SOLICITATION NOTICE
66 -- Thermal Field Emission Scanning Electron Microscope
- Notice Date
- 1/9/2004
- Notice Type
- Solicitation Notice
- Contracting Office
- Other Defense Agencies, Office of the Secretary of Defense, Defense Microelectronics Activity, Contracting Division 4234 54th Street, Building 620, McCellan, CA, 95652-1521
- ZIP Code
- 95652-1521
- Solicitation Number
- H94003-04-R-4003
- Response Due
- 1/29/2004
- Archive Date
- 2/13/2004
- Point of Contact
- Judy Hilton, Contracting Officer, Phone (916) 231-1526,
- E-Mail Address
-
hilton@dmea.osd.mil
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6 as supplemented with additional information included in this notice. This announcement constitutes the solicitation. The NAICS code is 334516 and the size standard for this requirement is 500 employees. Solicitationis issued as a Request for Quotation H94003-04-R-4003. This requirement is for a Thermal FESEM (Field Emission Scanning Electron Microscope) which shall meet or exceed the following minimum requirements: Computer controlled, automated FESEM with and controlled by Microsoft Windows 2000 Professional operating system and an accompanying graphical user interface (GUI); two fixed hard drives of at least 80GB (unformatted capacity) each, DVD-R/CD-R reader/writer, one 3.5" floppy drive; USB 1.0/2.0, Firewire and 10/100BaseT ports, two 5.25" expansion bays (or one 3.5" and one 5.25" expansion bay), and software to capture and archive FESEM images to hard drives; Dual 17" or 18" flat panel TFT/LCD displays with E-Mouse switchover between dual FESEM displays and EDS display; Native FESEM GUI file saving shall provide for file name length of twenty (20) characters or greater with automatic sequential numbering of filenames; Thermally assisted Schottky field emission source is required; Beam voltage from 200V or less to 30KV in 100V steps or less; Beam current up to at least 20nA with beam stability of 0.2%/hour or better; User alignment of beam and gun tilt setup parameters with non-volatile storage of each setup; Beam wobble for aperture centering; Resolution of 1nm or better at 15KV, 2nm or better at 1KV; Focus range from 1mm to 50mm working distance (WD) or greater in SE mode and 1mm to 7mm WD or greater at 1KV in ultra high resolution mode or normal high resolution mode; Magnification range from 20X to 500KX (or greater when referenced to a 4" by 5" Polaroid Type 55 print) with automatic compensation for WD and magnification; Manual user interface unit with knobs for magnification, focus, X and Y shift and stigmation; If used, final aperture strip shall be heated, or configured to reduce contamination and extend aperture lifetime; Final apertures shall allow manual alignment or automated computer assisted alignment of the apertures and selection of at least 4 different aperture diameters; Scanning line times of 0.21ms to 240ms; Lines per frame of 480 or greater to 3072 or greater; Electronic scan rotation in integer degrees from 0 to 360; Split screen mode; Dual magnification mode; Image saving as TIFF with tagged parameter list in header; User selectable image and parameter annotation (annotation shall include user-enabled/disabled automatic inclusion of KV, WD, detector mode, spot size and micron marker and user-entered free-field text and numeric entry all at the bottom of the image and conditional as user-selected white text on solid black annotation frame or as white text on FESEM image without solid black frame); Computer assisted on-screen multiple dimensional measuring annotation in both X and Y directions with numeric values presented in the screen image and saved to disk; Live imaging as averaged or integrated (inclusive) with user-selectable number of frames; Video hard copy unit to produce hard copy of images similar to 4x5 Polaroid film; User-controlled, via software user interface GUI, integrated IR-CCD chamber camera; Everhart-Thornley SE detector; Through-the-lens/in-lens SE detector (not an "immersion" detector); Variable pressure charge reduction method for operation between 5KV and 20KV; Motorized retractable Robinson Model 8 BSE detector system; Two-segment solid state STEM detector for both brightfield and darkfield STEM imaging; STEM imaging from 1KX to 100KX or greater with 1nm resolution or better; STEM EDS at zero degrees tilt; STEM detector shall support EDS mapping in STEM mode with resolution of 30nm or better; External source inputs and control of FESEM beam scan for EDS; EDS mode or native capability to optimize collection of x-ray spectra with high image resolution; EDS collection and analysis at zero degrees tilt; Serial RS-232 port with supporting software for query and reporting of FESEM operating conditions and parameters (KV, tilt, WD) and for external control and stabilization of beam position during EDS elemental mapping (beam stabilization commands are generated by a separate EDAX Genesis 2000 EDS/imaging system; EDAX system is not part of this procurement); Mounting plate access for EDAX CryoSpec EDS detector with an FESEM chamber fixed analytical elevation angle of 30 or 35 degrees (EDS detector is not part of this procurement); Mounting plate access for and accommodation of an EDAX/TSL EBSD Pegasus 7000 detector/camera unit (EBSD detector/camera system is not part of this procurement); Capability to display and capture EBSD forward scatter images; Port locations must allow simultaneous capture of EBSD and