SOLICITATION NOTICE
44 -- 3-TUBE ATMOSPHERIC FURNACE SYSTEM
- Notice Date
- 8/6/2007
- Notice Type
- Solicitation Notice
- NAICS
- 339111
— Laboratory Apparatus and Furniture Manufacturing
- Contracting Office
- Department of the Air Force, Air Force Materiel Command, AFMC - Air Force Materiel Command Headquarters, HQ AFMC/PKX 4375 Chidlaw Rd Ste 6, Wright-Patterson AFB, OH, 45433, UNITED STATES
- ZIP Code
- 00000
- Solicitation Number
- F4F5AN7197A001
- Response Due
- 8/15/2007
- Archive Date
- 8/30/2007
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This Solicitation No. F4FTAE7162AC01 is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-15. This is Full and Open Competition. The associated NAICS Code is 339111. This RFQ has nine (9) line items: 0001 A 3-tube Atmospheric Furnace System to process up to 4 inch Si wafers; Two tubes are set up for diffusion, the third tube for wet-dry oxidation. 0002 A support frame to enable three furnaces to be stacked vertically. 0003 Provision of a heat exchanger mounted on top of the stack to assist cooling. 0004 A heated mantle/bubbler unit to enable wet-dry processes on one tube. 0005 Alternative control system to the standard Eurotherm based system; this equipment is manufactured by ICCI, and includes a Control System with full integration into the furnace system. 0006 Spare set of quartzware consisting of process tube, wafer boat (3 inches or 4 inches) and quartz door closure plate/insulated baffle. 0007 Quartz interface jig to adapt a 3 inch wafer boat to be used in a 4 inch furnace tube. 0008 Installation and Training for three furnace stacks; estimated at $1,000.00/day per furnace installation, and $1,000.00/day per furnace for training. 0009 - Cost to have one of the four furnaces built to perform LPCVD processes. The required Minimum Specifications and Salient Characteristics for Furnace System 1. A 3-tube atomospheric furnace system to process 3 inch and 4 inch Si wafers: 1 tube for P diffusion, 1 tube for B diffusion, and 1 tube for dry/wet oxidations. All diffusions are solid source, and the wet oxidation tube will use a D1 water bubbler. 2. If your design provides 3 vertically-stacked furnaces, please provide a suitable framework to safely support all 3 furnaces, such that the bottom tube load centerline is ergonomically positioned above the floor. 3. Each tube must be capable of operating up to 1150 degrees C, with a single 208V, 60Amp, 3-phase power source for all 3 tubes, though not all 3 tubes must operate simultaneously. 4. Provide mass-flow controllers for each tube for precision gas flow control of multiple gases (e.g., N2, O2, and H2) for diffusion, oxidation, or annealing. 5. A flat zone of at least 6 inches with temperature uniformity no wore than + or minus 0.5 degrees C. 6. Integrated automatic cantilever loading on all 3 tubes. 7. Provide all quartz-ware required to operate all 3 tubes. 8. Provide software and PC for automatic process control of all furnace operations to include, at a minimum, loading/unloading, gas flow rates and temperature ramps. Provide a profile thermocouple for each tube for controlling the temperature at the wafer. All processes will be recipe-driven with the capability to develop, modify, save, and execute recipes through a PC GUI. Process control will also include data collection of actual process parameters. 9. Mimimize furnace heat flow into room ambient. If your solution is a heat exchanger, please provide all necessary equipment, including a closed cycle water chiller. 10. Provide installation, checkout, and training at customer location. 11. Provide all furnace manuals in PDF file format on CD. 12. Total weight of system must not exceed 1,500 lbs. 13. Provide process support for recipe development. 14. Provide an estimate for shipping charges. COST THE FOLLOWING AS OPTIONS: A. Provide 1 (One) complete spare set of quartz-ware. B. Provide a separate 4th furnace tube to perform LPCVD processes. The following clauses and provisions apply: FAR 52.212-1 Instructions to Offerors Commercial Items; FAR 52.212-2 Evaluation, Commercial Items, award will be based on overall best value to the Government; FAR 52.212-3 and Alt I, Offeror Representations and Certifications; Commercial Items; 52.212-4 Contract Terms and Conditions?Commercial Items; FAR 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders -Commercial Items (Apr 2001)(Deviation); FAR 52.204-6 Data Universal Numbering System (DUNS) Number; FAR 52.219-6 Small Business Set Aside FAR 52.222-3 Convict Labor; FAR 52.222-19 Child Labor Co-operation with Authorities and remedies; FAR 52.222-21 Prohibition of Segregated Facilities; FAR 52.222-22 Previous Contracts and Compliance Reports (Feb 1999) FAR 52.222-25 Affirmative Action Compliance (Feb 1984) FAR 52.222-26 Equal Opportunity (Feb 1999); FAR 52.222-36 Affirmative Action for Workers with Disabilities; FAR 52.222-35 Equal Opportunity for Special Disabled Veterans; FAR 52.222-37 Employment Reports on Special Disabled Vets; FAR 52.233-3 Protest After Award; FAR 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration; FAR 52.247-34 F.O.B. Destination; FAR 52.252-1 Solicitation Provisions Incorporated by Reference (Feb 1998); FAR 52.252-2 Clauses Incorporated by Reference (Feb 1998) fill-ins http://farsite.hill.af.mil FAR 52.252-6, Authorized Deviations in Clauses, DFARS 252.204-7004 Required Central Contractor Registration. DFARS 252.212-7001 Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items (Apr 2001)Deviation DFARS 252.225-7001 Buy American Act and Balance of Payment Program; DFARS 252.204-7003, Control of Government Personnel Work Product DFARS 5352.242-9000, Contractor Access to Air Force Installations DFARS 5352.223-9001, Health and Safety on Government Installations The Government will make an award from this request for quotation to the responsible quoter whose quote will be most advantageous to the Government. The Government reserves the right to not make an award at all. By submission of a quote the quoter acknowledges the requirement that a prospective awardee must be registered in the CCR database prior to award,during performance and through final payment of any contract resulting from this solicitation. Point of contact is Sue Quillen, 937-522-4645. Quotes can be e-mailed to Sue.Quillen@wpafb.af.mil or faxed to 937-656-1412 Attn: Sue Quillen. All quotes are due NLT: COB, WEDNESDAY, 15 AUGUST 2007.
- Record
- SN01363230-W 20070808/070806220816 (fbodaily.com)
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