SOLICITATION NOTICE
66 -- Open Top and Laminar Flow Wet Chemical Processing Benches
- Notice Date
- 7/10/2007
- Notice Type
- Solicitation Notice
- NAICS
- 339111
— Laboratory Apparatus and Furniture Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899-1640, UNITED STATES
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-07-RQ-0302
- Response Due
- 7/25/2007
- Point of Contact
- Jennifer Roderick, Contract Specialist, Phone 301-975-8173, Fax 301-975-8884, - Todd Hill, Contracting Officer, Phone 301-975-8802,
- E-Mail Address
-
Jennifer.Roderick@nist.gov, todd.hill@nist.gov
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. SIMPLIFIED ACQUISITION PROCEDURES ARE UTILIZED IN THIS PROCUREMENT. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-17. *** The associated North American Industrial Classification System (NAICS) code for this procurement is 339111 with a small business size standard of 500 employees. This acquisition is 100% small business set-aside. In accordance with the Non-Manufacturer Rule, to qualify under a small business set-aside, the distributor and the manufacturer must qualify as a Small Business manufacturer under the NAICS code identified above. ***The National Institute of Standards and Technology (NIST) has a requirement for Open Top and Laminar Flow Wet Chemical Processing Benches to be used in the Center for Nanoscale Science & Technology (CNST) at NIST, Gaithersburg, MD. *** BACKGROUND The purchase of four wet chemical benches is required to add additional processing capabilities to the clean room facility at NISTs CNST. The addition of these four chemical benches will help to further expand the current processing capabilities made available to users of the facility and enhance the overall research mission by allowing the development of potentially unique processing steps in the area of nano-fabrication. The benches shall be designed for use in a research and development clean room laboratory built to specifications listed in this document. Vendors shall make specific written response to items that cannot be met as specified. All benches shall be fully exhausted and capable of stand alone operation in a class 100 clean room facility. All materials used in construction of the benches shall have a Fire Propagation Index (FPI) value at or below 6.0 and a Smoke Development Index (SDI) of 0.4 or less when tested in accordance with Material Standards code FM 4910. All benches shall be designed and built to meet fire protection code NFPA 318. In addition, all solvent benches shall be equipped with CO2 fire suppression systems. All benches shall have provisions for controlling of exhaust air along the leading front edge of the unit and along the rear deck of the unit. All benches shall have integral damper assemblies to allow independent balancing of the front and rear exhaust flows. All benches shall be designed with a fully exhausted leak tight secondary containment plenum beneath the work deck. The secondary sump shall be drained thru a 2" FNPT connection and welded leak tight. All bench units must be supplied with four corner leveling and casters to allow for ease of installation. All benches shall be provided with a photohelic style pressure gauge to monitor exhaust performance. The gauge shall be interlocked with the main electrical service power to the unit so that in the event of a low exhaust situation, all power to the wet tool will be removed. All benches shall be designed with provisions to accept CDA, nitrogen, and vacuum connections at the rear panel facing the work area. All benches shall have an internal electrical distribution system with a single outside connection point wired to a main circuit breaker prior to distribution within the unit. All control power shall be 24V dc. All benches shall be equipped with a single main panel power on switch and a single main panel EMO button. All acid/caustic benches shall be designed with acid/base resistant drain lines. Similarly, all solvent benches shall be supplied with solvent resistant drain lines. All benches supplied with chemical baths must have liquid level sensors. All water lines supplied with benches shall be compatible with 18 M-Ohm DI-water. Line Item 0001: One (1) Each, Solvent Bench The Contractor shall meet or exceed the following requirements for Solvent Bench 1 (SB1) The solvent bench shall be 96 inches in length and shall not exceed 38 inches front to back or 96 inches top to bottom. The deck height shall be a minimum of 36 inches from the floor and not more than 38 inches. The solvent bench shall be designed with a modular deck format allowing field upgrades and modifications such as additions of sinks and/or wet chemical baths. The solvent bench shall be designed with built-in chemical storage capability located beneath the bench deck. The solvent bench shall be equipped with three 120V GFCI protected duplex receptacles located at the rear panel facing the work area. The solvent bench shall be provided with two nitrogen blow-off guns along with the associated regulators at each end of the bench. The solvent bench shall have two sets of utility connection ports at each end of the bench. Each set shall consist of a nitrogen port, compressed dry air port, and vacuum port. Connections shall be made using ?