed not later than one year from the date of award. ***FOB DESTINATION means: The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The Contractor shall deliver the equipment to NIST, Shipping & Receiving, 100 Bureau Drive, Gaithersburg, MD. ***Award shall be made to the party whose quote offers the best value to the Government, technical, price, and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, and 3) Price. Technical and Past Performance, when combined, are more important than price. Evaluation of Technical Capability shall be based on the information provided in the quotation. Quoters shall include the manufacturer, make and model of the products, manufacturer sales literature or other product literature which addresses all specifications, and clearly documents that the offered product(s) meet or exceed the specifications stated above. Evaluation of Past Performance shall be based on the references provided IAW FAR 52.212-1(b)(10). Offerors shall provide a list of at least three (3) references to whom the same or similar equipment has been provided. The list of references shall include, at a minimum: The name of the company or organization and the reference contact person; the telephone number of the reference contact person; the contract or grant number; the amount of the contract; the address and telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. ***The following provisions and clauses apply to this acquistion: PROVISIONS: 52.204-6 Data Universal Numbering System (DUNS) Number; 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offeror Representations and Certifications-Commercial Items; 52.219-22 Small Disadvantaged Business Status. CLAUSES: 52.212-4 Contract Terms and Conditions-Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items including subparagraphs: (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I; (3) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns (if the offeror elects to waive the preference, it shall so indicate in its' offer); (7) 52.219-8, Utilization of Small Business Concerns; (10) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns (if the offeror elects to waive the preference, it shall so indicate in its' offer); (13) 52.222-3, Convict Labor; (14) 52.222-19, Child Labor-Cooperation with Authorities and Remedies; (15) 52.222-21, Prohibition of Segregated Facilities; (16) 52.222-26, Equal Opportunity; (17) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (18) 52.222-36, Affirmative Action for Workers with Disabilities; (19) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (22) 52.225-3, Buy American Act-North American Free Trade Agreement-Israeli Trade Act (JUNE 2003); (24) 52.225-13 Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; and (30) 52.232-34, Payment by Electronic Funds Transfer--Other than Central Contractor Registration. 52.217-4 Evaluation of Options Exercised at Time of Contract Award (JUNE 1988); 52.217-7 Option for Increased Quantity-Separately Price Line Item (MAR 1989); Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. ***All quoters shall submit the following: 1) An original and two (2) copies of a quotation which addresses all Line Items; 2) Two (2) copies of the technical description and/or product literature; 3) Description of commercial warranty; 4) Two (2) copies of the most recent published price list(s); and 5) A completed copy of the following provisions: 52.204-6 Data Universal Numbering System (DUNS) Number; 52.212-3 Offeror Representations and Certifications-Commercial Items; and 52.219-22 Small Disadvantaged Business Status. All provisions may be downloaded at www.acqnet.gov/far. ***All quotes shall be sent to the National Institute of Standards and Technology, Acquisition and Logistics Division, Attn: Carol A. Wood, Building 301, Room B129, 100 Bureau Drive, Stop 3571, Gaithersburg, MD 20899-3571. All quoters shall ensure the RFQ number is visible on the outermost packaging.***Submission shall be received by 3:00 p.m. local time on August 29, 2003. FAX & E-MAIL QUOTES SHALL NOT BE ACCEPTED.
 

Place of Performance

Address: NIST, Shipping & Receiving, 100 Bureau Drive, Gaithersburg, MD

Zip Code: 20899

Country: USA
 

Record

SN00404065-W 20030818/030816213223 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

---

| FSG Index  |  This Issue's Index  |  Today's FBO Daily Index Page |