SOLICITATION NOTICE
A -- Molecular Beam Epitaxy System (MBE)
- Notice Date
- 4/1/2005
- Notice Type
- Solicitation Notice
- NAICS
- 334119
— Other Computer Peripheral Equipment Manufacturing
- Contracting Office
- Department of the Air Force, Air Force Materiel Command, AFRL - Directed Energy Directorate, 2251 Maxwell Ave, Kirtland AFB, NM, 87117
- ZIP Code
- 87117
- Solicitation Number
- FA9451-05-R-0001
- Response Due
- 4/13/2005
- Archive Date
- 4/28/2005
- Description
- Description The Air Force Research Laboratory, Directed Energy Directorate (AFRL/DELS), Kirtland AFB, New Mexico, is seeking proposals for a one (1) each molecular beam epitaxy system (MBE). Contract line item structure is as follows: 0001 Contractor shall furnish the necessary qualified personnel, materials, facilities, supplies, travel and services to include installation, training and testing to provide a molecular beam epitaxy system in accordance with the attached list of technical requirements entitled ?Molecular Beam Epitaxy (MBE) System?, dated 29 Mar 05 (5 pages), hereby incorporated as attachment #1. 0002 Contractor shall submit data in accordance with Contract Data Requirements List (DD Form 1423) A-series A001-A005 which are outlined as follows: A001-Status Report every two months; A002-Design Drawings and Associate Lists; A003-Operating Manual; A004-Final Test and Inspection Report; and A005-Technical Report-Study/Services (DD Form 882). The costs associated with this line item are included in CLIN 0001. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Solicitation# FA9451-05-R-0001 is being issued as a request for proposal (RFP) and this solicitation document and incorporated provisions and clauses are those in effect through the Federal Acquisition Circular (FAC) #2005-02, dated 23 Mar 05. Cost proposal shall be submitted in accordance with instructions hereby incorporated as attachment #2, entitled ?Det 8, Air Force Research Laboratory (AFRL)/PK Cost Proposal Instructions?. Proposed contract type is firm fixed price (FFP). Proposed contract payments are to be accomplished as follows: 15% of total contract every 2 months (15% at 2, 4, 6, and 8 month mark) and 40% after final test and acceptance. NAICS code is 334513 and the small business size standard is 500 employees. No national stock number has been assigned; Defense Priorities and Allocations System (DPAS) rating is DO-A5. Required date of delivery is 30 Dec 05. FOB and acceptance is at Kirtland AFB NM. The provisions at FAR 52.212-1, Instructions to Offerors ? Commercial, 52.212-4, Contract Terms and Conditions-Commercial Items, and 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items applies and subordinate clauses (b)(1), (b)(3), (b)(7), (b)(14) thru (20),(b)(23), (b)(26), (b)(27), (b)(30), (b)(31), and (b)(34)(i). The provision at 52.212-2, Evaluation-Commercial Items applies with the following factors to be used to evaluate offers: Technical capability of the item offered to meet the Government requirement; price; and past performance. Technical and past performance, when combined, are significantly more important than cost or price. To assist in past performance evaluations, vendor shall forward past performance information proving sale/acceptance of product (within the past five (5) years) that is the same or similar to product outlined in the Government statement of work (atch#1). Offerors shall include a completed copy of the provision at 52.212-3, Offeror Representations and Certification-Commercial Items, with its offer. Vendors may complete on line representations and certifications at http://orca.bpn.gov/. Foreign-owned firms are advised to contact the Contracting Officer before submitting a proposal to determine whether there are restrictions on receiving an award. No numbered notes apply. Offers are due 13 Apr 05, 4:00 PM Mountain Standard Time, at AFRL/PKDB 2251 Maxwell Avenue Kirtland AFB NM 87117. Point of Contact Cindy Salgado, Contract Specialist, phone 505 846-6877 fax 505 846-1546 email Cynthia.salgado@kirtland.af.mil ? Barbara Steinbock, Contracting officer, phone 505-846-2246, fax 505-846-1546, email at