SOLICITATION NOTICE
66 -- ULTRA HIGH VACUUM MANIPULATOR SYSTEM
- Notice Date
- 9/18/2007
- Notice Type
- Solicitation Notice
- NAICS
- 334515
— Instrument Manufacturing for Measuring and Testing Electricity and Electrical Signals
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- NNC07214658Q
- Response Due
- 9/24/2007
- Archive Date
- 9/18/2008
- Point of Contact
- Marilyn D. Stolz, Contract Specialist, Phone 216-433-2756, Fax 216-433-5489, Email Marilyn.D.Stolz@grc.nasa.gov
- E-Mail Address
-
Marilyn D. Stolz
(Marilyn.D.Stolz@grc.nasa.gov)
- Small Business Set-Aside
- N/A
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This notice is being issued as a Request for Quotations (RFQ) for: ITEM 1, Qty. 4, Klocke Nanotechnik HV-XYZ Translators or equal; ITEM 2, Qty. 1, Klocke Nanotechnik Controls System or equal; ITEM 3, Qty. 1, DOCUMENTATION; and ITEM 4, Qty. 1 Installation, Checkout and Training This specification describes NanoRobotics XYZ-Translator, or fully equivalent, to be installed into an existing Government owned UHV chamber with CF-ports with copper seals and the XYZ-Translator shall be placed onto a chamber port including UHV feedthroughs. Items 1 and 2 shall contain the following features and meet the salient characteristics listed below: ITEM 1: HV-XYZ TRANSLATOR Shall be Klocke Nanotechnik PN 00512-01 or fully equal and be of true cartesian (purely linear) mechanical movement in each of all three independently controllable translator axes directions. Shall consist of all three independent axes physically combined into an integrated XYZ-translator demonstrating independently controllable movement in each of the 3 cartesian directions, specifically X, Y, and Z orthogonal directions. Entire in-vacuum assembly shall be fully HV-compatible and allow the HV chamber to maintain a vacuum of 1E-7 millibar or lower. Each HV-XYZ Translator shall be Klocke Nanotechnik PN 00511-01 or fully equivalent and be modular in design and capable of modular connection to control wires, using auto-guided (piloted) electrical plug connectors or equivalent, to effect quick removal and installation of each HV-XYZ Translator. The in-vacuum model shall withstand a thermal bakeout heating temperature of at least 70 degrees Celsius. Translation motor shall be exclusively and totally of the piezo-electric driven mechanism for all movements including from fine nanometer movements to and including coarse millimeter movements. Shall have a demonstrated physical minimum stroke of at least 15 millimeters with a simultaneous resolution of at least 1 nanometer along all three X, Y, and Z linear axes. Absolute positioning in each separate X, Y, and Z axis shall have a repeatability of 60 nanometers or smaller without overshoot. Each HV-XYZ translator shall include fully complete position measurement sensors for its translation direction that shall be functional over the entire stated minimum stroke and shall be entirely embedded within each linear translator component without increasing the translator footprint or volume and shall function in closed-loop to maintain a repeatability of 60 nanometers or smaller. Translator mechanism shall be resistant to damage from movement by external forces. Positional information shall be maintained in the event of unintentional forced movement of XYZ-translators by an external force. Shall include Klocke Nanotechnik PN 00514-01 or fully equivalent tool adaptor and carrier. Design shall include future upgrade options with attachable, modular fixtures for documented functions including probing, micro-gripping, indenting, and tearing surfaces which are all controllable at the nanometer dimensional scale and compatible with the basic software control package. Physical size of each X,Y,Z-translator shall be not greater in dimensions than 70 millimeters by 52 millimeters by 52 millimeters or volumetric equivalent, excluding attachments such as probes. Vibrations caused by the X,Y,Z translator operation shall be maintained at 10 nanometers of amplitude or less. Shall include an automated computer closed-loop control using supplied software integrated with embedded position sensors and include Ethernet network-equipped electronic controls. Upgrade options shall include provisions for attachment of an optional integrated subsystem for fully automatic approach to sample surface with 1 nanometer precision without overshoot, by using supplied software integrated with sensor feedback controls such as an included force-feedback, Nanofinger, and/or electrical feedback sensors as further specified within the section labeled “Controls System Options”. Shall provide modular upgrade options for providing increased functionality including but not limited to micro-tensile measurements, SEM/FIB sample movement integration, and wafer electrical-probing system integration. Shall include basic hardware system Klocke Nanotechnik PN 00510-01, PN00551-01, and PN00518-01 or fully equivalent system for preparation of chamber port for electrical feedthroughs and 19 inch subrack for 2 NWCs. Shall include Klocke Nanotechnik PN 00507-01 or fully equivalent external cable system. Shall include Klocke Nanotechnik PN 00523-01 or fully equivalent conductive carrier for probe tips. Shall include Klocke Nanotechnik PN 00827-01 or fully equivalent triax/coax HV/atmospheric cable set. Shall include Klocke Nanotechnik PN 10248-01 or fully equivalent tungsten probe tips. Shall include Klocke Nanotechnik PN 