SOLICITATION NOTICE
66 -- Evaporation System and Components
- Notice Date
- 6/15/2004
- Notice Type
- Solicitation Notice
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of the Navy, Naval Supply Systems Command, FISC NORFOLK DETACHMENT PHILADELPHIA, 700 Robbins Avenue, Building 2B, Philadelphia, PA, 19111-5083
- ZIP Code
- 19111-5083
- Solicitation Number
- N00140-04-T-1028
- Response Due
- 6/30/2004
- Archive Date
- 7/15/2004
- Point of Contact
- Anita Spriggs, Contract Negotiator, Phone 215-697-9641, Fax 215-697-5418, - Rocco Siravo, Contracting Officer, Phone 215-697-9640, Fax 215-697-5418,
- E-Mail Address
-
anita.spriggs@navy.mil, rocco.siravo@navy.mil
- Description
- This is a COMBINED SYNOPSIS/SOLICITATION for commercial items prepared in accordance with the information in FAR Subpart 12.6, using Simplified Acquisition Procedures under the test program for commercial items found at FAR 13.5, as supplemented with the additional information included in this notice. This announcement constitutes the only solicitation; a written solicitation will not be issued. PAPER COPIES OF THIS SOLICITATION WILL NOT BE AVAILABLE. The RFQ number is N00140-04-T-1028. This solicitation documents and incorporates provisions and clauses in effect through FAC 2001-23 and DFARS Change Notice 20040513. It is the contractor?s responsibility to be familiar with the applicable clauses and provisions. The clauses may be accessed in full text at these addresses: www.arnet.gov/far and www.dtic.mil/dfars. The NAICS code is 333295. The Small Business Standard is 500 employees. This is a competitive, unrestricted action. The FISC Norfolk Detachment Philadelphia requests responses from qualified sources capable of providing: 0001 Electron Beam Gun Evaporation System, Temescal Model BJD-2000 or Equal, (1 System), including: 0001AA Batch Loading Vacuum Chamber (1 Each); 0001AB 20-Inch Diameter Hinged Bell Jar, (1 Each); 0001AC Electric Hoist (1 Each); 0001AD VV0220 Clear Viewpoint (1 Each); 0001AE Wide-Angle Polarized Window (1 Each), Temescal Model VV0440; 0001AF Removable Evaporation Shields (1 Each); 0001AG Evaporation Shields, Spare Set (1 Each); 0001AH Drop-Down, Swing-Out Source Tray (1 Each); 0001AJ RGA Port with 2.75 Inch Diameter Conflat Metal-Sealed Flange (1 Each); 0001AK Water-Cooled Source Chamber and Bell Jar (1 Each); 0001AL Instruction Manuals with CD ROM (1 SE); 0001AM Temescal Model STIH-270-2CK with 6x15cc Source Tray (1 Each); 0001AN Temescal Model CV-6S Power Supply (1 Each); 0001AP Temescal Model TP-8 Substrate Holder (1 Each); 0001AQ Temescal Control System (1 Each); 0001AR Inficon Model XTC/2 Process Controller (1 Each); 0001AS CTI Model CT-8 ?On-board High Vacuum Pump (1 Each); 0001AT Edward?s Model E2M40 Roughing Pump (1 Each). The Evaporation System must meet the following minimum requirements. Basic Design: 1) Batch Loading Vacuum Chamber including a mechanical assist for top loading systems; 2) Appropriate viewports located in the source and product chambers; 3) Removable evaporation shields; and 4) One set of spare evaporation shields. Source Tray: 1) 10 kW rated Electron Beam Gun.; 2) At least (6) crucibles that holds 15 cc of the source material; 3) Turret Index Controller; and 4) Shutter and Shutter Controller. Source Materials: System must be capable of evaporating the following materials: Metals: Au, Ag, Ni, Cr, Al, Pt, W. Semiconductors: Si. Dielectrics: SiO2, Silicon Nitride, Alumina. Power Supply: 1) 6 kW constant voltage power supply; 2) Electrical Power - 208 VAC, 60-Hz, 3-phase. Substrate Holder: 1) Capable of handling (10) 3? SEMI-Standard Wafers; 2) Provide for an angle of incidence tolerance of +/- 4.5 degrees (which correlates to a source to sample distance of greater than 19?); 3) System must be upgradeable for handling 4? wafers with the same angle of incidence requirement. Upgrade cannot be valued at greater than 10% of the system price. Control System: 1) Windows based control system that is able to run system in fully-automatic, manual and service modes; 2) System must be able to control all pumps, valves, drives, depositions source, power supply, gas systems, gauges, and substrate heating; 3) Process controller for multiple layer deposition for multiple sources; the process controller must be able to control deposition rate, and read thickness from the vibrating quartz crystal; 4) Vibrating quartz crystal for in-situ thickness monitoring; and 5) Computer Interface (RS232 or GPIB) that will enable the user to record all information available to the process controller to a text file. The user should be able to specify the desired parameters and sampling rate. Substrate Heating: 1) 4 kW of Infrared Substrate heating that provides a uniform sample temperature up to 300 C; and 2) Optical Thermal Probe and Temperature Controller. Vacuum System: 1) Properly sized roughly pump; and 2) High Vacuum Pump - Heavy Duty Cryogenic Pump capable of achieving a 5x10-7 torr vacuum in an 8-hour period. Cooling System: Utilize Standard Plumbing. Start-Up: To be performed by a qualified Field Service Engineer at the Government site. Responsibility and Inspection: Unless otherwise specified in the order, the supplier is responsible for the performance of all inspection requirements and quality control. The delivery schedule is within 18 weeks after receipt of purchase order. The requirement includes contractor installation, start-up, and basic system operation training. The Temescal Thin Film Coating web site is: http://www.bocedwards.com/index.cfm?coating_system/temescal/temescal_overview.cfm~content The following FAR provision and clauses are applicable to this procurement: 52.212-1, Instructions to Offerors - Commercial Items. Addenda to FAR 52.212-1: 52.211-6, Brand Name or Equal, and DFARS 252.204-7004, Required Central Contractor Registration (CCR). Quoters must be registered in the CCR database to be considered for award. Registration is free and can be completed on-line at https://www.ccr.dlis.dla.mil/ccr/scripts/index.html. 52.212-3 ALT I, Offeror Representations and Certifications - Commercial Items; 252.225-7000, Buy American Act ? Balance of Payments Program Certificate. 