SOLICITATION NOTICE
66 -- Nanoimprint Lithography Tool
- Notice Date
- 5/26/2005
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-05-Q-0638
- Response Due
- 6/9/2005
- Point of Contact
- Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884, - Patrick Staines, Contract Specialist, Phone (301)975-6335, Fax (301)975-8884,
- E-Mail Address
-
carol.wood@nist.gov, Patrick.Staines@nist.gov
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS UNDER THE AUTHORITY OF THE FEDERAL ACQUISITION REGULATION (FAR) SUBPART 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS, AND IS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THIS SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-03. The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This acquisition is unrestricted and all responsible offerors may submit a quote. The National Institute of Standards and Technology (NIST), has a requirement for (1) each Nanoimprint Lithography Tool. A single wafer nanoimprint lithography tool is needed for the fabrication of nanoscale patterns and structures. The system must be capable of all forms of imprinting, including thermal, photo-curable, embossing, and transfer printing techniques. The tool must exert uniform pressure uniformly over the entire mold and substrate, offer state-of-the art pattern resolution, provide fast imprint cycle times, and have a user friendly and automated interface. All quoter shall provide a quotation for a quantity of one (1) each Nanoimprint Lithography Tool meeting or exceeding the following required specifications: 1. System must have the capability to imprint both thermoplastic resists and ultraviolet (UV) radiation curable resists; 2. System must have the capacity to imprint at least 15.24 cm (6 inch) diameter wafers as well as smaller pieces on the order of 1 cm2 and of arbitrary shape; 3. System must be capable of a sub-10 nm pattering resolution; 4. System must employ a N2 gas pressure mechanism to apply pressure uniformly to both the imprint mold and the substrate; mechanical or pneumatic pressing mechanisms through rigid platens are not acceptable. 5. System must have a heating rate of 5 degrees C/s or faster; 6. System must have a cooling rate of 2 degrees C/s or faster; 7. System must have a software interface that can be easily programmed with arbitrary temperature, pressure, UV dose, and time duration recipes to perform basic imprinting procedures. System must allow manual control of the imprinting time, pressure, temperature, and UV dose; 8. System must use standard, interchangeable xenon lamps for the UV source with a spectral cut-off below 240 nm to 370 nm (to minimize potential ozone formation). Lamp power must be between 500 W to 2000 W. UV source must uniformly illuminate the full 15.24 cm diameter of the usable imprint area. UV exposure must not significantly heat the imprinting substrate; 9. System must be able control the imprint pressure from 0 to 4 MPa (500 psi) with a set point error of plus or minus 0.05 MPa (7.25 psi); 10. System must be able to control the imprint temperature from room temperature to 300 degrees C with a set point error of plus or minus 3 degrees C or less. ; 11. System must maintain the sample and the imprint mold under vacuum during the imprinting process; 12. System operation and installation must be compatible with a Class 100 Clean Room. Reference Federal Standard 209E; 13. System must have an automated tool that separates the mold from the imprint while keeping both substrates parallel - does not shear or tear the imprinted patterns; 14. System must have the option for the addition of an alignment module with sub-200 nm overlay accuracy; 15. System must function off of a house N2 supply line at 0.55 MPa (80 psi) and use a pressure booster mechanism to achieve the higher imprinting pressures. LINE ITEM 0002: INSTALLATION: The Contractor shall install the lithography tool in the NIST, Advanced Measurement Laboratory Nanofab which is a Class 100 Clean Room with raised floors 2 feet above a concrete subfloor. Installation shall include, at a minimum, uncrating/unpackaging of all equipment, set-up and hook-up of all equipment, turn key start-up, and demonstration of specifications. The Contractor shall be responsible for following Class 100 Clean Room protocol and any other NIST AML Nanofab protocols during installation. LINE ITEM 0003: TRAINING: The Contractor shall provide a minimum of one (1) day (eight hours), of start-up training and maintenance training to the operators of the Nanofab Facility. This training shall commence immediately upon completion of installation. Training shall include, at a minimum, a thorough demonstration of all equipment functions, equipment operation and basic troubleshooting. The Contractor must also demonstrate sub-30 nm pattering resolution. Installation & training must be scheduled, in advance, with the NIST Technical Contact, (to be identified upon award.) If quoters believe that eight hours shall not be sufficient time to cover all of the training areas identified above, they should propose an alternate timeline in their quotation. The