10249-01 or fully equivalent conductive small radius tips. Shall include all connectors for HV operation internal to the vacuum chamber. Shall include an in-vacuum shielded cable system for connecting standard probe tips of each XYZ-translator through HV-feedthroughs with external standard triaxial measurement cables, for output of electrical probe signals. UHV-XYZ TRANSLATOR OPTIONS: The following upgrade options shall be priced separately if the capability is not included in the base items: Upgrade option #1, Klocke PN 00791-01 or fully equivalent, the in-vacuum assembly shall be upgraded to be fully UHV-compatible which shall not cause a degradation in vacuum of 5E-11 millibar or lower within the government owned UHV chamber. Upgrade option #2, Klocke PN 00610-01 and PN 00806-01 or fully equivalents, the entire in-vacuum mounting system shall be upgraded to a fixed mounting system capable of UHV performance including all iUHV-cables for XYZ Linear translators and the included position measurement system. The UHV model shall withstand a thermal bakeout heating temperature of at least 70 degrees Celsius. ITEM 2: CONTROLS SYSTEM Shall include the following fully integrated software modules or fully equivalent: Klocke Nanotechnik PN 10186-01 “Nanocontrol Basic version” control software; Klocke Nanotechnik PN 00486-01 “MacroExecutor”; Klocke Nanotechnik PN00485-01 “Position Table”; Klocke Nanotechnik PN 00489-01 “Process Control lite”; Klocke Nanotechnik PN 00499-01 “Software Module Variable Editor”. Shall include all software and hardware that shall be fully integrated to control up to four (4) XYZ-translators using supplied predefined automation routines to accomplish movement to/from a sample location area from/to a user defined parking position location. Shall include Klocke Nanotechnik PN 10171-01 or fully equivalent NWC for all communications connections and hardware components needed for integration between control electronics modules using standard Ethernet communications protocols. Shall provide remote control of all XYZ-translators using at least three independent methods including; a) supplied software Dynamic Link Libraries (DLLs), b) physical data entry keypad or joystick independent of computer Klocke Nanotechnik PN 10001-01 or fully equivalent, and c) computer software automation via teaching/training and augmented using supplied command language for controlling multiple sequence programming. All control electronics shall be wired to accept power from 120 volts AC at a frequency of 60 hertz and rack mountable in a standard 19 inch equipment rack. Shall include all control system related power supplies and cables, and connectors external to the vacuum chamber. CONTROLS SYSTEM OPTIONS: The following upgrade options shall be priced separately if the capability is not included in the base items: Upgrade option #1, shall include the following additional software module or fully equivalent; Klocke Nanotechnik PN 00858-01 “Input Filter for Bitmap”, Shall include a software-integrated module providing for input-filtering for conversion of user-defined bitmap images into 2D patterns as source of pathways for automatic software controlled XYZ-translator 2D movement. Upgrade option #2, shall include the following additional software module or fully equivalent; Klocke Nanotechnik PN 00859-01 ”Input Filter for 3D Line”. Shall include a software-integrated module providing input-filtering for conversion of user-defined 3D-line vector information into 3D coordinates as source of 3D pathways for automatic software controlled XYZ-translator 3D movement. Upgrade option #3, shall include the following additional system consisting of integrated hardware and software module Klocke Nanotechnik PN 00526-01 or fully equivalent; which provides automatic approach of XYZ-translator tool to the sample surface for electrically conductive samples. Upgrade option #4, shall include the following additional system consisting of integrated hardware and software “Nanofinger” module consisting of Klocke Nanotechnik PN00553-01, PN00555-01, PN00810-01, PN00758-01, and PN00557-01 or fully equivalent; which provides automatic approach of XYZ-translator tool to the sample surface for electrically non-conductive (electrical-insulator) samples. ITEM 3: DOCUMENTATION One set of comprehensive operational and maintenance manuals and general system specifications. In addition, an electronic copy in either standard PDF format or Microsoft WORD document format for each of the above items is required. ITEM 4: INSTALLATION, CHECKOUT AND TRAINING A. The contractor shall provide initial checkout, demonstration, and training at the manufacturer’s facility for two (2) government personnel for a total duration of not less than 24 hours distributed over not less than 3 working days. B. The contractor shall include all labor and travel expenses for equipment installation and system performance verification at NASA Glenn Research Center (GRC) which shall include instruction and hands-on working of all software modules and hardware components for a total duration of not less than 5 work days each of 8 hours minimum within an agreed upon time after ARO. The set-up shall insure that Item 1 and 2 meets all functionality specifications listed in this document. Set-up shall be performed Monday-Friday, non-federal holidays, during normal business hours at NASA GRC (typically 8 a.m. to 5 p.m.) NOTE: to those offering imported items or