MODIFICATION
66 -- Ultra High Vacuum Thin Film Deposition System
- Notice Date
- 1/18/2008
- Notice Type
- Modification
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375, UNITED STATES
- ZIP Code
- 20375
- Solicitation Number
- N00173-08-R-RF01
- Response Due
- 1/24/2008
- Archive Date
- 2/8/2008
- Point of Contact
- Roger Fordahl, Contract Specialist, Phone 202-767-7620, Fax 202-767-5896, - F. Janilea Bays, Contracting Officer, Phone 202-767-2974, Fax 202-767-0430
- E-Mail Address
-
roger.fordahl@nrl.navy.mil, jan.bays@nrl.navy.mil
- Small Business Set-Aside
- Total Small Business
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. The solicitation, N00173-08-R-RF01, is issued as a Request for Proposal (RFP). The solicitation document, incorporated provisions, and clauses are those in effect through FAC 2005-22 and DFARS Change Notice 20071207. The associated small business size standard is 500 employees or less. NRL has a requirement for CLIN 0001, Ultra High Vacuum Thin Film Deposition System, and an option item, CLIN 0002, Residual Gas Analyzer. The deposition system must be a UHV design that allows baking to 200?C to provide an ultra-high vacuum environment for highly oxygen-sensitive materials. The system must consist of a sputtering chamber with seven 2? magnetron sources for con-focal sputtering, each with an individual pneumatic shutter and an isolation chimney, a e-beam evaporation chamber, a load-lock and an appendage chamber for processing. The magnetron sources must allow a reconfiguration among balanced, unbalanced and magnetic material modes depending upon the application. The magnets for the magnetron sources must be located out of the cooling water and be vacuum compatible to 10-11 Torr. The UHV sources must be able to be baked to 200?C without magnet removal prior to system bakeout. The substrate heater must allow for simultaneous heating, rotation, biasing, z-motion, and deposition at up to 850?C in a pure oxygen environment. Temperature stability must be +/- 1?C. The offeror must include installation and training. The residual gas analyzer must able to monitor the base vacuum with 5 x 10-14 Torr detection limit and the process at operating pressure of up to 10 Torr for atomic mass unit (amu) of up to 300 amu with better than 1 amu resolution. Multiple awards may result from this synopsis solicitation. If made, multiple awards will only be made for an individual CLIN. Any option items, if exercised, may be exercised at any time up to six months after the date of the initial award. The complete specification and/or other information required for this combined synopsis/solicitation is available at http://heron.nrl.navy.mil/contracts/RFP/08rf01.htm . Delivery and acceptance is at NRL, 4555 Overlook Avenue, S.W., Washington, D.C. 20375, FOB Destination. Delivery shall be no later than 120 days from the date of the award. The provision at 52.212-1, Instructions to Offerors-Commercial, applies to this acquisition. The Government intends to award a contract resulting from this solicitation to that responsible offeror proposing the lowest price for the items that have been determined to comply with the requirements of the specifications and solicitation. The proposal must demonstrate an understanding of the requirement and the ability to meet the specifications. The Government will evaluate offers for award purposes by adding the total price for all options to the total price for the basic requirement. The Government may determine that an offer is unacceptable if the option prices are significantly unbalanced. Evaluation of options shall not obligate the Government to exercise the option(s). Offeror must complete the following electronic annual representations and certifications via the Online Representations and Certifications Application (ORCA) at http://orca.bpn.gov in conjunction with required registration in the Central Contractor Registration (CCR) database. FAR 52.212-3 Offeror Representations and Certifications--Commercial Items and DFARs 252.212-7000 Offeror Representations and Certifications--Commercial Items. In accordance with paragraph (j) of FAR 52.212-3 if changes to the ORCA annual representations and certifications apply to this acquisition, the offeror must clearly identify the applicable paragraphs at (b) through (i) which the offeror has completed for the purpose of this solicitation only. Any changes provided by the offeror are applicable to this solicitation only, and do not result in an update to the representations and certifications posted on ORCA. The clause at FAR 52.212-4, Contract