-inch compression fittings. The solvent bench shall be constructed with a self contained laminar flow cabinet enclosure capable of supplying class 100 clean air to the work deck surface. The fan blower module on SB1 shall be a stand alone unit containing a variable speed fan, HEPA filtration and yellow fluorescent lighting. Filters used on SB1 shall give 100% air coverage to the area below the fan module. Pre-filters shall be changeable from the front of the unit. Filters shall be a minimum of 99.99 percent efficient at 0.3 microns. The fan speed of the blower module on SB1 will be adjustable and capable of delivering air at a speed of 80 - 120 fpm. The laminar flow unit shall be supplied with a magnahelic gauge to display filter loading and shall have a separate light and blower switch. The laminar flow unit shall have a clear shield 0.25 inches thick and resistant to acetone, methanol, isopropyl alcohol, and other common solvents used in resist processing. Line Item 0002: One (1) Each, Solvent Bench The Contractor shall meet or exceed the following requirements for Solvent Bench 2 (SB2) The solvent bench shall be 72 inches in length and shall not exceed 38 inches front to back or 80 inches top to bottom. The deck height shall be a minimum of 36 inches from the floor and not more than 38 inches. The solvent bench shall be designed as an open deck unit with exhaust through the rear of the deck. No laminar flow unit shall be provided. The solvent bench shall be designed with a modular deck format allowing field upgrades and modifications such as additions of sinks and/or wet chemical baths. The solvent bench shall be equipped with two 120V GFCI protected duplex receptacles located at the rear panel facing the work area. The solvent bench shall be provided with two nitrogen blow-off guns along with the associated regulators at each end of the bench. The solvent bench shall be equipped with flush mounted ultrasonic bath capable of being heated to 80 C and cooled to -25 C. The ultrasonic bath shall have two separate transducers each operating at high frequency (greater than 50 kHz) and each having controllable sweep ranges of at least 2 kHz. The bath shall have dimensions of 9 inches in width, 9 inches in length and 9 inches in depth. The bath shall be equipped with a manual drain valve and a top lid. The bench shall be provided with a utility sink with dedicated drain. The utility sink shall be no larger than 12 x 12 inches and of sufficient depth and shall be located near the rear of the deck. The sink shall be provided with a DI-water gooseneck with needle valve operator. The solvent bench shall be provided with a single DI-water spray gun made of Teflon located near the utility sink. The bench shall be provided with two separate integrated timers located in the head-case of the unit. The timers shall have hour, minute, and second readouts. The solvent bench shall have clear shields at each end of the unit as well as above the work surface. The clear shield shall be at least 0.25 inches thick and resistant to acetone, methanol, isopropyl alcohol, and other common solvents used in resist processing. Line Item 0003: One (1) Each, Wet Bench The Contractor shall meet or exceed the following requirements for Wet Bench 1 (WB1) ? (KOH/TMAH) The bench shall be 72 inches in length and shall not exceed 38 inches front to back. The deck height shall be a minimum of 36 inches from the floor and not more than 38 inches. The bench shall be provided with two heated baths capable of operating at 90 C for extended periods of time. One heated bath shall be designed for use with potassium hydroxide (KOH) while the other shall be for tetramethylammonium hydroxide (TMAH). Each bath shall be at least 9 inches in width, 9 inches in length, and 10 inches in depth. Each bath shall be designed with a temperature controlled reflux collar and individually programmable closed loop heating and cooling capabilities with independent temperature readouts. Each bath shall be provided with a captive drain system to facilitate dilution prior to house waste drain. The bath designed for use with KOH shall be supplied with an integrated ultrasonic transducer unit operating at a nominal 40 kHz frequency. Additionally, the bath shall be supplied with a sensor to monitor KOH concentration. The bench shall be provided with two programmable DI-water quick dump rinsers (QDRs). Each QDR shall be at least 9 inches in width, 9 inches in length and 10 inches in depth and have adjustable flow capability in cascade rinse mode. The bench shall be provided with an automated glove rinse well. The bench shall be provided with two DI-water spray guns made and two nitrogen blow-off guns with associated regulators each made of Teflon material. The bench shall be provided with a utility sink with dedicated drain. The utility sink shall be provided with