SOLICITATION NOTICE
66 -- Laser Pattern Generator
- Notice Date
- 7/26/2007
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899-1640, UNITED STATES
- ZIP Code
- 00000
- Solicitation Number
- SB1341-07-RQ-0351
- Response Due
- 8/3/2007
- Archive Date
- 8/18/2007
- Point of Contact
- Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884, - Todd Hill, Contracting Officer, Phone 301-975-8802, Fax null,
- E-Mail Address
-
carol.wood@nist.gov, todd.hill@nist.gov
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FEDERAL ACQUISITION REGULATION (FAR) SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THIS SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF THE FAR SUBPART 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-18. The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This acquisition is unrestricted and all responsible quoters may submit a quote. The National Institute of Standards and Technology (NIST), Center for Nanoscale Science and Technology (CNST), has a requirement for the purchase of a Laser Pattern Generator (LPG) System. The LPG system is required to fulfill a critical need for a sub-micron lithography tool to be installed in the Clean Room Facility at the Advanced Measurement Laboratory on the NIST Campus in Gaithersburg, MD. The LPG system is a laser-based lithography tool which will be used to accurately pattern and replicate micron and sub-micron sized design features onto substrates coated with photosensitive materials. The system shall be designed for use in a research and development clean room laboratory operating at a class 100 cleanliness level. LINE ITEM 0001: All quoters shall provide a quotation for a quantity of one (1) each Laser Pattern Generator System, which meets or exceeds all of the following required specifications. All equipment must be new. MECHANICAL SYSTEM 1. Must have a precision two axis laser-based interferometric stage control system with at least 10 nanometer stage placement resolution; 2. Must meet or exceed an overlay x- and y-alignment specification of 0.6 micrometers; 3. Must have a minimum active write area of 140 millimeters in the x-direction and 140 millimeters in the y-direction; 4. Must accommodate a variety of substrate sizes and thicknesses ranging from a 1-inch by 1-inch square up to and including a 6-inch by 6-inch square with thicknesses up to and including 5 millimeters. In addition, it must accommodate round substrates from a 50 millimeter diameter up to and including a 200 millimeter diameter; 5. Must be supplied with optical top side alignment as well as optical backside alignment capability with at least three levels of magnification; 6. Must be designed, built upon and supplied with a substantial vibration isolation support system; 7. The mask writer shall be powered using common voltages and frequencies found in the United States. EXPOSURE OPTICS 1. Must be based on a solid state laser diode operating at an exposure wavelength of 405 nanometer; 2. Must be capable of achieving at least a 600 nanometer diameter spot-size at the wafer plane. Lower diameter is preferred; 3. The exposure optics must have auto-focus capability; 4. Must have an exchangeable write-head system to facilitate change-outs between optical lenses of different focal lengths with correspondingly different minimum spot sizes. ELECTRONICS, SYSTEM CONTROL AND SOFTWARE 1. The LPG system control shall be PC-based and supplied with all necessary system control electronics for image data processing and beam exposure and positioning; 2. The LPG control system shall make use of a computer-based graphical user interface and shall be in the English language; 3. The control system software shall provide administrator and user modes of operation to protect the system. Operation of the instrument shall be password protected; 4. The system shall be supplied with a 10/100 base T ethernet port for LAN access; 5. The computer system shall be supplied with data conversion software supporting both GDS-II and DXF file formats. GENERAL REQUIREMENTS 1. All equipment, connections, power supplies, electrical cords, etc., shall meet all applicable United States electrical and associated safety and health code requirements relative to the described equipment; 2. The system shall be provided with two complete copies of all schematics, installation requirements and instructions, as well as operating and maintenance manuals. All documentation shall be provided in English; 3. The system shall be tested and inspected at the seller?s site to ensure that all technical requirements of this specification have been met. All test/inspection activities shall be documented and provided (in person, via mail, or via e-mail) to the NIST Technical Contact (To be identified upon award) prior to shipment of the system. This documentation shall be reviewed to ensure that all minimum specifications have been successfully met. NIST reserves the right to have a representative present during test/inspection activities. The Contractor shall notify NIST a minimum of 30 days before conduct of testing at the seller?s site. NIST?s attendance at the Contractor?s on-site testing shall not, in any way, delay the Contractor?s test schedule. LINE ITEM 0002: INSTALLATION: The Contractor shall install the system. Installation shall include, at a minimum, uncrating/unpackaging