52.212-4, Contract Terms and Conditions - Commercial Items. 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items, including: 52.203-6, Restrictions on Subcontractor Sales to the Government; 52.219-8, Utilization of Small Business Concerns; 52.222-3, Convict Labor; 52.222-19, Child Labor?Cooperation with Authorities and Remedies; 52.222-21, Prohibition of Segregated Facilities; 52.222-26, Equal Opportunity; 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; 52-222-36, Affirmative Action for Workers with Disabilities; 52-222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; 52.232-33, Payment by Electronic Funds Transfer?Central Contractor Registration. Quoters shall include a completed copy of 52.212-3 ALT I with quotes. Additional contract terms and conditions applicable to this procurement are: 52.247-35, F.o.b. Destination, within Consignee?s Premises; 252.212-7000, Offeror Representations and Certifications - Commercial Items; and 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, including 52.203-3, Gratuities; 252.225-7001, Buy American Act and Balance of Payments Program; 252.225-7002, Qualifying Country Sources As Subcontractors; 252.225-7012, Preference for Certain Domestic Commodities; 252.225-7014, Preference for Domestic Specialty Metals; 252.232-7003, Electronic Submission of Payment Requests; 252.243-7002, Requests for Equitable Adjustment. The Year 2000 Warranty - Commercial Items applies. 52.212-2, Evaluation - Commercial Items is applicable to this procurement;, the award will be based on an evaluation of past performance and price. The Government intends to award a firm-fixed-price type purchase order to the eligible, responsible quoter whose quotation represents the best value considering both past performance and price, with past performance more important than price. PAST PERFORMANCE FACTOR: The quoter shall submit, as part of its quotation, information on previously performed contracts or on-going contracts that are similar to the item description in the solicitation performed for Federal, State or local Governments, and for commercial firms. Information shall be provided on either 1) all such contracts within the past three years, or 2) the last three such contracts performed, whichever is fewer, and shall be limited to the name and address of the organization for which the product was supplied and services were performed and the number (phone, fax or Internet) of a contact for each contract listed. The quoter should not describe past performance history in the quotation. The information should include, however, discussion of any major problems encountered on the contracts listed and the corrective actions taken to resolve them. The information may also include a description of any quality awards earned by the quoter. The Government reserves the right to obtain information for use in the evaluation of past performance from any and all sources including sources outside of the Government. Quoters lacking relevant past performance history will not be evaluated favorably or unfavorably on past performance. However, the quotation of a company with no relevant past performance history, while not rated favorably or unfavorably for past performance, may not represent the most advantageous quotation to the Government and thus, may be an unsuccessful quotation when compared to the responses of other quoters. The quoter should provide the information requested above for past performance evaluation, or affirmatively state that it possesses no relevant directly related or similar past performance. The assessment of the quoter?s past performance will be used as a means of evaluating the relative capability of the responder and other competitors to successfully meet the requirements of the RFQ. The Government will give greater consideration to the contracts that the Government feels are most relevant to the RFQ. Oral quotations are not acceptable in response to this notice. All quotations shall include price(s), FOB Destination, a point of contact, name and phone number, GSA contract number if applicable, business size, delivery and installation schedule, and payment terms. Each response must clearly indicate the capability of the quoter to meet all specifications and requirements. Responses to this notice are required, in writing, by 25 June 2004, and shall be mailed to Anita Spriggs, Contract Specialist, Code 02P21F, 700 Robbins Avenue, Building 2B, FISC Norfolk Det Philadelphia, Philadelphia, PA 19111-5083; sent to facsimile to (215) 697-5418; or emailed to anita.spriggs@navy.mil. Quotations over 10 pages in total will not be accepted by facsimile. All responsible sources may submit a quotation for consideration by the FISC Norfolk Detachment Philadelphia. See Numbered Note 12.
- Place of Performance
- Address: U.S. NAVAL ACADEMY, 181 WAIWRIGHT ROAD, ANNAPOLIS, MD
- Zip Code: 21402-5007
- Country: U.S.A.
- Zip Code: 21402-5007
- Record
- SN00603865-W 20040617/040615212246 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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