Contractor shall provide a description of the warranty provided for the equipment. Delivery shall be FOB DESTINATION. Delivery, installation and training should be completed not later than five (5) months after receipt of purchase order. FOB DESTINATION means: The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. Award shall be made to the offeror whose quote offers the best value to the Government, technical, price, and other factors considered. The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, and 3) Price. Technical and Past Performance, when combined, are equal in importance to price. Evaluation of Technical Capability shall be based on the information provided in the quotation. Offerors shall include the manufacturer, make and model of the products, manufacturer sales literature or other product literature which addresses all specifications, and clearly documents that the offered products meet or exceed the specifications stated above. To further evaluate the Technical Capability of the equipment, NIST reserves the right to request a sample (i.e. silicon wafer) demonstrating patterning resolution of 30nm or better. If requested, this sample shall be provided at no cost to NIST. Past Performance shall be evaluated to determine the overall quality of the product and service provided by the Contractor. Evaluation of Past Performance shall be based on the references provided IAW FAR 52.212-1(b)(10). Offerors shall provide a list of at least three (3) references to whom the same or similar equipment has been provided within a three (3) year period. References must include customers to whom Clean Room installation was provided. The list of references shall include, at a minimum: The name of the company or organization and the reference contact person; the telephone number of the reference contact person; the contract or grant number; the amount of the contract; the address and telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. The full text of a FAR provision or clause may be accessed electronically at www.acqnet.gov/far. The following provisions apply to this acquisition: FAR 52.212-1, Instructions to Offerors — Commercial; and 52.212-3, Offeror Representations and Certifications — Commercial Items. In accordance with FAR 52.212-3 Offeror Representations and Certifications — Commercial Items, offerors must complete annual representations and certifications on-line at http://orca.bpn.gov. If paragraph (j) of the provision applies, a written submission is required. The following clauses apply to this acquisition: 52.204-7 Central Contractor Registration; 52.212-4 Contract Terms and Conditions—Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders—Commercial Items including subparagraphs: (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I; (3) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns (if the offeror elects to waive the preference, it shall so indicate in its’ offer); (7) 52.219-8, Utilization of Small Business Concerns; (10) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns (if the offeror elects to waive the preference, it shall so indicate in its’ offer); (14) 52.222-3, Convict Labor; (15) 52.222-19, Child Labor—Cooperation with Authorities and Remedies; (16) 52.222-21, Prohibition of Segregated Facilities; (17) 52.222-26, Equal Opportunity; (18) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (19) 52.222-36, Affirmative Action for Workers with Disabilities; (20) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (21) 52.222-39 Notification of Employee Rights Concerning Payment of Union Dues or Fees; (25) 52.225-5, Trade Agreements; (26) 52.225-13 Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; (27) 52.225-15, Sanctioned European Union Country End Products; and (31) 52.232-33, Payment by Electronic Funds Transfer--Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. All offerors shall submit the following: 1) An original and one copy of a quotation which addresses all Line Items; 2) Technical description and/or product literature; 3) Description of commercial warranty; and 4) A copy of the most recent published price list(s). All quotations shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Carol A. Wood, 100 Bureau Drive, Stop 1640, Gaithersburg, MD 20899-1640. All offerors shall ensure the RFQ number is visible on the outermost packaging. Submission must be received not later than 3:00 p.m. local time on June 9, 2005. FAX quotations shall not be accepted. E-mail quotes shall be accepted. NOTE: THIS NOTICE MAY HAVE POSTED ON WWW.FEDBIZOPPS.GOV ON THE DATE INDICATED IN THE NOTICE ITSELF (26-MAY-2005). IT ACTUALLY APPEARED OR REAPPEARED ON THE FEDBIZOPPS SYSTEM ON 19-JUL-2005, BUT REAPPEARED IN THE FTP FEED FOR THIS POSTING DATE. PLEASE CONTACT fbo.support@gsa.gov REGARDING THIS ISSUE.
- Web Link
-
Link to FedBizOpps document.
(http://www.eps.gov/spg/DOC/NIST/AcAsD/SB1341-05-Q-0638/listing.html)
- Place of Performance
- Address: Contractor's Site
- Record
- SN00850594-F 20050721/050719213347 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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