Barbara.steinbock@kirtland.af.mil. Place of Performance Address: Kirtland AFB, NM Postal Code: 87117 Country: USA TECHNICAL REQUIREMENTS Molecular Beam Epitaxy (MBE) System March 29, 2005 Vendor shall provide an MBE system featuring the following items: 1. VERTICAL DEPOSITION CHAMBER (Vacuum specification 5 x 10-11 Torr) Main viewport and viewport shutter. Ports configured for manipulator, monitoring ion gauge, main shutter, RHEED, quadrupole mass spectrometer, pumping system, ionization gauge, viewport, and transfer line. Symmetrical array of twelve or more ports (4.5-inch outer diameter flange) configured for individual effusion cells, each with its associated shutter port. Deposition chamber cryopanelling. Two ports for ellipsometry, blanked. Viton gate valve to buffer chamber. Base flange configured for pyrometer viewport and shutter for direct substrate viewing, and 4.5-inch outer diameter flange for mass spectrometer. CT8 cryopump with compressor, pneumatic isolation gate valve and all associated ancillary equipment. 400 l/s-1 ion pump and power supply. Ionization gauge and control unit 2. PREPARATION CHAMBER (Vacuum specification 5 x 10-10 Torr) Ports configured for wafer outgassing facility, parking stage, sensors, pumping system, ionization gauge, transfer line, and viewports. 400 l/s ion pump and power supply. Sublimation pump with three filaments and controller. Ionization gauge with control unit. Wafer outgassing facility (>450oC). Sample heater with integral thermocouple assembly, thyristor drive unit and power supply. Parking stage for up to six substrate holders, and viewport 3. CASSETTE ENTRY CHAMBER Cassette access door, with Viton seal. Cassette for up to six substrate holders. Viewport. Wide-range turbomolecular pump with diaphragm backing system, including control unit and isolation valve. Control valve for let-up-to nitrogen. Ionization gauge and control unit. Heater assembly mounted in the entry chamber for out-gassing (>150oC). Power supply and control unit. 4. SUBSTRATE HOLDERS Three molybdenum substrate holders, indium free, for 3 x 2 inch wafers. Three molybdenum substrate holders, indium-free, for single 3 inch wafer. Two substrate inserts, indium-free, for single 2 inch wafer (to be fitted on single 3 inch substrate holders). Two substrate inserts, indium-free, for single ? 2 inch wafer (to be fitted on single 3 inch substrate holders). 5. AUTOMATED WAFER TRANSFER MECHANISM Remote operation of sample hand-off mechanism with motorized actuator and control unit to transfer wafers between various stations including storage, out-gassing and growth. Automated motor drive for cassette indexing and isolation valve operation in the cassette entry chamber. 6. DEPOSITION STAGE SAMPLE MANIPULATOR Sample heater (>750oC) for up to three 2 inch diameter wafers or a single 4 inch wafer with integral thermocouple. Continuous rotation system, with motor drive and remote control unit for incremental alignment of sample for RHEED. 7. EFFUSION CELLS A total of 10 effusion cells described below. Two "hot-lip" 80cc capacity cells complete with crucible, thermocouple, heater assembly and water- cooling, to be used with Indium (In) and/or Gallium (Ga). Two 300-gram loading capacity ?hot-lip? SUMO complete with crucible, heated insert, thermocouple, heater assembly, to be used with Indium (In) and/or Gallium (Ga). One "cold-lip" 40cc capacity cell complete with crucible, thermocouple, heater assembly and water- cooling, to be used with Aluminum (Al). One 200-gram loading capacity ?cold-lip? SUMO complete with crucible, heated insert, thermocouple, heater assembly, to be used with Aluminum (Al). One dopant cell complete with crucible, thermocouple, heater assembly and water cooling, to be used with Beryllium (Be). One dopant cell complete with crucible, thermocouple, heater assembly and water cooling, to be used with Gallium Telluride (GaTe). One valved arsenic (As2) cracker source. 500cc capacity arsenic valved cracker including crucible, with temperature control on reservoir, valve assembly and cracker zone. Valve controller and computer interface for software control of valve position to allow ramped opening and closure. The source shutter assembly mounted on individual flange, with associated soft-action actuator and control module. One valved Sb2 cracker source. 