Loren Data's SAM Daily™

FBO DAILY ISSUE OF SEPTEMBER 04, 2003 FBO #0646
MODIFICATION

66 -- Physical Vapor Deposition Systems for NIST Advanced Measurement Laboratory, Nanofabrication Facility

Notice Date

9/2/2003
 

Notice Type

Modification
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

SB1341-03-Q-0802
 

Response Due

9/5/2003
 

Archive Date

9/20/2003
 

Point of Contact

Joseph Widdup, Contract Specialist, Phone (301) 975-6324, Fax (301) 975-8884,
 

E-Mail Address

joseph.widdup@nist.gov
 

Description

ADDITIONAL QUESTIONS AND ANSWERS FOR THIS SOLICITATION FOLLOW. ALL OTHER TERMS AND CONDITIONS OF THE SOLICITATION REMAIN UNCHANGED. QUESTION 5: All systems: Is the load size for the systems one [1], 6 wafer maximum or multiple wafers, if multiple how many? [Note; If multiple the next step is a load of four or six.] ANSWER TO QUESTION 5: The systems must accept small samples up to 6 inch wafer size. Multiple wafers may fit on substrate chuck. QUESTION 6: All systems: Under Substrate Fixture Characteristics can you explain what is meant by remote operation. ANSWER TO QUESTION 6: The deposition start and stop must be controlled by the deposition rate monitor, this would involve remote shutter and power control. QUESTION 7: Sputter system: Is there a preference for a Cryo or Turbo [Cryo would give you the most in common components]? ANSWER TO QUESTION 7: 300 l/s turbopump for the sputter system. Cryo’s on the thermal system and thermal/e-beam system. QUESTION 8: Sputter System: Do you require the system to allow a field upgrade for a load lock? ANSWER TO QUESTION 8: Not required.
 

Web Link

Link to FedBizOpps document.
(http://www.eps.gov/spg/DOC/NIST/AcAsD/SB1341-03-Q-0802/listing.html)
 

Place of Performance

Address: Gaithersburg, MD

Zip Code: 20899

Country: USA
 

Record

SN00423037-F 20030904/030903084017 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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