of all equipment, set-up and hook-up of all equipment, start-up, and demonstration of all minimum specifications. Qualified personnel shall install the system and perform all activities necessary to ensure the system is fully functional and meets all required specifications. The equipment shall be installed in a Class 100 Cleanroom. NIST shall review the Cleanroom protocols with the installation personnel before installation commences. LINE ITEM 0003: TRAINING: The Contractor shall provide training on-site at NIST Gaithersburg for NIST personnel. This training may commence immediately upon completion of installation and demonstration of specifications. Training shall include, at a minimum, a thorough demonstration of all equipment functions, equipment operation which will allow NIST personnel to operate the system to its full capabilities, and basic troubleshooting. Installation and training must be scheduled, in advance, with the NIST Technical Contact, (to be identified upon award.) LINE ITEM 0004: WARRANTY: The Contractor shall provide, at a minimum, a one year warranty on installation and equipment. The warranty shall be on-site, or return to Contractor, as determined by the Contractor. All parts and labor shall be included. For on-site warranty issues, all travel shall be included. For return to Contractor warranty issues, shipping charges and risk of loss for shipments to and from NIST shall be the Contractor?s responsibility. NIST requires the system be operational to the maximum extent practicable. Therefore, the warranty must include all of the following: -Not later than 5 business days from the time the problem is reported to the Contractor, the Contractor must respond to NIST and restore operation such that the system is functional and usable for its intended purpose. This restoration may be achieved through a temporary measure such as on-site repair, technical workaround, or loaner equipment (at no charge to the Government). -The permanent repair must be completed not later than 30 days from the date the problem is reported to the Contractor. -If necessary, the Contractor shall ship (or otherwise deliver) loaner equipment to NIST. The Contractor shall assume all responsibility and liability for shipments of equipment to and from NIST. -The Contractor shall provide telephone support during regular business hours of 7:00 AM ? 5:00 PM Eastern Time. LINE ITEM 0005 ? OPTION LINE ITEM ? SERVICE CONTRACT The Contractor shall provide a price for a one-year service contract. If exercised, the service contract shall commence upon expiration of the warranty. The terms of the service contract shall be identical to the warranty. DELIVERY Delivery terms shall be FOB DESTINATION. Delivery, installation and training must be completed not later than 180 days after receipt of purchase order. FOB DESTINATION means: The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. ACCEPTANCE NIST will accept the system only upon successful completion of delivery, installation, training and demonstration of all minimum specifications. EVALUATION CRITERIA AND BASIS FOR AWARD Award will be made to the Contractor whose quote offers the best value to the Government after evaluation of technical factors and price. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability: Meeting or Exceeding the Requirement, 2) Past Experience, 3) Past Performance, and Price. Technical Capability, Past Experience and Past Performance, when combined, are more important than price. TECHNICAL CAPABILITY Evaluation of Technical Capability shall be based on the information provided in the quotation. Offerors shall include the manufacturer, make and model of the products, manufacturer sales literature or other product literature which addresses all specifications, and clearly documents that the offered products meet or exceed the specifications stated above. In determining best value, consideration shall be given to instruments with a diameter spot-size less than 600 nanometers. In addition, the Government has a desire to attain specific writing capabilities such as substrate throughput (with, for example, a 20% write area) and minimum feature resolution using a commercially available resist and development process. If this feature is available, the Contractor?s shall quote this feature as a separate line item on their quotation. While award is not contingent on this feature, if quoted, the Government will consider the purchase of this feature based on the value to the Government, technical merit and price considered. PAST EXPERIENCE Past Experience will be evaluated to determine the degree of the Contractor?s experience manufacturing the same or similar equipment. The degree of relevance between previously manufactured systems and the proposed system shall be considered. Contractors who have delivered 3 or more systems shall be preferred. PAST PERFORMANCE Past Performance shall be evaluated to determine the overall quality of the product and service provided by the Contractor. Evaluation of Past Performance shall be based on the references provided and/or information provide by NIST and its affiliates. PROVISIONS AND CLAUSES The full text of a FAR provision or clause may be accessed electronically at www.acqnet.gov/far. The following provisions apply to this acquisition: 52.212-1, Instructions to Offerors ? Commercial; 52.212-3, Offeror Representations and Certifications ? Commercial Items. In accordance with FAR 52.212-3 Offeror Representations and Certifications ? Commercial Items, offerors must complete annual representations and certifications on-line at http://orca.bpn.gov. If paragraph (j) of the provision applies, a written submission is required. 