200cc capacity antimony valved cracker including crucible, with temperature control on reservoir, valve assembly and cracker zone. Valve controller and computer interface for software control of valve position to allow ramped opening and closure. Water-cooled surround on cracker zone. For each cell, the source shutter assembly that is without bellows, and the associated control module. Main substrate shutter with motor drive and position sensor. 8. MONITORING FACILITIES Monitoring ionization gauge Independently mounted monitoring ionization gauge control units. At least 1-100 amu quadrupole mass spectrometer for residual gas analysis. At least 15 keV RHEED system including gun and power supply, with remote operation of x-y electrostatic scan facility, phosphor screen, view port and shutter. 9. BAKEOUT SYSTEM Flat panel bake-out oven; bake-out temperature and time control system; heaters and fan assemblies with ducting and power supplies to provide re-circulated hot-air bake-out. 10. MBE ELECTRONICS Electronics rack: Containing vacuum pump control units, cassette transfer mechanism, bake-out temperature controller, and ion gauge controllers, RHEED control unit, mass spectrometer controller, monitoring ion gauge control, shutter control module, substrate rotation control unit, power distribution unit, thyristor drives for operation of effusion sources and deposition stage manipulator. The system supplied with enough control loops and thyristor units to run all K-cells heaters. Two spare control loops and thyristors for extra furnaces. UPS for two Aluminum K-cells and appropriate interlocks configured. Back-up duration up to 1 hour. 11. COMPUTER CONTROL SYSTEM Computer system running software and interfaces for MBE process control of effusion cells, shutters and deposition stage manipulator. Electrometer circuitry and software modules to permit automated flux calibration. Software and interface for display of chamber pressures. Data logging to allow association of logged data with recipe stage and retrieval/display of key MBE process parameters: temperature, power, shutter drive signal, beam flux and chamber pressure. 12. MBE SYSTEM FACILITIES NESLAB chiller system (Model HX-500), included stainless steel reservoir and evaporator coil and temperature controller for recirculating cooling water of K-cells and turbo pump. A-5/A-10 SEMIFLEX / TRIAX LN2 Delivery System by Vacuum Barrier Corporation that includes: 2 outlet L/V phase separator with automatic fill control and vent heater, vacuum pump station with isolation valve, 75-foot supply piping from bulk LN2 tank, 15-foot gravity feed Triax line, 12-foot feed connector hose, and 12-foot return line. 13. MBE SYSTEM INSTALLATION, TEST, AND TRAINING System installed in AFRL laboratory under the supervision of contractor engineer. System brought to operational state at AFRL laboratory. Comprehensive system user manual (CDRL) Final system drawings (CDRL) MBE system tested to comply with standard manufacturer's specifications. Deposition chamber base pressure of 5x10-11 Torr. Preparation chamber base pressure of 5x10-10 Torr. Single GaAs epitaxial layer thickness uniformity less than +/- 1% Single GaAs epitaxial layer 1.0-10 micron defect density less than 30/cm2 Final test and inspection report (CDRL) A minimum of 3 days of training of at least two Air Force personnel to review operating procedures and the use of growth software. 14. DELIVERY SCHEDULE System delivery within 8 months of start of contract. System installed, tested and operational before February 15, 2006. 15. REPORTING Technical status and progress report describing the effort to date, delivered to AFRL once every two months. (CDRL) 16. WARRANTY A minimum of 12 month warranty for all items except consumables.
- Place of Performance
- Address: AFRL/DEL, 3550 Aberdeen Ave SE, Kirtland AFB NM 87117-5006
- Record
- SN00780341-W 20050403/050401212046 (fbodaily.com)
- Source
-
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