SOLICITATION NOTICE
66 -- SURFACE PROFILE MEASURING SYSTEM
- Notice Date
- 6/9/2006
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC06160979Q
- Response Due
- 6/23/2006
- Archive Date
- 6/9/2007
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the ONLY solicitation; offers are being requested and a written solicitation will NOT be issued. This notice is being issued as a Request for Quotations (RFQ) for a Surface Profile Measurimg System (quantity required 1 each) Surface Profile Measuring System Specifications: Step height repeatability: Shall have 7.5 angstrom, 1 sigma, step height repeatability (1,000 angstroms step calibration standard or smaller) Stylus Replacement: Shall have quick-change stylus replacement fixture. Stylus Size: Shall include 12.5 and 2.5 micron styli for thin films (diamond tip stylus with 45 degree inclusive cone angle). Shall include a 200 micron deep by 20 micron wide high aspect ratio stylus for deep trench applications. Sensor Technology: Shall have low inertia stylus sensor with linear variable differential transformer (LVDT) with resolution of 1 angstrom or less. X-Y Positioning: Shall have 200mm or greater motorized/programmable X-Y translation for automated multi-site, multi-scan operation with +/-5 micron or less X-Y positional repeatability. Theta Positioning: Sample stage shall have manual 360 degree theta rotation. Sample Stage: Sample stage shall have vacuum hold down and sample alignment pins for 3? to 8? wafers. Stylus Force: Programmable stylus force shall be settable from 0.03 mg to 15 mg. Video Microscopes: Shall include two color video microscopes: (1) high magnification camera (1mm field of view) and (2) low magnification top down view camera (10mm field of view). Scan Length Range: Shall be settable from 50?m to 50mm. Vertical measurement range: Shall be settable as high as 1 mm or greater. Maximum Data Points: Shall be 60,000 per scan or greater Step Detection Feature: Shall enable automatic detection and measurement of multiple steps in a single scan with automatic leveling feature. Analytical Software: Shall include analytical functions for calculating step height, geometries, roughness and waviness parameters, with programmable wave length cut-off filters. Shall include programmable, multi-scan, mapping software to generate 3D images of sample surface. Environmental Enclosure: Shall include ESD resistant enclosure to isolate scan area from air currents, acoustic noise and contamination. Vibration Isolation: Shall include vibration isolation platform to isolate surface profiler from external vibration. Calibration standard: Shall include NIST traceable calibration standard with nominal 5 micron step height for fast easy vertical calibration/verification of surface profiler. Computer Configuration: (minimum configuration): Intel Pentium 4, processor speed 3.2 GHz with 1GB RAM, or greater 80GB HDD, CD/RW drive, FDD drive 10/100 Mbps Fast Ethernet PCI network card Flash Point graphics card with video capture 101 keyboard, and trackball Microsoft Windows XP OS with surface profiler graphic user interface software 17-inch flat panel display monitor with adjustable stand Operation Manual: Shall include printed hard copy and 1 electronic copy on CD. The provisions and clauses in the RFQ are those in effect through FAC 05-09. The NAICS Code and the small business size standard for this procurement are 334516 and 500 employees respectively. The offeror shall state in their offer their size status for this procurement. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C09 Offers for the items(s) described above are due by COB on 6/23/2006 to Fax: 216-433-2480 and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://server-mpo.arc.nasa.gov/Services/NEFS/NEFSHome.tml Offerors shall provide the information required by FAR 52.212-1 (JAN 2006), Instructions to Offerors-Commercial, which is incorporated by reference. If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. FAR 52.212-4 (SEPT 2005), Contract Terms and Conditions-Commercial Items is applicable. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm All contractual and technical questions must be in writing (e-mail or fax) to Jean M. Boylan not later than COB 6/14/2006. TELEPHONE QUESTIONS WILL NOT BE ACCEPTED. Selection and award will be made to that offeror whose offer will be most advantageous to the Government, with consideration given to the factors of proposed technical merit, price, and past performance. It is critical that offerors provide adequate detail to allow evaluation of their offer. (SEE FAR 52.212-1(b)). Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc. These representations and certifications will be incorporated by reference in any resultant contract. An ombudsman has been appointed -- See NASA Specific Note "B". It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes may be viewed at the following URLs linked below.
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