a DI-water gooseneck with needle valve operator. The bench shall have clear shields at each end of the unit as well as above the work surface. The clear shield shall be at least 0.25 inches thick and resistant to acids and caustics. The bench shall be supplied with covers for all processing baths. The bench shall be supplied with an integrated eyewash station fastened to the left side of the unit. Line Item 0004: One (1) Each, Wet Bench The Contractor shall meet or exceed the following requirements for Wet Bench 2 (WB2) ? (acids) The bench shall be 72 inches in length and shall not exceed 38 inches front to back. The deck height shall be a minimum of 36 inches from the floor and not more than 38 inches. The bench shall be provided with two heated baths capable of operating at 90 C for extended periods of time. Each bath shall be at least 9 inches in width, 9 inches in length, and 10 inches in depth. Each bath shall be designed with a temperature controlled reflux collar and individually programmable closed loop heating and cooling capabilities with independent temperature readouts. Each bath shall be provided with a captive drain system to facilitate dilution prior to house waste drain. The bench shall be provided with two programmable DI-water quick dump rinsers (QDRs). Each QDR shall be at least 9 inches in width, 9 inches in length and 10 inches in depth and have adjustable flow capability in cascade rinse mode. The bench shall be provided with an automated glove rinse well. The bench shall be provided with two DI-water spray guns made and two nitrogen blow-off guns with associated regulators each made of Teflon material. The bench shall be provided with a utility sink with dedicated drain. The utility sink shall be provided with a DI-water gooseneck with needle valve operator. The bench shall have clear shields at each end of the unit as well as above the work surface. The clear shield shall be at least 0.25 inches thick and resistant to acids and caustics. The bench shall be supplied with covers for all processing baths. *** Inspection and Acceptance Criteria 1. Visual-Physical check at NIST laboratory for adherence to design specifications. 2. Performance check at NIST laboratory for adherence to performance specifications as follows: The benches shall be inspected at the seller?s site prior to shipment to ensure that all technical requirements of this specification have been met. NIST has the right to have a representative present during inspection activities. The seller shall notify NIST at least 30 days before conducting inspection. Inspection activities shall be documented and provided to NIST prior to shipment of the system. It is the seller?s responsibility to meet all applicable US electrical and associated safety and health code requirements relative to the described equipment. The seller shall provide documentation/certification that the system meets or exceeds these codes or standards. The seller is responsible for all packing and shipping provisions to ensure that the system arrives at NIST in an undamaged, working condition. The seller shall inform NIST of shipping plans two weeks before actual shipment. The system shall be provided with two copies of all needed schematics, installation requirements and instructions, and operating and maintenance manuals. All documentation shall be provided in English. The seller shall provide qualified personnel to perform and/or oversee all system installation and start-up activities necessary to ensure the system is fully functional upon completion. In addition, the seller shall provide personnel to provide comprehensive training necessary to operate the system to its full capabilities as stated in the technical portion of the specification. Final acceptance of the system shall be based on testing of the system to the technical requirements of the specification after completion of installation at NIST. This will include, but is not limited to all gases, electrical, exhaust, laminar flow, filtration, control interlocks, DI-water and vacuum services. Warranty and Service A one-year warranty shall commence upon full acceptance of the system by NIST. During the warranty period, at least two service visits shall be provided by the seller for routine preventative maintenance. During the warranty period, the seller's service personnel and any required replacement parts shall arrive at the installation site within three working days of notification by NIST that the equipment is inoperative and requires emergency service. Service and maintenance shall be available from factory-trained service engineers and to help ensure maximum safety for such activities, an established service network shall be in place. The service and maintenance contracts shall include routine maintenance visits (at least two visits per year) and emergency visits for inoperative equipment. Under such an emergency, the seller's service personnel and any required replacement parts shall arrive at the installation site within three working days of notification by NIST that the equipment