52.217-5 Evaluation of Options--Except when it is determined in accordance with FAR 17.206(b) not to be in the Government's best interests, the Government will evaluate offers for award purposes by adding the total price for all options to the total price for the basic requirement. Evaluation of options will not obligate the Government to exercise the option(s). The following clauses apply to this acquisition: 52.204-7 Central Contractor Registration; 52.212-4 Contract Terms and Conditions?Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders?Commercial Items including subparagraphs: (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I; (3) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns (if the offeror elects to waive the preference, it shall so indicate in its? offer); (7) 52.219-8, Utilization of Small Business Concerns; (14) 52.222-3, Convict Labor; (15) 52.222-19, Child Labor?Cooperation with Authorities and Remedies; (16) 52.222-21, Prohibition of Segregated Facilities; (17) 52.222-26, Equal Opportunity; (18) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (19) 52.222-36, Affirmative Action for Workers with Disabilities; (20) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (21) 52.222-39 Notification of Employee Rights Concerning Payment of Union Dues or Fees; (24) 52.225-3, Buy American Act?Free Trade Agreement?Israeli Trade Act; (26) 52.225-13 Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129; and (31) 52.232-33, Payment by Electronic Funds Transfer--Central Contractor Registration. 52.217-7 Option for Increased Quantity ?Separately Price Line Items -- The Government may require the delivery of the numbered line item, identified in the Schedule as an option item, in the quantity and at the price stated in the Schedule. The Contracting Officer may exercise the option by written notice to the Contractor at any time prior to the expiration of the manufacturer?s warranty. Delivery of added items shall continue at the same rate that like items are called for under the contract, unless the parties otherwise agree. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. REQUIRED SUBMISSIONS All offerors shall submit the following: 1) An original and one copy of a quotation which addresses all line items; 2) Two copies of technical description and/or product literature which clearly documents that the proposed product meets all minimum specifications. The Contractor shall provide documentation/certification that the system meets or exceeds United States codes or standards; 3) The Contractor shall describe their previous experience in manufacturing, assembling and providing similar systems and state the number of systems manufactured and delivered to other customers; 4) The Contractor shall provide a list of at least three (3) past performance references. The list of references shall include, at a minimum: The name of the company or organization and the reference contact person; the telephone number of the reference contact person; the contract or grant number; the amount of the contract; the address and telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed; 5) A description of the commercial warranty; 6) This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/ Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The offeror shall state ?The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.? OR The offeror shall state ?The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s). Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the offeror?s FSS or GWAC contract, and the statement required above shall be included in the quotation. DUE DATE FOR QUOTATIONS All quotations shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Carol A. Wood, 100 Bureau Drive, Stop 1640, Gaithersburg, MD 20899-1640. All offerors shall ensure the RFQ number is visible on the outermost packaging. Submission must be received not later than 3:30 p.m. local time on August 4, 2007. FAX quotations shall not be accepted. E-mail quotes shall be accepted. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Carol Wood, Contract Specialist on 301-975-8172. NIST is not responsible for late delivery due to the added security measures. In addition, offerors/quoters who do not provide 24-hour notification in order to coordinate entrance to the NIST campus shall assume the risk of not being able to deliver quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, bldg., room number, etc.). If 24 hour notification was not provided, it is suggested your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitor center and complete delivery. Notice shall include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility.
- Place of Performance
- Address: Ship to:, NIST, Shipping & Receiving, 100 Bureau Drive, Gaithersburg, MD
- Zip Code: 20899
- Country: UNITED STATES
- Zip Code: 20899
- Record
- SN01352965-W 20070728/070726220514 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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