Loren Data's SAM Daily™

FBO DAILY ISSUE OF SEPTEMBER 06, 2003 FBO #0648
MODIFICATION

66 -- Physical Vapor Deposition Systems for NIST Advanced Measurement Laboratory, Nanofabrication Facility

Notice Date

9/4/2003
 

Notice Type

Modification
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
 

ZIP Code

20899-3571
 

Solicitation Number

SB1341-03-Q-0802
 

Response Due

9/5/2003
 

Archive Date

9/20/2003
 

Point of Contact

Joseph Widdup, Contract Specialist, Phone (301) 975-6324, Fax (301) 975-8884,
 

E-Mail Address

joseph.widdup@nist.gov
 

Description

THE PURPOSE OF THIS NOTICE IS TO PROVIDE ADDITIONAL INFORMATION FOR QUESTION 5. ALL OTHER TERMS AND CONDITIONS OF THE SOLICITATION REMAIN UNCHANGED. Question 5: All systems: Is the load size for the systems one [1], 6 wafer maximum or multiple wafers, if multiple how many? [Note; If multiple the next step is a load of four or six.] REVISED ANSWER TO QUESTION 5: The systems must accept small samples up to 6 inch wafer size. Multiple wafers may fit on substrate chuck. NIST performs research applications and processing of silicon devices, and the number of wafers varies with the project work. On average 1-5 wafers are processed at one time. They are 3", 4", 6" and occasionally 8" wafers. About 45% of the work is performed on small samples (6mm-25mm).
 

Place of Performance

Address: Gaithersburg, MD

Zip Code: 20899

Country: USA
 

Record

SN00425009-W 20030906/030904213123 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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