EDS data at 8mm WD or greater; Port locations must allow simultaneous capture of EDS and Robinson BSE; Capability to mix any of the detector signals with any other detector signal (SE, BSE, STEM, forward scatter) via GUI interface; Stage shall be a five axis motorized automatic eucentric stage (X, Y, Z, rotate, tilt) with 100mm or more of movement each in X and Y directions; The stage shall be able to tilt around a known eucentric WD; The stage and stage software shall allow the specimen to rotate around a specific X and Y location when tilt=0; Tilt range of at least -3 to +70 degrees at 10mm WD; Rotation range shall be continuous; Computer controlled, user-selectable absolute and relative movement of each axis via GUI; Stage fixtures for 12mm and 25mm stubs which have a 3.1mm diameter pin, up to eight standard 3mm TEM grids, wafer-piece holders, 45 and 90 degree pre-tilt stub holders and multi-specimen pin stub holder, metallurgical coupon specimen holder; Stage shall be draw-out type with a specimen exchange load lock and permit a specimen-exchange-to-beam-enable time of less that 5 minutes (time from pump initiation of vented chamber or interchange lock to beam ON); Specimen exchange via the load-lock shall accommodate a specimen height of 3.5cm or greater; Stage shall have a sample touch alarm; Chamber or draw out stage door shall have a port with fifty (50) external feed through connections via D-type connector or two (2) twenty-five (25) pin D-type connectors; Dual magnetic bearing (no lubrication) turbo molecular pump system of 250L/sec capacity or greater; Quiet-running dry scroll mechanical fore pump with exhaust mist trap; Specimen exchange load lock shall have a separate dry pumping system; Self-contained refrigeration-type water chiller with a cooling capacity sufficient to cool column, turbo pump, high voltage assembly, magnetic lenses and column; Self-contained column anti-vibration isolation/stabilization; Automatic air compressor to supply clean, oil-free, and water-free compressed air at 6 Bar (37 L/min maximum) with a 40 dB(A) maximum noise level at 1 meter for column anti-vibration and pneumatic valve control; Loss of AC input power and/or cooling water shall result in a fail-safe operation and shut down of the system; FESEM system shall include a low power, power saving standby mode such that main electronics are not powered but the system retains operation of emitter source and column and chamber vacuum; Maximum mains power consumption for the FESEM shall be 3.5KW or less; Total heat load for FESEM and supporting equipment shall be less than 13,000BTU; Complete system shall fit in a 13' x 9' room including operator seating but excluding air compressor, water chiller, and AC mains transformer; FESEM and support equipment shall operate from single phase 240VAC, 120VAC or combination thereof; One complete set of printed operation and maintenance manuals; One set of all system software on CD (maintenance period software updates shall be provided on CD); one set of operator documentation of CD; One printed copy or CD of or containing schematic diagrams of the EDS and external SEM/BSE video interfaces to the FESEM; One set of dimensioned chamber drawings showing all ports and reference to final lens pole piece; On-site unpacking and installation; Shipping from point of manufacture to installation site; On-site post installation startup and verification of operation; Fork lift and loading dock is not available; Twelve (12) month warranty (including parts and labor); At least one (1) preventative maintenance procedure shall be included per 12 month period; FE gun and aperture strip replacement shall be included in each 12 month warranty or service period--replacement of the FE gun and aperture strip shall be only if necessary--complete alignment shall be included after FE gun replacement, and in such case, the FE gun shall be under replacement warranty for the remainder of the 12 month warranty or service period. An additional 24 month warranty is required as a separate line item in the solicitation. Offerors shall provide brochures or company literature with their proposal that verifies conformance with the Performance Statement. Additionally request you provide information on your company?s two previous sales for the same or similar FESEM; ie, model number, date of sale, and company sold to. For a complete purchase package, send an email request to hilton@dmea.osd.mil. Contractors must be registered in the Central Contractor Registration (CCR) prior to an award. The following FAR clauses apply: 52.212-1, Instructions to Offerors ?Commercial; 52.212-2, Evaluation-Commercial Items; 52.212-3, Offeror Representations and Certifications-Commercial Items; 52.212-4, Contract Terms and Conditions-Commercial Items and 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items, and 52.227-19 Commercial Computer Software-Restricted Rights. All proposals received must include FAR Clause 52.212-3 filled out and included in their bid package. Prices are to be proposed as FOB destination. DPAS rating is C9E. Questions regarding this solicitation should be addressed to J. Hilton at Hilton@dmea.osd.mil. Offerors are due at 3:00PM on 29 Jan 2004.
- Place of Performance
- Address: , 4234 54th Street, McClellan, CA 95652
- Record
- SN00501522-W 20040111/040109212217 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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