SOLICITATION NOTICE
66 -- X - RAY PHOTOELECTRON SPECTROMETER SYSTEM
- Notice Date
- 7/12/2007
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC07205326Q
- Response Due
- 7/30/2007
- Archive Date
- 7/12/2008
- Small Business Set-Aside
- N/A
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP) set forth in FAR Part 13. This notice is being issued as a Request for Quotations (RFQ) for an X-Ray Photoelectron Spectrometer (XPS) System. Background: The NASA Glenn Research Center (GRC) has requirements for an X-Ray Photoelectron Spectrometer (XPS) System for characterization of thin films materials on semiconductor (e.g., SiC) substrates. The objective is to facilitate the development of sensors and electronics that can withstand high temperatures (500 degrees Celsius and higher) and other harsh conditions. Key features of the required XPS system include ion milling capability for depth profiling and the ability to provide chemical state information with high spatial resolution. Specifications: The Contractor shall provide a spectrometer which shall have the following features and capabilities: Item 1: Scanning Focused X-ray Microprobe: A. X-rays shall be delivered from a monochromated micro focused scanning X-ray beam. This will allow the user to define the analysis area and ensure maximum sensitivity during small area analysis. B. System shall be capable of operating in snapshot mode. This means the detector provides complete spectra at each pixel of an X-Ray Photoelectron Spectrometer (XPS) map. This capability will provide all the data required for retrospective chemical state mapping and quantitative chemical imaging in one step. C. The monochromatic X-ray source shall be capable of providing the sensitivity required for rapid chemical state imaging, as well as micro area spectroscopy (≤10 ?m to 100 ?m), depth profiling, and mapping. The system shall also provide high performance large area spectroscopy with count rates ≥ 1 Mcps and a peak energy resolution ≤ 1.00 electron Volts. D. System shall be able to achieve ≤ 0.50 eV Full Width at Half Maximum resolution of the Ag 3d 5/2 peak. E. System shall be capable of practical spectroscopy and sputter depth profiling at 10?m, that is, it shall be possible to obtain survey spectra or detailed high resolution spectra at 10?m in less than 20 minutes. Item 2: Electron Detector: A. The system shall be equipped with a 180? spherical capacitor hemispherical electron energy analyzer optimized for energy resolution and using high angular acceptance lens optimized for small area XPS sensitivity. B. Elemental sensitivity at spot sizes ≤10.0 ?m shall be ≥ 4 kcps (thousand counts per second) with a peak energy resolution of ≤ 0.60 eV. Sensitivity at spot sizes ≤20.0 ?m shall be ≥ 15 kcps with a peak energy resolution of ≤ 0.60 eV C. The detector shall be able to collect a minimum of 16 channels of data simultaneously, allowing for rapid data acquisition and maximum sensitivity in both the scanned and unscanned data acquisition modes. Item 3: Selection of Area of Analysis: A. The system shall provide precise sample positioning with the use of an optical microscope, camera, and light source. B. X-ray beam induced secondary electron imaging shall insure accurate defining of analysis area. Item 4: Ion Gun for Sputtering A. The system shall have a 100 Volts to 5kiloVolt differentially pumped Argon ion gun with a regulated leak valve to be used for specimen surface cleaning and depth profiling. B. The ion source shall be able to operate at ion acceleration voltages between 0.2 to 5kV in order to provide effective sputtering rates at low accelerating voltages for ultra thin film analysis and at high accelerating voltages for thick film depth profile analysis. The lens column shall incorporate a 5 degree bend for suppression of neutral ions. C. The total ion current shall be > 5.0 microAmps @ 5 kV. D. The ion gun system shall be capable of programmable etch rate changes, allowing for rapid profiling through micron thick layers and slow etching when thin layers are encountered. E. The ion gun shall be software controlled with parameters that can be stored as a software setting, making the ion gun easy to use and ensuring the ability to repeat a specific experiment. F. Sputter depth profiling shall be done using Zalar Rotation for improved sharpness of buried interfaces and increased ability to detect thin buried layers and contamination at interfaces. Compucentric sample stage motion is necessary so that Zalar profiles can be performed at analysis locations away from the rotational center of the sample. Item 5: Analysis Chamber/Sample Stage A. The analysis chamber shall be UHV compatible with stainless steel construction with a ion pumped/titanium sublimation pumped base vacuum pressure of ≤ 5 x 10-10 torr. B. Introduction/analysis chambers shall be capable of accommodating large and irregular sample sizes up to 90mm diameter. C. The sample stage shall be a five axis computer driven motorized stage. X and Y translation shall be capable of allowing access to all points on a large sample (>60 mm) platen. Z translation shall be capable of 20 mm and tilts of -45? to 45?. Multiple sample positions shall be able to be stored by the computer for automated, unattended analysis of multiple samples. D. A bake out system necessary for long term maintenance of ultra high vacuum shall be built into the structure of the spectrometer. E. The analysis chamber shall have a port available so that a reaction chamber can easily be mounted on the system at a future time. Item 6: Charge Neutralization A. System shall have the ability to neutralize any charge build up on samples, thereby allowing effortless analysis of insulating materials. B. The charge neutralization system shall be capable of self-regulating and should work automatically without adjustment for most types of samples such that once it is turned on, there is no need for individual sample tuning. It shall be possible to depth profile a multi-layer sample comprised of alternating metal/insulator layers without