MODIFICATION
59 -- Jet Vapor Deposition Tool
- Notice Date
- 6/16/2004
- Notice Type
- Modification
- NAICS
- 334413
— Semiconductor and Related Device Manufacturing
- Contracting Office
- US Army Robert Morris Acquisition Center, Adelphi Contracting Division, ATTN: AMSSB-ACA, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX-04-T-0090
- Response Due
- 6/25/2004
- Archive Date
- 8/24/2004
- Point of Contact
- Kathy Harrigan, 301-394-3693
- E-Mail Address
-
Email your questions to US Army Robert Morris Acquisition Center, Adelphi Contracting Division
(kharrigan@arl.army.mil)
- Small Business Set-Aside
- N/A
- Description
- Amended Combined Synopsis/Solicitation W911QX-04-T-0090 The following four paragraphs are changed to read: C.1.2.10 The chamber shall include 2, 4 inch o-ring flanges on the top for jet source mounting. C.1.2.11 The chamber shall include 2, 4 inch o-ring flanges on the side to provide a view port and an upgrade path. C.2.1.1 The system shall process a single 6 inch wafer at a time. C.2.1.16 The system shall demonstrate 3 percent or better thickness control across a 2 inch wafer for coating thicknesses greater than 1 micron. The following paragraphs are added: C.2.1.17 The system shall meet current code as stated for NEMA (National Electrical Manufacturers Association) standards for the operation of equipment at voltages and currents available through the system. The system shall also conform to OSHA (Occupati onal Safety and Health Administration) and SEMI (Semiconductor Equipment and Manufacturing International) standards to include protection from high voltages, rotating or moving components, high/low temperatures, and all general safety rules. C.2.1.18 The system shall have an emergency shut off capability that mounts to the system to allow a single EMO (Emergency Off) button to control the entire machine operation. C.2.1.19 The contractor shall install the pump under or behind the tool. The contractor shall connect the vacuum using o-ring seals while the plumbing from the valve to the pump shall be made from the metal bellows designed for pumping applications. C.2.2. The contractor shall supply a data description of the utility requirements of the tool 30 days before the tool is delivered. The data shall include a system foot print of all subsystems such as the vacuum pump, power requirements (phase, current, voltage, and location of power taps and any wall plug requirements), cooling water requirements (including flow rates, location of inlet/outlets on the tool and any special requirements like temperature), gas inlet requirements including location on tool, fitting type, gas pressure and flow requirements. The contractor will have an opportunity to request Progress Payments as stated in FAR Clause 52.232-13. To present a quote, please forward all documents as stated in combined synopsis/solicitation W911QX-04-T-0090 by the 24:00 hours on June 25, 2004 to include a signature on the amendment document.
- Place of Performance
- Address: US Army Robert Morris Acquisition Center, Adelphi Contracting Division ATTN: AMSSB-ACA, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Country: US
- Zip Code: 20783-1197
- Record
- SN00604640-W 20040618/040616212350 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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