items subject to duties, freight and insurance: The proposed price SHALL include all duties, transfer fees, first customs clearance, shipping and insurance costs. The Government is self insured and does not pay exrtraordinary insurance other than that already included in normal shipping practices. The provisions and clauses in the RFQ are those in effect through FAC 05-18. The NAICS Code and the small business size standard for this procurement are 334515 and 500 respectively. The offeror shall state in their offer their size status for this procurement. All responsible sources may submit an offer which shall be considered by the agency. Delivery of Items 1 through 3 shall be to NASA Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135 (Receiving, Bldg. 21) and is required within 120 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Offers for the items(s) described above are due by September 24, 2007, 4:30 p.m. local time and maybe mailed or faxed to Marilyn D. Stolz, 21000 Brookpark Road, M.S. 500-306, Cleveland, OH 44135 and must include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Offerors are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://server-mpo.arc.nasa.gov/Services/NEFS/NEFSHome.tml Offerors shall provide the information required by FAR 52.212-1 (SEPT 2006), Instructions to Offerors-Commercial Items, which is incorporated by reference. Addenda to FAR 52.212-1 are as follows: None. If the end product(s) offered is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. FAR 52.212-4 (FEB 2007), Contract Terms and Conditions-Commercial Items is applicable. Addenda to FAR 52.212-4 are as follows: None. FAR 52.212-5 (JUNE 2007), Contract Terms and Conditions Required To Implement Statutes or Executive Orders-Commercial Items is applicable and the following identified clauses are incorporated by reference: (a) The Contractor shall comply with the following Federal Acquisition Regulation (FAR) clauses, which are incorporated in this contract by reference, to implement provisions of law or Executive orders applicable to acquisitions of commercial items: 52.233-3, Protest After Award (Aug 1996) (31 U.S.C. 3553) 52.233-4, Applicable Law for Breach of Contract Claim (Oct 2004) (Pub. L. 108-77, 108-78) (b) The Contractor shall comply with the FAR clauses in this paragraph (b) that the Contracting Officer has indicated as being incorporated in this contract by reference to implement provisions of law or Executive orders applicable to acquisitions of commercial items: 52.203-6, Restrictions on Subcontractor Sales to the Government (Jul 1995), with Alternate I (Oct 1995) (41 U.S.C. 253g and 10 U.S.C. 2402); 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns (July 2005) (if the offeror elects to waive the preference, it shall so indicate in its offer) (15 U.S.C. 657a); 52.219-8, Utilization of Small Business Concerns (May 2004) (15 U.S.C. 637(d)(2) and (3)); 52.219-14, Limitations on Subcontracting (Dec 1996) (15 U.S.C. 637(a)(14)); 52.222-3, Convict Labor (June 2003) (E.O. 11755); 52.222-21, Prohibition of Segregated Facilities (Feb 1999); 52.222-26, Equal Opportunity (Apr 2002) (E.O. 11246); 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Dec 2001) (38 U.S.C. 4212); 52.222-36, Affirmative Action for Workers with Disabilities (Jun 1998) (29 U.S.C. 793); 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (Dec 2001) (38 U.S.C. 4212); 52.225-1, Buy American Act—Supplies (June 2003) (41 U.S.C. 10a-10d), 52.225-13, Restrictions on Certain Foreign Purchases (Feb 2006) (E.o.s, proclamations, and statutes administered by the Office of Foreign Assets Control of the Department of the Treasury); 52.232-34, Payment by Electronic Funds Transfer—Other than Central Contractor Registration (May 1999) (31 U.S.C. 3332). The FAR may be obtained via the Internet at URL: http://www.acquisition.gov/far/index.html The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm All contractual and technical questions must be in writing (e-mail or fax) to Marilyn D. Stolz not later than September 21, 2007. Telephone questions will not be accepted. Selection and award will be made on an aggregate basis to the lowest priced, technically acceptable offeror, with acceptable past performance. Technical acceptability will be determined by review of information submitted by the offeror which must provide a description in sufficient detail to show that the product offered meets the Government's requirement. Offerors must include completed copies of the provision at 52.212-3, Offeror Representations and Certifications - Commercial Items with their offer. These may be obtained via the internet at URL: http://prod.nais.nasa.gov/eps/Templates/Commercial_Greater_Than_25K.doc . These representations and certifications will be incorporated by reference in any resultant contract. An ombudsman has been appointed -- See NASA Specific Note "B". It is the offeror's responsibility to monitor the following Internet site for the release of solicitation amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=22 . Potential offerors will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes may be viewed at the following URLs linked below. NOTE: THIS NOTICE WAS NOT POSTED TO FEDBIZOPPS ON THE DATE INDICATED IN THE NOTICE ITSELF (18-SEP-2007); HOWEVER, IT DID APPEAR IN THE FEDBIZOPPS FTP FEED ON THIS DATE. PLEASE CONTACT fbo.support@gsa.gov REGARDING THIS ISSUE.
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