SOLICITATION NOTICE
66 -- Atomic Layer Deposition System
- Notice Date
- 8/3/2007
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899-1640, UNITED STATES
- ZIP Code
- 00000
- Solicitation Number
- Reference-Number-NB620010-7-06333
- Response Due
- 8/17/2007
- Archive Date
- 9/1/2007
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF FAR 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS. ***This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-18.*** *** The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This requirement is unrestricted and all interested Contractors may submit a quotation.*** Background: The Center of Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) operates a multi-user facility that provides hands-on access to state-of-the-art Nanofabrication equipment and processes to researchers of all levels of knowledge from novice to expert and from both inside and outside NIST. The tools within the facility are used by the researchers on a pay-by-use basis. Currently the CNST requires an atomic layer deposition (ALD) tool for depositing thin films. This tool is different from the conventional physical and chemical vapor deposition tools the CNST has now. ALD is a self-limiting process, which only deposit one atomic layer at one time. The film coating is based on alternating saturative surface reactions. Based on the nature of the ALD process, the user can make new materials by controlling layer atoms, achieve ultra-thin and pin-hole free film, can control the film thickness precisely and can coat thin films on 3D nano-structures conformally. CNST will be using this ALD tool to provide the users with a variety of applications, from material research to thin film coating and device fabrication. Thus, this ALD tool is required to be able to coat a large variety of materials on different substrates of different shapes, sizes, and thicknesses. Broad precursor coverage, flexible process adjustment (temperature, pressure, power etc.) accurate precursor dose control, good coating uniformity and conformity and adequate process monitoring are the basic requirements for the ALD tool. ***The National Institute of Standards and Technology is seeking to purchase One (1) Atomic Layer Deposition, (2) Installation and Training, and (3) A One-Year Extended Warranty.*** ****All interested Contractor?s shall provide a quote for the following: Line Item 0001: Quantity One (1) Atomic Layer Deposition, which shall meet or exceed the following minimum specifications: 1. System a) A thermal ALD with plasma assistance. b) Coating for both the planar and 3D samples. Stronger consideration will be given to the following features: c) In-situ process monitoring or analysis. d) Remote plasma source. 2. Reaction chamber ? a) Ability to coat a 200mm diameter or larger wafer. b) Ability to heat the chamber wall up to 100 degrees Celsius or higher. c) Ability of the chamber to work in 10superscript6 Torr vacuum. d) Ability to pump down to 1.0x10superscript5 Torr in less than 10 minutes. e) Ability of Windows to add process monitors, such as ellipsometry and mass spectrometry. f) A 50mm or higher chamber height for 3-D sample coating. 3. Sample loading a) Ability of the chamber to open for manual sample loading. b) Chamber loading takes less than 15 min. (from venting to pumping down). c) A sample load-lock is required. d) Load-lock to handle 75mm, 100mm, 150mm, 200mm SEMI standard wafers as well as 100mm, 125mm and 150mm mask plates and wafer pieces. e) Load-lock to be able to pump down in 5 minutes or less. 4. Plasma a) Plasma for assisting the thermal ALD and enabling room temperature ALD process. b) Ability of plasma to be turned off when not required. c) Power repeatability a minimum of less than plus or minus 2%. d) Plasma source must be of sufficient diameter to satisfy the process uniformity plus or minus 5% or better over 200mm in diameter semi standard wafer. e) Plasma must not heat the wafer during the process. Stronger consideration will be given to the following feature: 600w or higher inductively coupled plasma (ICP) source is preferred. 5. Substrate Temperature a) Ability of the substrate to be heated up to 500 degrees C or higher. b) Ability of the substrate to reach 500 degrees C from room temperature in 60 minutes or less. c) Temperature variation at the set-point must be less than plus or minus 1 degree C. d) Temperature uniformity across 200mm diameter substrate must be less than plus or minus 1 degree C. Stronger consideration will be given to the following feature: Substrate cooling system is preferred. 6. Pumping System a) 300m3/h or more for the dry pump. b) Turbo pump speed - no less than 400 liter/s. c) Ability of the process chamber to able to reach and maintain a base pressure of 1x10superscript6 torr in 24 hours. d) Ability of process pumps to maintain process pressure set-point to plus or minus 2% or better. Stronger consideration will be given to the following feature: Dry and turbo pumps are preferred. 