SOLICITATION NOTICE
66 -- RIE PLASMA SYSTEM
- Notice Date
- 8/20/2007
- Notice Type
- Solicitation Notice
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- NASA/Goddard Space Flight Center, Code 210.M, Greenbelt, MD 20771
- ZIP Code
- 20771
- Solicitation Number
- NNG07214343L
- Response Due
- 9/4/2007
- Archive Date
- 8/20/2008
- Small Business Set-Aside
- N/A
- Description
- NASA/GSFC has a requirement for following items: One(1) March Instruments Model CS-1701F, RIE System, "6" wafer capable with: -Process Chamber 6" Capable -Independent Pressure Control -600 Watt 13.56 MHz RF Power Supply -Automatic R F Tunning Network -Microprocessor Control -Gas Control with Six(6)Mass Flow Controllers (Four on-board and Two remote panel mounted) -RS-232 Port -Endpoint detector -Installation -Mechanical Vacuum Pump Package - 27 CFM One(1) P/N: 016-7105, Remote Operator Interface- Software to allow the CS1701 to communicate with a host PC via an RS232 communications port. This allows for unlimited recipe storage and data logging of each process run for analysis and statistical process control. One(1) P/N: 099-000014, Kit, CS-1701"6" Spares L1 NASA/GSFC intends to purchase the items from March Plasma Systems. The authority is FAR 13.106(b)(1) only one source reasonably available. The Government intends to acquire a commercial item using FAR Part 12. This procurement will be process using the procedures as set forth in the FAR part 13 Simplified Acquisition Procedures. DO Rating is DO-C9. This synopsis shall not be construed as a commitment by the Government, nor will the Government pay for the information solicited. Interested organizations may submit their capabilities and qualifications to perform the effort in writing via fax, email or mail to NASA/GSFC, ATTN: Candis Edwards-Duncan, CODE 210.3, Bldg. 11/Rm. S222, Greebelt, MD 20771 no later than 4:30 p.m. local time on 09/04/2007. Such capabilities/qualifications will be evaluated solely for the purpose of determining whether or not to conduct this procurement on a competitive basis. Be sure to clearly address the salient characteristics of the specification. A determination by the Government not to compete this proposed effort on a full and open competition basis, based upon responses to this notice, is solely within the discretion of the government. Oral communications are not acceptable in response to this notice. All responsible sources may submit a capabilities statement which shall be considered by the agency. An ombudsman has been appointed - See NASA Specific Note "B". All technical questions should be submitted to Candis Edwards-Duncan via email at Candis.J.Edwards-Duncan@nasa.gov or facsimile at 301-286-9159 no later than 08/28/2007. Any referenced notes may be viewed at the following URLs linked below.
- Web Link
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- Record
- SN01378852-W 20070822/070820222040 (fbodaily.com)
- Source
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