SOLICITATION NOTICE
36 -- Inductively Coupled Plasma/Plasma Enhanced Chemical Vapor Deposition Process Gas Delivery and Abatement System
- Notice Date
- 8/11/2005
- Notice Type
- Solicitation Notice
- NAICS
- 325120
— Industrial Gas Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-05-R-CR10
- Response Due
- 9/7/2005
- Archive Date
- 8/11/2006
- Small Business Set-Aside
- Total Small Business
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. The solicitation, N00173-05-R-CR10, is issued as a Request for Proposal (RFP). The solicitation document and incorporated provisions and clauses are those in effect through FAC 05-05 and DFARS Change Notice 20050801. The associated small business size standard is 1000 employees. The Naval Research Laboratory (NRL-DC) has a requirement for (CLIN 0001 ? one system) equipment to process gas delivery for use in the operation of an inductively coupled plasma (ICP) etching system and a plasma-enhanced chemical vapor deposition (PECVD) system. The ICP system (Oxford Instruments Inc Plasmalab System 100 ICP 180) will require delivery of chlorine, boron trichloride, silicon tetrachloride, hydrogen, methane, oxygen, sulfur hexafluoride, argon, and helium process gases. The PECVD system (Oxford Instruments Inc Plasmalab System 100 PECVD) will require delivery of silane, ammonia, methane, hydrogen, nitrous oxide, a mixture of tetraflouromethane and oxygen, and argon. The contractor(s) must provide the gas cabinets, automated process and purge panels, chemical sensors, controls for automatic shut-off equipment, pressure regulators, valving, and single and double wall stainless steel tubing with orbital welded installation of all gas delivery piping. The contractor must provide the gases, exhaust plumbing and gas abatement equipment for the ICP and PECVD systems and a self contained breathing apparatus as optional items. The contractor shall provide miscellaneous documentation, installation and training at NRL-DC. The complete specification and/or other information for this combined synopsis/solicitation is available at http://heron.nrl.navy.mil/contracts/RFP/05CR10.htm This requirement has several optional items identified in the specification. The Government may make multiple awards from this solicitation. The contractor shall provide a standard commercial warranty for all parts and labor. Delivery and acceptance is at the Naval Research Laboratory, Washington, DC 20375, FOB Destination. Delivery shall be no later than 160 days after contract award. Delivery for the options, if exercised, shall be within the contract period. The provision at 52.212-1, Instructions to Offerors-Commercial, applies to this acquisition. The provision at FAR 52.212-2,Evaluation--Commercial Items is incorporated. The Government intends to award a contract resulting from this solicitation to that responsible offeror whose offer conforming to the solicitation will be the most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate the offers: 1. Technical capability of the item offered to meet the Government requirement; 2. price; and 3. past performance. Technical and past performances, when combined, are more important than price. The Government will evaluate offers for award purposes by adding the total price for all options to the total price for the basic requirement. The Government may determine that an offer is unacceptable if the option prices are significantly unbalanced. Evaluation of options shall not obligate the Government to exercise the option(s). The Government reserves the right to exercise any or all options at time of contract award. Offeror must complete and submit with its proposal, FAR 52.212-3 Offeror Representations and Certifications--Commercial Items and DFARs 252.212-7000 Offeror Representations and Certifications--Commercial Items., which are identified as B and available electronically at : http://heron.nrl.navy.mil/contracts/repsandcerts.htm The clause at FAR 52.212-4, Contract Terms and Conditions-Commercial Items and FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders--Commercial Items, applies to this acquisition. The additional clauses cited within this clause are applicable: 52.233-3, 52.233-4, 52.203-6, 52.219-4, 52.219-6, 52.219-8, 52.219-14, 52.222-3, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.222-39, 52.225-1, 52.225-3, 52.225-13,52.232-29, 52.232-33, and 52.247-64. The DFARs clause at 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items applies to this acquisition. The additional clauses cited within this clause are applicable: 52.203-3, 252.225-7012, 252.225-7036, 252.227-7015, 252.227-7037, 252.232-7003, 252.243-7002, 252.247-7023, and 252.247-7024. The following additional FAR and DFARs clauses apply: 52.204-7 Central Contractor Registration, 252.204-7004 Alternate A.and 252.211-7003. All EIT supplies and services provided under any resultant contract must comply with the applicable accessibility standards issued by the Architectural and Transportation Barriers Compliance Board at 36 CFR part 1194 (see FAR Subpart 39.2). Electronic and information technology (EIT) is defined at FAR 2.101. Any resultant contract will be DO Rated under the Defense Priorities and Allocations System (DPAS). The Contract Specialist must receive any questions concerning the RFP no later than 10 business days before the response date of this solicitation. An original and 2 copies of the offeror proposal shall be received on or before the response date noted above, 4:00 P.M., local time at the NRL address above, Attn: Contracting Officer. The package should be marked with the solicitation number, due date and time. The U.S. Postal Service continues to irradiate letters, flats, Express and Priority Mail with stamps for postage and other packages with stamps for postage destined to government agencies in the ZIP Code ranges 202 through 205. Due to potential delays in receiving mail, offerors are encouraged to use alternatives to the mail when submitting proposals. The proposed contract is 100 percent set aside for small business concerns. Other business opportunities for NRL are available at our website http://heron.nrl.navy.mil/contracts/rfplist.htm See Numbered Note(s) 1.
- Place of Performance
- Address: Naval Research Laboratory, 4555 Overlook Ave SW, Washington, DC
- Zip Code: 20375
- Zip Code: 20375
- Record
- SN00868625-W 20050813/050811212903 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
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