SOURCES SOUGHT
66 -- Mask and Bond Aligner Standard with accessories
- Notice Date
- 11/8/2005
- Notice Type
- Sources Sought
- NAICS
- 339111
— Laboratory Apparatus and Furniture Manufacturing
- Contracting Office
- Department of Energy, Brookhaven National Laboratory (DOE Contractor), Brookhaven, PO Box 5000 Bldg. No. 355, Upton, NY, 11973
- ZIP Code
- 11973
- Solicitation Number
- RFQ103748
- Response Due
- 11/22/2005
- Archive Date
- 12/7/2005
- Description
- 1. 1 ea. SUSS MA6/BA6, Part No. 2830 Mask and Bond Aligner Standard. This includes the following items: 1 ea. - SUSS Part No. 185397 MA6/BA6 Standard, Basic equipment consisting of: -Machine base with mechanical, pneumatic and electrical equipment 230V/50/60Hz -X-Y-THETA alignment stage with wedge compensation system and high precision micrometer screws for alignment -Automatic wedge compensation in contact or without contact between mask and wafer (with reference balls), motorized Z-axis, alignment gap programmable from 0 to 300 micron, -Adapter system for mask holders MA6/BA6/M-7 -Mechanical and pneumatic adaptions for alignment stage to accept and tighten mask holder for exposure applications -Pneumatic drives for automatic mask holder clamping -For use in combination with mask holder for masks 7" x 7" max. -TSA microscope stage with X-Y-manipulator MA6/BA6 -Motorized X-Y stage, manual rotation for microscope -Adaption to MA6/BA6, cable set, covers -For precise alignment of microscope to mask -To scan mask/wafer surface, for singlefield alignment applications rapid positioning of microscope to stored alignment pattern -With integrated microscope tilt for exposure and to create access for mask or wafer loading -Manual loading and unloading of wafers or substrates -Microprocessor control with LCD display -For wafers 2" dia. up to 150mm dia. or substrates 2" x 2" up to 6" x 6" at lithography application -For wafers 3" dia. up to 150mm dia. at bond application 1 ea. - SUSS Part No. 175635 - DVM Micrscope for MA/BA W BSA System, which includes: -For use with MA/BA6 with BSA 20011113. No monitor or DVCU same as 205MS040-03 without monitor and DVCU included adapter 20015127 -2-channel brightfield microscope with: -2 CCD-cameras -Set of cables -Microscope adapter DVM/ MA/BA6 -Fiber optics tube 2 arm lenght 2400mm statistically mixed fibers for uniform illumination -Objective axis distance: 40-140mm -Objectives to be ordered separately -The microscope uses components of the BSA system (DVCU,monitor,control unit) 1 ea. - SUSS Part No. 181740 ? EISS System 1 ea. - SUSS Part No. 25019627 ? Microscope Light Source 85W/LH350 -With yellow filter -Halogen-illumination 13.8V/85W to be attached to MA/BA6 LH350 2 ea. - SUSS Part No. 60506407 ? Objective 5X/0.15 2 ea. - SUSS Part No. 164846 Offset Objective 11.25X/0.16 Minimum Separation 8MM 2. ea. - SUSS Part No. 60506458 Objective LMPL FL 20X/0.40 1 ea. ? SUSS Part No. 161553 Turret Kit DVM6/8 -Three position turret nosepiece -Not compatible with objective offset adapters DVM6/8 1 ea. ? SUSS Part No. 20014511 Exposure Unit MA/BA6/350 -Optics housing and mirror housing with ellipsoidal mirror and surface mirror -For wafer/substrate sizes up to 150mm diameter / 6? x 6? -For exposure lamps up to 500W -Prepared for use in combination with exposure optics optimized for high uniformity and high intensity for various wavelengths and applications: -Range of wavelengths: 250nm to 400nm -With components for optimized diffraction reduction for high resolution proximity or contact printing -For large gap exposure or thick resists 1 ea. ? SUSS Part No. 157808 Optics UV400/PROX/CON/W-150/LH350 Consisting of: -Cold light mirror no. 1, 110x115mm -Fly?s eye, Herasil -Condensor lens, Herasil, dia. 55mm -Two lens plates, Herasil, conf. D -Front lens, transparent, dia. 180mm 1 ea. ? SUSS Part No. 640MS064 Lamp HG 350W/S DC 1 ea. ? SUSS Part No. 25010999 