Terms and Conditions-Commercial Items, and FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders--Commercial Items, applies to this acquisition. The additional FAR clauses cited are applicable: FAR 52.203-3, Gratuities; FAR 52.203-6, Restrictions on Subcontractor Sales to the Government; FAR 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns; FAR 52.219-6, Notice of Total Small Business Set-Aside; FAR 52.219-8, Utilization of Small Business Concerns; FAR 52.219-14, Limitations on Subcontracting; FAR 52.219-28, Post Award Small Business Program Representation; FAR 52.222.3, Convict Labor; FAR 52.222.19, Child Labor Cooperation with Authorities and Remedies; FAR 52.222.21, Prohibition of Segregated Facilities; FAR 52.222.26, Equal Opportunity; FAR 52.222.35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; FAR 52.222.36, Affirmative Action for Workers with Disabilities; FAR 52.222.37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; FAR 52.222.39, Notification of Employee Rights Concerning Payment of Union Dues or Fees; FAR 52.222.50, Combating Trafficking in Persons; FAR 52.225-13, Restrictions on Certain Foreign Purchases; FAR 52.232-34, Payment by Electronic Funds Transfer - Other than Central Contractor Registration; and FAR 52.247-64, Preference for Privately Owned U.S. - Flag Commercial Vessels. The DFARS clause at 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items applies to this acquisition. The additional DFARS clauses cited are also applicable: DFARS 252.225-7001, Buy American Act and Balance of Payments Program; DFARS 252.225-7012, Preference for Certain Domestic Commodities; DFARS 252.227-7015, Technical Data--Commercial Items; DFARS 252.227-7037, Validation of Restrictive Markings on Technical Data; DFARS 252.232-7003, Electronic Submission of Payment Requests; DFARS 252.243-7002, Requests for Equitable Adjustment; DFARS 252.247-7023, Transportation of Supplies by Sea; and DFARS 252.247-7024, Notification of Transportation of Supplies by Sea. The following additional FAR and DFARS clauses also apply: FAR 52.204-7, Central Contractor Registration; FAR 52.215-5, Facsimile Proposals; DFARS 252.204-7004 Alternate A, Central Contractor Registration; and DFARS 252.211-7003 - Item Identification And Valuation. Facsimile proposals are authorized and may be forwarded to the contract specialist at (202) 767-5896 (primary) or (202) 767-0430 (alternate). In addition, proposals may be transmitted by e-mail to Roger Fordahl@nrl.navy.mil (primary) or Jan.Bays@nrl.navy.mil (alternate) in either Microsoft Word or pdf format. If facsimile proposals are authorized, contracting officers may request offeror(s) to provide the complete, original signed proposal at a later date. All EIT supplies and services provided under any resultant contract must comply with the applicable accessibility standards issued by the Architectural and Transportation Barriers Compliance Board at 36 CFR part 1194 (see FAR Subpart 39.2). Electronic and information technology (EIT) is defined at FAR 2.101. For those portions of the work under this contract performed at any NRL site, the contractor shall comply with the Requirements for On-Site Contractors dated 01 June 2007, which are hereby incorporated by reference. The full text is available at http://heron.nrl.navy.mil/contracts/13onsite.htm. Any resultant contract will be DO-Rated under the Defense Priorities and Allocations System (DPAS). The Contract Specialist must receive any questions concerning the RFP no later than 3 business days before the response date of this solicitation. An original and 2 copies of the offeror proposal must be received on or before the response date noted above, by 4:00 P.M., local time at the NRL address above, directed to the attention of the Contracting Officer. The package should be marked with the solicitation number, due date and time. Offerors are encouraged to use alternatives to the mail when submitting proposals. Other business opportunities for NRL are available at our website http://heron.nrl.navy.mil/contracts/rfplist.htm See Numbered Note(s): 1. NOTE: THIS NOTICE WAS NOT POSTED TO FEDBIZOPPS ON THE DATE INDICATED IN THE NOTICE ITSELF (18-JAN-2008); HOWEVER, IT DID APPEAR IN THE FEDBIZOPPS FTP FEED ON THIS DATE. PLEASE CONTACT fbo.support@gsa.gov REGARDING THIS ISSUE.
- Web Link
-
Link to FedBizOpps document.
(http://www.fbo.gov/spg/DON/ONR/N00173/N00173-08-R-RF01/listing.html)
- Record
- SN01489137-F 20080120/080118231351 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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