incurring any charge shifts in the peaks from the different layers. Item 7: PC Data Station/Software A. The computer system shall be a high performance PC with an operating system compatible with the NASA computing system capable of controlling all necessary hardware, analysis, data massage and data output. It shall be capable of background data manipulation. B. The data manipulation software shall be completely documented with full explanations of procedures and commands. It shall also include all the utilities necessary to allow transfer of data files into Microsoft Office programs for report generation and presentations. C. Data reduction tools shall need to include advanced image and data processing functions such as synthetic curve fitting, linear least squares fitting, target factor analysis, chemical state maps, and angle resolved depth profile interpretation software. The software shall also have fitting routines capable of creating chemical state depth profiles. D. Accurate quantitation shall be achieved by providing experimentally derived tables of sensitivity factors and state of the art spectrometer response function algorithms. E. Computer system shall include a rewritable CD drive and a color ink jet printer. Item 8: Install A. Installation shall include system assembly and performance verification. B. The vendor shall provide basic on site training on the operation of the equipment when the equipment is installed. This shall be followed by three days of extensive hands-on analytical training by a vendor scientist within 3 ? 6 months of installation. Delivery: Delivery shall be 6 months after receipt of order. **NOTE TO PROSPECTIVE OFFERORS: OFFEROR MUST INCLUDE ADEQUATE INFORMATION FOR THE GOVERNMENT TO EVALUATE WHETHER OR NOT THE ITEMS MEET THE ABOVE SPECIFICATIONS** The provisions and clauses in the RFQ are those in effect through FAC 05-16. The NAICS Code and the small business size standard for this procurement are 334516 and 500 respectively. The offeror shall state in their offer their size status for this procurement. All responsible sources may submit an offer which shall be considered by the agency. Delivery to Glenn Research Center is required within 6 months ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is D0-C9 Offers for the item(s) described above are due by Monday July 30, 2007 at 4:30 p.m. EST and may be faxed or mailed to NASA Glenn Research Center Attn: Timothy M. Bober 21000 Brookpark Road Mail Stop: 500-305 Cleveland Ohio 44135 and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), Corporate and Government Enitity (CAGE) Code, DUNS number, identification of any special commercial terms, and be signed by an authorized company representative. Offerors shall provide the information required by FAR 52.212-1 (JAN 2004), Instructions to Offerors-Commercial, which is incorporated by reference. If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. Offers may also be submitted via e-mail to Timothy.M.Bober@nasa.gov . Offerors are responsible for ensuring that their respective proposals and e-mails are received. FAR 52.212-4 (OCT 2003), Contract Terms and Conditions-Commercial Items is applicable. FAR 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-- Commercial Items is applicable. As prescribed in 12.301(b)(4), insert the following clauses: a) The Contractor shall comply with the following Federal Acquisition Regulation (FAR) clauses, which are incorporated in this contract by reference, to implement provisions of law or Executive orders applicable to acquisitions of commercial items: 52.219-8, Utilization of Small Business Concerns (May 2004), 52.219-9, Small Business Subcontracting Plan (Sept 2006) 52.219-16, Liquidated Damages?Subcontracting Plan (Jan 1999), 52.233-3, Protest After Award (AUG 1996) (31 U.S.C. 3553). 52.233-4, Applicable Law for Breach of Contract Claim (OCT 2004) (Pub. L. 108-77, 108-78) (b) The Contractor shall comply with the following FAR clauses in this paragraph (b) that are incorporated in this contract by reference to implement provisions of law or Executive orders applicable to acquisitions of commercial items: 52.222-3, Convict Labor (June 2003) (E.O. 11755) 52.222-19, Child Labor?Cooperation with Authorities and Remedies (Jan 2006) (E.O. 13126) 52.222-21, Prohibition of Segregated Facilities (Feb 1999) 52.222-26, Equal Opportunity (Apr 2002) (E.O. 11246) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Sept 2006) (38 U.S.C. 4212) 52.222-36, Affirmative Action for Workers with Disabilities (Jun 1998) (29 U.S.C. 793) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, Other Eligible Veterans (Sept 2006) (38 U.S.C. 4212), 52.225-1 Buy American Act ? Supplies (June 2003) (41 U.S.C. 10A-10D), 52.232-25 Prompt Payment (OCT 2003), 52.232-33, Payment by Electronic Funds Transfer--Central Contractor Registration (OCT 2003) (31 U.S.C. 3332),52.234-1 Changes ? Fixed Price (AUG 1987). The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm All contractual and technical questions must be in writing (e-mail or fax) to Timothy M. Bober not later than Friday July 20, 2007. Telephone questions WILL NOT be accepted. Selection and award will be made to the lowest priced, technically acceptable offeror, with acceptable past performance. Technical acceptability will be determined by review of information submitted by the offeror which must provide a description in sufficient detail to show that the product offered meets the Government's requirement. ***It is critical that offerors provide adequate detail to allow evaluation of their offer. (SEE FAR 52.212-1(b)).*** Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc . These representations and certifications will be incorporated by reference in any resultant contract. An ombudsman has been appointed -- See NASA Specific Note "B". Prospective offerors shall notify this office of their intent to submit an offer. It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes may be viewed at the following URLs linked below.
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