SOLICITATION NOTICE
66 -- Optical Profilometer
- Notice Date
- 4/15/2004
- Notice Type
- Solicitation Notice
- NAICS
- 339111
— Laboratory Apparatus and Furniture Manufacturing
- Contracting Office
- US Army Robert Morris Acquisition Center, Adelphi Contracting Division, ATTN: AMSSB-ACA, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX-04-T-0065
- Response Due
- 4/29/2004
- Archive Date
- 6/28/2004
- Point of Contact
- Kathy Harrigan, 301-394-3693
- E-Mail Address
-
Email your questions to US Army Robert Morris Acquisition Center, Adelphi Contracting Division
(kharrigan@arl.army.mil)
- Small Business Set-Aside
- N/A
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii)The solicitation number is W911QX-04-T-0065. This acquisition is issued as a Request for Quote (RFQ).(iii)The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular FAC21.(iv) The associated NAICS code is 339111. The small business size standard is 500.(v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including optio n(s), if applicable): CLIN No. DESCRIPTION QUANTITY 0001 Optical Profilometer 1 (vi) Description of requirements: The required system shall perform step height measurements using an optical system. The system shall be computer controlled to provide output of the data for use in reports and process development. The system shall also include an automated stitching stage to allow large areas to be measured and displayed. The system shall have the capability to handle pieces and wafers up to 6 inches in diameter. The system shall also provide a minimum of .1nm resolution. Requirements and Specifications: The contractor shall provide an optical profiling system that meets the following requirements: C.2.1.1.The system shall be computer controlled with the ability to provide 3 dimensional profiles of the measured sample.C.2.1.2.The system shall provide a work area that can handle 150mm diameter substrates.C.2.1.3. The system shall provide stage tilt ca pabilities to level out the sample.C.2.1.4.The system shall provide a vertical measurement range of at least 0.1nm to 1mm.C.2.1.5.A vertical resolution of at least 1???? for RA measurements.C.2.1.6.The system shall provide for a minimum spatial interval of 0.08um X 0.05um. C.2.1.7. A stitching stage and software to enable large area scans up to 100mm.C.2.1.8.The system shall provide an objective turret capable of handling at least 4 microscope objectives.C.2.1.9.A vacuum chuck C.2.1.10.The contractor shall provide three (3) field of view lenses with values of .5X, 1X and 2.0X.C.2.1.11.The contractor shall provide four (4) objectives with the following values: C.2.1.11.1. 2.5X 20% reflectivity 3.48mm working distance C.2.1.11.2. 5.0X 20% reflectivity 6.71mm working distance C.2.1.11.3. 10X 90% reflectivity, 7.4mm working distance C.2.1.11.4. 50X 90% reflectivity, 3.4mm working distance C.2.1.12. Chassis compatible with a Class 100 clean room environment C.2.2. Within 10 days of contract award, the contractor shall provide a complete list of facility requirements for its profiling system. The contractor shall deliver the profiling system to the US Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783. The contractor shall install the profiling in the facility on a date to be specified by the technican.and shall demonstrate full conformance to the requirements and specifications as described herein. C.2.3. The Contractor shall provide 2 days of user training to include basic machine operation, machine specific data manipulation, and basic maintenance for up to 4 Government personnel. C.2.4. The Contractor shall install the most recent system software and upgrades shall be provided to the Government at no additional cost for a period of 3 years from the date of award of contract. C.2.5 The systems computer shall: include USB 1 capabilities; include a compact disc read write capability (CD-RW); and a one (1) year warranty for all parts and labor. Shipping is destination and included C.3.0 Documentation: The contractor shall provide two (2) complete sets of the operator and maintenance manuals with one o f the sets provided on clean room suitable material ( TexWrite 22 (part no.: TX5815) or on CD. C.4.0 Maintenance and Service: The contractor shall provide technical support via telephone during business hours (8:00 AM to 5:30 PM EST) at no additional cost to the Government for a period of 1 year. The contractor shall provide service calls with req uired repair parts within 48 hours of telephonic notification from the Government Point of Contact. (vii) Delivery is required by 12 weeks after the award although offerors may propose an alternative delivery date, which may be considered. Delivery shall be made to US Army Research Laboratory, ATTN: Shipping and Receiving, 2800 Powder Mill Road, Adelph i, MD 20783-1197. Acceptance shall be performed at same address. The FOB point is Destination.(viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provisio n: NONE (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: The technical capability of the item will be a determination as to whether the proposed product meets the technical specifications based on information furnished by the vendor quote. The Government is not responsible for locating or securing any information, which is not identified in the proposal. If the vendor proposes to modify a product so as to make it conform to the requirement of this solicitation, the vendor shall include a clear description of such proposed modifications and clearly mark any descriptive materls to show modifications. The G overnment will award a contract to the offferor whose offer is determined to be the best value to the Government, with technical factors meeting or exceeding the requirement considered of paramount importance and price factors being of secondary importance . The Government reserves the right to make an award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Represe ntations and Certifications -Commercial Items, with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause NONE(xii) The clause at 52. 212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commer cial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: FAR 52.203.6, FAR 52.219.6, FAR 52.219-8, FAR 52.222-3, FAR 52.222-19, FAR 52.222-21, FAR 52.222-26, FAR 52.222-36, FAR 52.225-1, FAR2 25-13, FAR52.232-33, FAR 52.232-34, FAR 52.232-36.(xiii) The following additional contract requirement(s) or terms and conditions apply: DFARS 252.212-7001, the following DRARS clauses cited in the clause are applicable: DFARS 252.225-7001, DFARS 252.225- 7012, DFARS 252.225-7014, DFARS 252.225-7015, DFARS 252.227-7037. Clauses and provisions can be obtained at http://www.arnet. (xiv)This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as DOC9E.(xv)The following notes apply to this announcement: Number Note 1(xvi) Offers are due on April 29, 2004 by 24:00 hours, ARL Research Laboratory, RMAC-Adelphi, AMSRD-ACC-AC, 2800 Powder Mill Road, Adelphi, MD 20783-1197 or via email to kharrigan@arl.army.mil(xvii) For information regarding this solicitation, please contact Kathy Harrigan, Contract Specialist at 301.394.3693 or email at kharrigan@arl.army.mil
- Place of Performance
- Address: US Army Robert Morris Acquisition Center, Adelphi Contracting Division ATTN: AMSRD-ACC-AC, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Country: US
- Zip Code: 20783-1197
- Record
- SN00566700-W 20040417/040415212303 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
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