SPECIAL NOTICE
A -- Developments at NIST
- Notice Date
- 5/3/2004
- Notice Type
- Special Notice
- NAICS
- 541710
— Research and Development in the Physical, Engineering, and Life Sciences
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
- ZIP Code
- 20899-3571
- Solicitation Number
- SN02-011
- Archive Date
- 5/31/2004
- Point of Contact
- Romena Moy, Contract Specialist, Phone (301) 975-4999, Fax (301) 975-8884,
- E-Mail Address
-
Romena.Moy@nist.gov
- Description
- Researchers at the National Institute of Standards and Technology (NIST) are working on the following technologies. FOR FURTHER INFORMATION, CONTACT THE: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, OFFICE OF TECHNOLOGY PARTNERSHIPS, 100 BUREAU DRIVE, STOP 2200, GAITHERSBURG, MARYLAND 20899; FAX: 301-869-2751. This is not an announcement of a contract action or a grant. *** NIST DOCKET NUMBER: 02-011US Title: Superconformat Metal Deposition Using Derivitized Substrates Description: A two-step process for depositing seam-free and void-free metal metallization for use as conductors in microelectronics has been developed. Superconformal metal deposition in features, e.g., damascene process for filling trenches and vias on a patterned wafer, is achieved in an electrolyte that does not contain a deposition-rate increasing catalyst. The superfill process is accomplished by first adsorbing the catalyst onto the surface of the specimen by immersion in a catalyst-containing solution. After controlled adsorption of a submonolayer coverage of catalyst, metal deposition is then accomplished in a catalyst-free electrolyte that may contain metal deposition-rate inhibiting additives and/or levelers. ***
- Place of Performance
- Address: 100 Bureau Drive, Gaithersburg, MD
- Zip Code: 20899-0001
- Country: USA
- Zip Code: 20899-0001
- Record
- SN00578660-W 20040505/040503211725 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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