SOLICITATION NOTICE
36 -- CHUCK PUCK--QUARTZ AND OTHER COMPONENTS
- Notice Date
- 3/6/2008
- Notice Type
- Solicitation Notice
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- NASA/Goddard Space Flight Center, Code 210.M, Greenbelt, MD 20771
- ZIP Code
- 20771
- Solicitation Number
- NNG08230573L
- Response Due
- 3/14/2008
- Archive Date
- 3/6/2009
- Point of Contact
- Agnes L. Smith, Purchasing Agent, Phone 301-286-9129, Fax 301-286-1720, Email Agnes.L.Smith.1@gsfc.nasa.gov - Cynthia L. White, Contracting Officer, Phone 301-286-3596, Fax 301-286-1720, Email Cynthia.L.White@nasa.gov
- E-Mail Address
-
Email your questions to Agnes L. Smith
(Agnes.L.Smith.1@gsfc.nasa.gov)
- Small Business Set-Aside
- N/A
- Description
- NASA/GSFC has a requirement for various components. 1) p/n chkCP100-3TL chuck puck, 2)p/n chkCP150-3TL 150mm 3TL quartz, 3) p/n chkCP200SB-3TL service base 200mm 3TL lo temp, 4) p/n chkCP200CS-Q surround ring quartz - to order, 5) p/n chkCP200CS-Q surround ring, quartz to order, 6) p/n chkCP200base plate,CP200 chamber base, to order 7) p/nGB-3 rf break NSI 04-732052 short, 8) 200 mm cube interface box, 9) p/n DR5 VI esc output unit, 10) p/n DR5 A2 esc drive control, 11) p/n chkWL 200 SD-3TL, 12) p/n chkWL SVWL-4 lift/servo/encoder, 13) DR5 MS module pack, rf/DR5 MS Motor drive rf isol, 14) p/n GC-1 gauge SI/Pressure sensor Si 100kPa ab, 15) p/n GC-1mfc/mass flow controller 20sccmHE, 16) p/n GC-1 purge solenoid/GC-1, 17) p/n GC-interface pcb backP, MFC, 18) p/n GC-4 software for host computer, 19) NRE/NRE, parts for chamber door transfer option, 20) p/n NRE/NRE, parts for magnetic slider load lock, 21) p/n NRE/NRE, parts mag slider valves, oil sealed pump, 22) p/n NRE/NRE,parts HE plumbing to bulkhead 23) NRE wafer handler end effector (both load options) 23) labouINST/TRN Installation and Training NASA/GSFC intends to purchase the items from Electrogrip Company only. We require installation of custom components into an existing system for enhanced film deposition capability. The specific system is a Plasma Therm SLR770 ECR deposition system for low temperature dielectrics. In our research we have found one company, Electrogrip, continues to support this particular tool and upgrades that enhance its capabilities. NASA intends to purchase the items from Electrogrip, who is the sole manufacturer of these components and does the installation. Authority is FAR 13.106B(1) Only one source reasonably available. This procurement will be processed using FAR Part 13 Simplified Acquisition Procedures. The Government intends to acquire a commercial item using FAR Part 12. Interested organizations may submit their capabilities and qualifications to perform the effort in writing to the identified point of contact not later than 4:30 p.m. local time on March 14, 2008. Such capabilities/qualifications will be evaluated solely for the purpose of determining whether or not to conduct this procurement on a competitive basis. A determination by the Government not to compete this proposed effort on a full and open competition basis, based upon responses to this notice, is solely within the discretion of the government. Oral communications are not acceptable in response to this notice. All responsible sources may submit an offer which shall be considered by the agency. An Ombudsman has been appointed. See NASA Specific Note "B". Any questions should be directed to the attention of Agnes L. Smith via e-mail at Agnes.L.Smith@nasa.gov or via facsimile at 301-286-1720 by March 10, 2008. Any referenced notes may be viewed at the following URLs linked below.
- Web Link
-
http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=D&pin=51#128842
- Record
- SN01526288-W 20080308/080306225128 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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