Lamp Adapter LH350/HBO350W/S 1 ea. - SUSS Part No. 170957 Lamp Power Supply Unit CIC 1200 for LH350 -Constant light intensity mode -Constant power mode -For the following DC lamps HG 200 W, HG 350 W/S, HG 500 W, HG-XE 500 W -Operation of additional lamp with a current up to 35A possible (has to be specified and agreed upon) -Easy operation due to microprocessor control -Digital display of light intensity and lamp power simultaneously -Integrated inlet for UV-probe for easy calibration -Dual channel mode for 2-channel light-sensors, with several wave-lengths -Interlock for machine and lamp protection -Single pulse ignition ensures gentle operation, provides easy lamp start and increases lamp durability -For input voltages of 230V +/- 10% 50/60Hz -Power consumption: max. 2300 VA -Ignition box for LH350 1 ea. ? SUSS Part No. 61020680 2-CHANNEL LIGHT-SENSOR 365/405NM FOR CIC -For lamp power supply SUSS CIC -To install inside the mirrorhouse 1 ea. ? SUSS Part No. 1004580-Q Maskholder MA6/BA6/BL/Cont/M3-4/Specs/S-10mm X 10mm With small vacuum hold down area to allow the mask to be translated using multiple exposure site on one mask. Not for proximity processing 1 ea. - SUSS Part No. 1004581-Q Chuck MA6/VAC/SPEC Substrate 10mmX 10mm For processing 10 x 10mm samples up to 1.5mm thick. For processing in soft, hard, and vacuum contact modes. Substrates material With prealignment grooves 1 ea. ? SUSS Part No. 170643 MA6/BA6 Vibration Isolation and Damping System 1 ea. ? SUSS Part No. 161885 Electrical/Pneumatic Adaption Kit USA -Main power cable and connector according to US standards -3 pins, 220V, 20A, NEMA L6-20P -Rear panel assembled with 1/4" pneumatic plug-type connector for compressed air, nitrogen, vacuum and outgoing air. sensors, with several wave-lengths -Interlock for machine and lamp protection -Single pulse ignition ensures gentle operation, provides easy lamp start and increases lamp durability -For input voltages of 230V +/- 10% 50/60 Hz Power consumption: max. 2300 VA -Ignition box for LH1000. 2. 1 ea. - SUSS Part No. 1004582-Q NIL Upgrade NIL Upgrade Consisting of: Adaption Kit for MH MA6/BA6/M-7/AA-33/Dispense SUSS Part No. 183819 Software MA/BA6 V4.180 Embossing with Seperation Knife SUSS Part No. 164211 Nitrogen Purge Adaption Kit MA6/BA6 and MA8/BA6 Accessories for N2-substrate-stamp-separation Additional electronic modules insert MA6/BA6 with MA6/BA6 with additional motor driver controller and Sensor input pcb 168639 Motorized razor blade separation mechanics CHUCK MA6/BA6/PURGE/W-100/GLOBAL WEC/TH 0,5-/SPEC -For wafer up to 100mm diameter -For proximity, soft ? and vacuum Contact UV-curing in combination with stamp holder for proximity/contact processes -With nitrogen purge for negative resist -Nitrogen purge adaptation kit MA6/BA6 (164211) necessary -Size of wafer or substrate has to be specified by the customer 3. 1 ea. ? SUSS Part No. 26007908 Light Intensity Meter, -For measurement, check-up and calibration of intensity and light uniformity in the exposure area, consisting of: -Cleanroom storage case -Meter with digital display -Spare note pad and extra battery -Requires a probe: 4. 1. ea. - SUSS Part No. 61035726Channel Light Sensor 365NM (Calibrated) -For light intensity meter 5. 1 ea. - SUSS Part No. 149272 Channel Light Sensor 365NM (Calibrated) -For light intensity meter 6. Installation and warranty. BSA is seeking additional manufacturers who can meet or exceed all operating parameters of the reference system. This RFQ is being sent to SUSS MicroTec and Nanonex. All other interested manufacturers should forward a request for this solicitation to P. Jencius.
- Place of Performance
- Address: Brookhaven Avenue, Building 355, Upton, NY
- Zip Code: 11973
- Country: USA
- Zip Code: 11973
- Record
- SN00928563-W 20051110/051108212055 (fbodaily.com)
- Source
-
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