SOLICITATION NOTICE
93 -- FABRICATION OF SIC WAFERS BY DEEP REACTIVE ION ETCHING
- Notice Date
- 9/27/2005
- Notice Type
- Solicitation Notice
- NAICS
- 327910
— Abrasive Product Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC05132459Q
- Response Due
- 10/5/2005
- Archive Date
- 9/27/2006
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This notice is being issued as a Request for Quotations (RFQ)] for two 3-inch silicon carbide (SiC) wafers by deep reactive ion etching (DRIE). The following specifications are required: Etch depth: There are three desired etch depths in each wafer. On one wafer the desired etch depths are: 280 microns, 290 microns, and 300 microns. On the second wafer the desired etch depths are: 300 microns, 310 microns and 320 microns. The etch depth error for both wafers is 0.5 microns. Each wafer is currently mounted with photoresist on 4-inch silicon wafers. This means the etch recipe must not attack the photoresist to the extent that the SiC wafer comes off during DRIE. Surface roughness after etch: Surface roughness to be less than 0.5 microns. No "grassy" residue (micro-masking) on the etched surface. Etch trench not to be more than 5 microns deep. Delivery time: Delivery to NASA shall be not later than one month upon receipt of the wafers. Wafers will be supplied to the selected vendor within 2 weeks of order. Delivery shall be FOB Destination. Performance history: The following shall be included in offer: demonstrated experience of etching SiC DRIE for depths not less than 200 microns. The provisions and clauses in the RFQ are those in effect through FAC 05-05 This procurement is a total small business set-aside. The NAICS Code and the small business size standard for this procurement are 327910 and 500 respectively. The offeror shall state in their offer their size status for this procurement. All responsible sources may submit an offer which shall be considered by the agency. The DPAS rating for this procurement is DO-C9 Offers for the items(s) described above are due by October 5, 2005, 4:30p.m. GRC local time and may be mailed to NASA Glenn Research Center, 21000 Brookpark Road, Nikki Brown MS 500-306, Cleveland, OH 44135, and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), Cage Code, DUNS identification number (if they use Business Partner Network (BPN) Online Representations and Certifications Application (ORCA) and the Representations and Certifications (52.212-3) if not currently available on BPN, identification of any special commercial terms, description of items offered per 52.212-1 and as modified, and be signed by an authorized company representative. A copy of a published price list, catalog price or computer page printout showing the price for Items 1 thru 4 may also be included if desired. (Note, the Contracting Officer may request this information if only 1 source provides a proposal). Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form attached to this solicitation (Ensure that the "track changes" feature is turned off when word processing this form). Fill in Block 17a including CAGE and DUNS codes. Faxed offers are not acceptable. Offerors shall provide the information required by FAR 52.212-1 (JAN 2005), Instructions to Offerors-Commercial, which is incorporated by reference. Note for those proposing advance payments: FAR limits advance payments for commercial items to not greater than 15% of the total price. If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. FAR 52.212-4 (OCT 2003), Contract Terms and Conditions-Commercial Items is applicable. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm All contractual and technical questions must be in writing via e-mail to Nikki Brown not later than 1 day after the RFQ posting date. Telephone questions will not be accepted. Selection and award will be made to that offeror whose offer will be most advantageous to the Government, with consideration given to the factors of proposed technical merit, price, and past performance. It is critical that offerors provide adequate detail to allow evaluation of their offer. (SEE FAR 52.212-1(b)). Offerors must include 1 completed copy of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Less_Than_25K.doc . These representations and certifications will be incorporated by reference in any resultant contract. An ombudsman has been appointed -- See NASA Specific Note "B". It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes may be viewed at the following URLs linked below.
- Web Link
-
Click here for the latest information about this notice
(http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22#117814)
- Record
- SN00905095-W 20050929/050927212412 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |