Loren Data's SAM Daily™

FBO DAILY ISSUE OF OCTOBER 30, 2004 FBO #1069
SOLICITATION NOTICE

J -- Preventive/Remedial Maintenance of Wafer Stepper

Notice Date

10/28/2004
 

Notice Type

Solicitation Notice
 

NAICS

811219 — Other Electronic and Precision Equipment Repair and Maintenance
 

Contracting Office

Department of Commerce, National Oceanic and Atmospheric Administration (NOAA), Mountain Administrative Support Center, 325 Broadway - MC3, Boulder, CO, 80305-3328
 

ZIP Code

80305-3328
 

Solicitation Number

Reference-Number-NB817030505001
 

Response Due

12/13/2004
 

Archive Date

1/1/2005
 

Point of Contact

Jan Clark, Contract Specialist, Phone (303) 497-6320, Fax (303) 497-3163, - Jan Clark, Contract Specialist, Phone (303) 497-6320, Fax (303) 497-3163,
 

E-Mail Address

jan.clark@noaa.gov, jan.clark@noaa.gov
 

Description

The National Institute of Standards and Technology (NIST) intends to negotiate with only one source, ASML US, Inc., Colorado Springs, CO, for full service (5 days per week, 8 hours per day, less than 24-hour response time) post-warranty maintenance/repair coverage of one (1) Government-owned ASM 5000/50 Wafer Stepper located in Boulder, CO. This equipment is a highly accurate and extremely complicated electromechanical tool. Its purpose is to print circuit patterns in a UV sensitive coating on wafers of silicon. A wafer may contain 50-200 chips each of which may contain 100-20,000 individual devices. The resolution of the chip imaging is less than one micrometer. Because this Wafer Stepper is central to every other step that is done to produce these chips, it is imperative that it be in good working condition at all times. The maintenance/repair service is to include the cost of all instrumentation, tools, tool kits, labor, parts and transportation (both persons and things) necessary to maintain this equipment at warranty standards. All maintenance and repairs shall be accomplished on-site at NIST. The full service maintenance requirements are as follows: (a) Planned Maintenance Service (PMs). This service consists of , including but not limited to: (i) clean and inspect system, (ii) evaluate system performance, (iii) perform calibration and adjustments, (iv) image quality assessment, and (v) perform machine constants backup; (b) repair service and maintenance due to equipment malfunctions, as required; (c) lamp replacement; (d) parts replacement as required on an exchange or new part basis inclusive of labor; (e) software upgrades that are mandatory or safety related; and (g) repair parts, excluding consumables. ASML is the only company that has the capability to perform preventive maintenance on its own equipment as it is the only known source that has the level of senior technicians and a complete parts inventory that can provide this service. The company has access to complete schematics which is proprietary and the detailed proprietary phototest procedures requirement to make the machine meet factory specifications. The company also has access to special test fixtures and apparatus that make machine alignment and repair possible in the field. ASML has a large spare parts inventory in Colorado Springs backed by overnight parts delivery. These tools are extremely complicated electro-optical systems which make it difficult for third party sources to develop expertise and parts inventory to maintain an operational level required for doing 0.5 micrometer optical lithography. This notice may represent the only official notice of the requirement. See NOTE 22. NOTE: THIS NOTICE WAS NOT POSTED TO WWW.FEDBIZOPPS.GOV ON THE DATE INDICATED IN THE NOTICE ITSELF (28-OCT-2004); HOWEVER, IT DID APPEAR IN THE FEDBIZOPPS FTP FEED ON THIS DATE. PLEASE CONTACT fbo.support@gsa.gov REGARDING THIS ISSUE.
 

Web Link

Link to FedBizOpps document.
(http://www.eps.gov/spg/DOC/NOAA/MASC/Reference-Number-NB817030505001/listing.html)
 

Place of Performance

Address: 325 Broadway Boulder, CO

Zip Code: 80305-3328

Country: US
 

Record

SN00700428-F 20041030/041028212331 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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