SOLICITATION NOTICE
66 -- R&D TEOS LOW-PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD) TOOL
- Notice Date
- 7/13/2004
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- NASA/Ames Research Center, JA:M/S 241-1, Moffett Field, CA 94035-1000
- ZIP Code
- 94035-1000
- Solicitation Number
- NNA04074116Q
- Response Due
- 7/28/2004
- Archive Date
- 7/13/2005
- Point of Contact
- Robin L Wong, Purchasing Agent, Phone (650) 604-0089, Fax (650) 604-0270, Email rwong@mail.arc.nasa.gov
- E-Mail Address
-
Email your questions to Robin L Wong
(rwong@mail.arc.nasa.gov)
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This notice is being issued as a Request for Quotations (RFQ) for a single wafer or multi wafer TEOS low-pressure chemical vapor deposition tool with 4? wafer capability is needed for R&D use. The required tool should have: 1. deposition chamber with base pressure lower than 100 mTorr and nominal operation pressure in the range of 200 to 500 mTorr; 2. normal operating temperature around 800?C (with the capability to go as high as 1000?C) while maintaining wall temperature to be below 200?C (active wall temperature control is not necessary); 3. closed loop wafer temperature control; 4. load-lock with manual load-unload mechanism; 5. gas box; 6. power supply box; 7. wall box with 230V, 40A, 50 Hz; 8. liquid chemical storage and delivery system with manual flow adjustment; 9. compressed dry air (CDA) with minimum pressure of 70 psi; 10. dry pump with booster; 11. chiller; 12. water supply with minimum flow of 15 lpm at 20?C; 13. exhaust scrubber with TEOS condensation trap; 14. in-line particle filter 15. gas box with oxygen and nitrogen mass flow controllers; 16. TEOS storage container with 1000 ml capacity; 17. oxygen mass flow controller of 0 to 100 sccm; 18. nitrogen mass flow controller of 0 to 500 sccm; 19. hardware control with graphical user interface; 20. software control with recipe writing and management capability; 21. documentation package containing: parts fabrication drawings, system schemetic, component specification sheets, installation instructions, system operation instructions, and assembly notes. 22. at least a 1 (one) year warranty 23. Training and installation included in offer Responsible offerors must be registered with the Central Contractor Registration upon submission of an offer. To register or obtain more information, go to http://www.ccr.gov The provisions and clauses in the RFQ are those in effect through FAC 01-24. This procurement is a total small business set-aside. See Note 1. The NAICS Code and the small business size standard for this procurement are 334516 and 500 respectively. The offeror shall state in their offer their size status for this procurement. All responsible sources may submit an offer which shall be considered by the agency. Delivery to NASA Ames Research Center is required within 70 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Offers for the items(s) described above are due by 1:00PM local time on July 28, 2004 and can be faxed to (650) 604-0932, Attn: Ms. Robin Wong, or mailed to Ms. Robin Wong, NASA Ames Research Center, M/S 241-1, Moffett Field, CA 94035-1000. Offers must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://server-mpo.arc.nasa.gov/Services/NEFS/NEFSHome.tml Offerors shall provide the information required by FAR 52.212-1 (JAN 2004), Instructions to Offerors-Commercial, which is incorporated by reference. If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. FAR 52.212-4 (OCT 2003), Contract Terms and Conditions-Commercial Items is applicable. FAR 52.212-5 (MAY 2004), Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items is applicable and the following identified clauses are incorporated by reference: 1852.223-74 Central Contractor Registration, 1852.215-84 Ombudsman, 1852.223-72 Safety and Health (Short Form), 52.222-3, 52.233-3, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-37, 52.225-1, 52.225-13, 52.225-33, 52.232-34. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm All contractual and technical questions must be in writing to Robin Wong, email: rwong@mail.arc.nasa.gov, fax: (650)604-0932 not later than 1:00PM local time on July 21, 2004. Telephone questions will not be accepted. Selection and award will be made to that offeror whose offer will be most advantageous to the Government, with consideration given to the factors of proposed technical merit, price, and past performance. Other critical requirements: delivery date and warranty shall also be considered. It is critical that offerors provide adequate detail to allow evaluation of their offer. (SEE FAR 52.212-1(b)). Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc . These representations and certifications will be incorporated by reference in any resultant contract. An ombudsman has been appointed -- See NASA Specific Note "B". Prospective offerors shall notify this office of their intent to submit an offer. It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=21 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes may be viewed at the following URLs linked below.
- Web Link
-
Click here for the latest information about this notice
(http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=21#111339)
- Record
- SN00620413-W 20040715/040713212953 (fbodaily.com)
- Source
-
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