is inoperative. ****The Government will evaluate information based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement," 2) Past Performance, 3) Previous Experience, and 4) Price. Technical Capability, Past Performance, and Previous Experience, when combined, are more important than Price. Award shall be made on a best value basis. ****Evaluation of Technical Capability shall be based on the information provided in the quotation. Quotations shall include the make and model of the products, manufacturer sales literature or other product literature, which CLEARLY DOCUMENTS that the offered product(s) meet or exceed the specifications stated above. ****Past Performance will be evaluated to determine the overall quality of the product and service, provided by the Contractor. Evaluation of Past Performance shall be based on the references provided IAW FAR 52.212-1(b)(10) and/ or information provided by NIST or its? affiliates. Quoters shall provide a list of at least three (3) references to whom the same or similar products have been sold. The list of references shall include, at a minimum: The name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. ***Past Experience shall be evaluated to determine the extent of the Contractor's experience of at least five (5) years in and knowledge in providing similar benches. Evaluation of past experience may be based on contacts used for past performance; however, the vendor should provide additional references relating to its past experience information, if necessary. To allow assessment, each quote must include appropriate documentation. No used, refurbished, or developmental systems shall be accepted. ***Delivery shall be FOB DESTINATION and be completed in accordance with the Contractor?s commercial schedule. *** ***The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all line items to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-0001. *** The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. The following clauses apply to this acquisition: 52.204-7 Central Contractor Registration; 52.212-4 Contract Terms and Conditions?Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders? Commercial Items including subparagraphs: 52.203-6, Restrictions on Subcontractor Sales to the Government w/ Alternate I; 52.219-6, Notice of Total Small Business Set-Aside; 52.219-14, Limitations on Subcontracting; 52.222-3, Convict Labor; 52.222-19, Child Labor ? Cooperation with Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities; 52-222-26, Equal Opportunity; 52.222-35, Equal Opportunity for Special Disabled Veterans; 52.222-36, Affirmative Action for Workers with Disabilities; 52.222-37, Employment Reports on Special Disabled Veterans; 52.225-53, Trade Agreements; 52.225-13, Restriction on Certain Foreign Purchases; and 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. ***All vendors shall submit the following: 1) An original and one (1) copy of a quotation which addresses all Line Items; 2) Two (2) Originals of the Technical description and/or product literature; 3) Description of commercial warranty; and 4) One (1) copy of the most recent published price list. This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The Offeror shall state ?The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.? OR The Offeror shall state ?The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) ***All quotes shall be received not later than 3:30:00 PM local time, on July 25, 2007 at the National Institute of Standards & Technology, Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Jennifer Lohmeier. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be made to the Contracts Office at 301-975-4959. NIST is not responsible for late delivery due to the added security measures. In addition, offerors/quoters who do not provide 24-hour notification in order to coordinate entrance to the NIST campus shall assume the risk of not being able to deliver offers/quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, bldg., room number, etc.). If 24 hour notification was not provided, it is suggested your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitor center and complete delivery. Notice shall include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility. Faxed quotes will NOT be accepted. Emailed quotes will be accepted. *** NOTE: THIS NOTICE MAY HAVE POSTED ON FEDBIZOPPS ON THE DATE INDICATED IN THE NOTICE ITSELF (10-JUL-2007). IT ACTUALLY APPEARED OR REAPPEARED ON THE FEDBIZOPPS SYSTEM ON 29-AUG-2007, BUT REAPPEARED IN THE FTP FEED FOR THIS POSTING DATE. PLEASE CONTACT fbo.support@gsa.gov REGARDING THIS ISSUE.
- Web Link
-
Link to FedBizOpps document.
(http://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-07-RQ-0302/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Shipping & Receiving, Building 301, Gaithersburg, Maryland
- Zip Code: 20899-0001
- Country: UNITED STATES
- Zip Code: 20899-0001
- Record
- SN01390070-F 20070831/070829230053 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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