7. Sources a) 12 or more gas lines. b) 5 or more liquid/solid source lines. c) Ability of a minimum of 4 liquid/solid precursors and the associated delivery lines to be heated up to 110 degree C or higher. d) Ability of the pipe work to take the bubblers from the major precursor manufacturers. e) The size of the bubbler can be the smallest by the manufacturer and up to 500g (weight of content) or larger. f) High temperature valves for the heated source bubblers. g) All the gasses and precursors stored in the safety cabinet. h) A venting system for the cabinet. i) The gas lines are for both precursors and carrier gases e.g. Ar, N2, O2, O3, H2, NH3, TMA, SF6 and others. j) Liquid/solid bottle change or refill shall be less than 1 hr. k) The line change or purge shall be less than 4hrs. Stronger consideration will be given to the following feature: Attached glove box is preferred for precursor change and refill. 8. Safety and Interlocks a) Safety interlock for the incompatible gases. b) System must be equipped with proper interlocks to prevent damage to the system and to ensure the safety of the operator during operation. 9. Precursor dose control a) 10ms or faster Fast-pulse ALD valve. b) 150ms or faster rapid automatic pressure controller. 10. Process Monitoring In-situ film thickness, such as ellipsometry, or composition characterizations are optional items to be included with the quote. 11. Maintenance a) Process chamber - easy to access for routine cleaning. b) Chamber clean process. 12. Software a) User-interface software - easy to operate and Windows XP-based operating system. b) Fully controllable process from user-interface software. c) Process steps and cycles - easy to edit. d) User-interface software - automated data logging for all process parameters and error logging for system status. e) Software ? upgrades to system software shall be required at no additional cost during the warranty period. 13. Required Test Data All offerors are required to provide test data with the quotation. All test data must be submitted along with the quotation on the due date and time stated below. Offerors shall utilize their own available sample materials in providing the below information or shall provide the information based on previous testing of the types of sample data required herein. In either case, the offerors shall provide a detailed description of the sample materials utilized to generate the data. The data shall be provided from the type of system that the offeror is quoting in response to this solicitation. Tests shall be performed and test data provided at no cost to the Government. a) Process Test Process library from the vendor (process recipe and film cross section SEMs) Oxide: SiO2, Al2O3, TiO2, Ta2O5, HfO2, ZnO. Nitride: AlN, TiN, HfN, GaN. Metals: Pt, Au, Cu, Fe, Co, Ni, Ru, Mn, Ti, Hf, Ta, W. Nanolaminates: TiO2/Al2O3, SiO2/Al2O3 or others. The vendor must also provide the following with the quotation: 1. Sample description (precursor, thickness, substrate etc.). 2. Process conditions (recipe, rate, etc.) 3. SEM images or other measurement data. 16. Acceptance and Inspection: The following tests will be conducted, by NIST, post-award at the Contractor?s facility: Sample test for NIST Coating materials: SiO2, Al2O3, TiN and Ru. Film thickness: 20nm, 100nm and 500nm. Substrate for coating: Polyethylene terephthalate (PET); Si and Fused silica Substrate Size: 200mm in diameter and 0.5mm in thickness. Single side coating, no visible substrate bending after deposition. Film thickness variation shall be less than 2% across 200mm wafer. Run to run film thickness variation shall be 2% or less. Line Item 0002: Installation and Training: The Contractor shall provide installation for the ALD. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, set-up and hook-up of the etcher, demonstration of all required specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD. The Contractor shall schedule and facilitate one (1) training session for three (3) technical personnel at NIST. The training shall provide a thorough demonstration of all equipment functions, data administration, basic troubleshooting, and hardware/software operation, cleaning and basic maintenance, leak-detection, and minor system modifications. The training may be completed at NIST immediately after installation and demonstration of performance specifications, but no later than 30 days after installation. ***The Contractor shall provide minimum of one (1) year warranty coverage for the instrumentation. On-site warranty coverage must be included at no additional cost to the Government. Twenty-Four (24) hour phone response time is required and forty-eight (48) hour on-site service is required. *** Line Item 0003: Extended Warranty which is to begin on the date that the CLIN 0002 warranty ends. The Contractor shall provide an extended one (1) year warranty coverage for the instrumentation. The extended warranty shall include on-site warranty coverage, twenty-Four (24) hour phone response time is required and forty-eight (48) hour on-site service is required. ***Delivery shall be provided not later than 4 months after receipt of an order and installation shall be no later than 30 days after delivery. Delivery shall be FOB Destination. FOB Destination means: The Contractor shall pack and mark the shipment (by clean-room equipment standard) in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The Contractor shall deliver all line items to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-1640. *** Award shall be made to the Contractor whose quote offers the best value to the Government, price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement", 2) Past Performance, 3) Past Experience, and 4) Price. Technical Capability, Past Performance, and Past Experience, when combined, shall be more important than