SOLICITATION NOTICE
66 -- Low Noise Wafer Probe System
- Notice Date
- 2/15/2005
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Other Defense Agencies, Office of the Secretary of Defense, Defense Microelectronics Activity, Contracting Division 4234 54th Street, Building 620, McCellan, CA, 95652-1521
- ZIP Code
- 95652-1521
- Solicitation Number
- H94003-05-R-0002
- Response Due
- 3/15/2005
- Archive Date
- 3/30/2005
- Small Business Set-Aside
- Total Small Business
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6 as supplemented with additional information included in this notice. This announcement constitutes the solicitation. The NAICS code is 334516 and the size standard for this requirement is 500 employees. The solicitation reference is H94003-05-R-0002. This requirement is for a Low Noice Wafer Probe System. These are the minimal requirements for a low noise wafer probe system which shall incorporate five (5) major elements: 1.Semi-automatic Wafer Probe Station, 2. Microscope with Infrared, Green, and Ultraviolet Laser Cutter subsystem; 3. Hot and Cold Wafer Chuck; 4. Programmable Manipulators; and 5. Vibration Isolation Table. The contractor shall identify the equipment and software that is being proposed. Pictures, graphics, and/or brochures depicting the proposed systems or assemblies are required to be submitted with your proposal for evaluation. The System shall consist of the following: 1. SEMI-AUTOMATIC WAFER PROBE STATION: 8? Semi-automatic Probe Station with Programmable Scope Drive, consists of: Single-point grounding to support low current operation; Integrated vibration isolation structure anodized for long finish life; 8" x 8" programmable stage drive (0.1 um resolution); Total accuracy and repeatability error less than +/- 1.5 um over stage travel range; Stainless steel platen with removable front wedge: Platen adapted for Keithley 9139A-PCA. Include theta control and leveling; and 1.0" or greater programmable platen drive. Integrated Controller includes Pentium CPU, 3.5" floppy, 80G HD, CD-ROM, Windows 98SE (or later); 19" LCD monitor, keyboard and mouse; Ethernet and GPIB interfaces; Independent motor drives for each driven axis to maintain positioning precision; and remote drive electronics with high performance output filtering to minimize electronic noise. Professional Probe Control / Software Suite includes Control of programmable components via separate joystick or mouse; Video system including camera, frame grabber and software for real time image, image capture store and retrieve, feature measurement, and "point and shoot" or "click and drag" navigation; Wafer mapping software with "point and shoot" control; X-Y motion alignment via video screen snap align or device 2-point align; Tracking of programmable probes to microscope; Wafer map automatic compensation for wafer temperature changes; IEEE 488 GPIB interface software; and support for LabView and HP VEEpro test control software. Programmable Microscope Drive includes Bridge supports for 4" x 4" x 2" microscope translation; Independent microscope lift with lock; and Full Z up pivot capability to clear microscope from platen/stage area. Chuck Plumbing Package consists of Triax connections to allow upgrade to triaxial chuck and Temperature range: -65 to 300 degrees C, minimum operating range. Dryshield for Temperature Seal plus Light Shield consists of Combination Light Shield and Temperature Seal for dry environment during low temperature probe. 2. MICROSCOPE: Optem A-Zoom2 with Motorized A-Zoom2 microscope with eyepieces; Motorized 40x zoom body with laser cutter support; 480 line CCD color camera; 150 watt illuminator with fiber optic cable; One centerable objective mount; Remote control for motor zoom and light; and Camera and motor power supply. Includes Bright Light Objective - 10X MTI, 33.5 MM WD, 0.28 NA, Ezlaze II, TriLite Laser Cutter System for A-Zoom2; and Laser Objectives - 50X MTI, One for each UV and IR light source. POLARIZING ACCESSORY UNIT FOR A-ZOOM2. 3. THERMAL CHUCK: -65C to 300C Thermal Chuck System consists of 300 degree C PID Heat Controller - low noise; -65 degree C Rapid Cool Down; Minimum Transition Times: < 10 minutes 25 degree C to ?55 degree C; < 15 minutes ?55 degree C to 125 degree C; 0.1 Degrees C resolution and stability above 25 degree C; 0.5 Degrees C resolution and stability below 25 degree C; IEEE 488 interface; and White cabinet with casters for easy mobility. Coaxial Chuck, 8". Thermal chuck 8" Coaxial configuration for probe stations; Self-sealing quick connect plumbing for easy hook-up; Capable of -65C to 300C operating range, minimum; Capacitance: Coaxial surface to ground: < 200 pF; Electrical noise floor: < 10 nAp-p @ 25 degree C; and Electrical isolation (surface to ground): > 100 Gohm @ 25 degree C, > 1 Gohm @ 300 degree C. 4. PROGRAMMABLE MANIPULATORS Vacuum Base. Includes (2) Left-handed and (1) Right-handed programmable manipulators; X, Y, Z range 0.5" each axis, positioning resolution 0.05 microns; *Positioning accuracy and repeatability < 1.0 micron (+/- 0.5 microns); *Multiple position swivel nose turret; and Quick interrupt vacuum base. 9-axis Drivers for three (3) Manipulators. Motor drivers for each axis (9 total) of the three manipulators and 19" rack mounted enclosure with Three (3) Triaxial Probe Holders; Shielded triaxial probe holder with 30" (minimum) triaxial cable 5. VIBRATION ISOLATION TABLE FOR PROBE STATION consists of Integrated instrument rack mount for station rack mounted electronics; Integrated table or fixtures for monitor and keyboard; Integrated front and rear arm rests to protect float table; and Large casters. A vacuum pump, 110V that is a quiet, oil-less pump with vacuum gauge; 2-Port manifold with vacuum relief regulator; and a minimum of 8' length of hose. The contractor shall provide equipment delivery and installation including 2 copies of hardbound manuals for all equipment; Electronic manuals for all equipment; and user training at customer facility for 8 engineers (16 hours minimum). NOTE: Advanced notice is required before contractor may perform installation or training services at the facility. Use of foreign nationals to perform onsite services will require a minimum of one week to obtain security access approval. For a purchase description organized in outline form, send an email request to hilton@dmea.osd.mil or fax your request to (916) 231-2826. Contractors must be registered in the Central Contractor Registration (CCR) prior to an award. The following FAR clauses apply: 52.212-1, Instructions to Offerors ?Commercial; 52.212-3, Offeror Representations and Certifications-Commercial Items; 52.212-4, Contract Terms and Conditions-Commercial Items and 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items. DPAS rating is C9E. Questions regarding this solicitation should be addressed to J. Hilton at Hilton@dmea.osd.mil. Offerors are due at 3:00PM on 15 Mar 2005. This is a small business set aside requirement. See Note 1.
- Place of Performance
- Address: Defense Microelectronics Activity, 4234 54th Street, McClellan, CA 95652-2100
- Zip Code: 95610
- Zip Code: 95610
- Record
- SN00751664-W 20050217/050215212524 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
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