price. If Technical Capability, Past Performance, and Past Experience are equivalent, price shall be the determining factor. It should be noted that stronger consideration will be given for a system that provides the additional features as identified in Line Item 0001: sub-lines 1, 4, 5, 6, and 7. Technical Capability: Evaluation of Technical Capability will be based on the information provided in the quotation. Quoters shall include product literature, which addresses all specifications and clearly documents that the product offered meets or exceeds the specifications identified herein. Test data shall be evaluated and utilized to validate the performance specifications within the product literature and performance specifications not documented through product literature. Past Performance: Past Performance will be evaluated to determine the overall quality of the products and services provided and the Contractor?s history of meeting delivery schedules for prior deliverables. Evaluation of Past Performance shall be based on the references provided and/or the quoter?s recent and relevant procurement history with NIST or its affiliates. Offerors must provide a list of at least three (3) references to whom the same or similar equipment has been provided. Past Experience: The Contractor shall describe past experience performing similar work. Explain how the experience is relevant to this project and how the experience will ensure successful completion of the project. Past Performance, Past Experience, and Price shall not be evaluated on quotes that are determined technically unacceptable in accordance with the Technical Capability Evaluation factor. *** The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. *** *** The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. *** *** Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. ***The following clauses apply to this acquisition: 52.204-7 Central Contractor?s Registration (CCR) Database; 52.212-4 Contract Terms and Conditions?Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders?Commercial Items including subparagraphs: (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I; (3) 52.219-4, Notice of Price Evaluation Preferences for HUBZone Small Business Concerns (if the offeror elects to waive the preference, it shall so indicate in it?s offer); (7) 52.219-8, Utilization of Small Business Concerns; (15) 52.222-3, Convict Labor; (16) 52.222-19 Child Labor ? Cooperation With Authorities And Remedies; (17) 52.222-21, Prohibition of Segregated Facilities; (18) 52-222-26, Equal Opportunity; (19) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (20) 52.222-36, Affirmative Action for Workers with Disabilities; (21) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; (22) 52.222-39, Notification of Employee Rights Concerning Payment of Union Dues or Feeds (Dec 2004) (E.O. 13201); (26) 52.225-5, Trade Agreements (NOV 2006); (27) 52.225-13 Restriction on Certain Foreign Purchases; (32) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. *** This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The offeror shall state ?The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.? OR The offeror shall state ?The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s). Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the offeror?s FSS or GWAC contract, and the statement required above shall be included in the quotation. ***All quoters shall submit the following: 1) An original and one (1) copy of a quotation which addresses all of the above line items; 2) An original and one (1) copy of the technical description and/or product literature; 3) Description of commercial warranty, 1 year extended warranty, and service options; 4) An original and one (1) copy of the most recent published price list(s), 5) Past performance references which must include the company/organizations name, contact person, phone number, and e-mail address, 6) A description of relevant past experience, and 7) All required test data. ***All quotes shall be received not later than 3:00 PM local time, on August 20, 2007 at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Joan Smith. Any questions or concerns regarding this solicitation should be forwarded in writing via e-mail to the Contract Specialist ? joan.smith@nist.gov. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 24-hour (excluding weekends and holidays) prior notice shall be made to the Contracts Office at 301-975-6984. NIST is not responsible for late delivery due to the added security measures. In addition, offerors/quoters who do not provide 24-hour notification in order to coordinate entrance to the NIST campus shall assume the risk of not being able to deliver offers/quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, bldg., room number, etc.). If 24-hour notification was not provided, it is suggested your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitor center and complete delivery. Notice shall include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility. E-mailed quotes are acceptable. Faxed quotes will NOT be accepted. ***
- Place of Performance
- Address: National Institute of Standards and Technology, Gaithersburg, Maryland
- Zip Code: 20882
- Country: UNITED STATES
- Zip Code: 20882
- Record
- SN01361369-W 20070805/070803220500 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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