SOLICITATION NOTICE
A -- NIST Technical Support Services for Next Generation Factory Sensor Network Test Bed to Address Technical Research Priorities in Data Quality
- Notice Date
- 6/26/2008
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 541690
— Other Scientific and Technical Consulting Services
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- NB812070-8-05400mac
- Response Due
- 7/2/2008
- Archive Date
- 7/6/2008
- Point of Contact
- George Ralis,, Phone: 301-975-8497, Mario A. Checchia,, Phone: 301-975-8407
- E-Mail Address
-
george.ralis@nist.gov, mario.checchia@nist.gov
- Small Business Set-Aside
- Total Small Business
- Description
- NIST Technical Support Services for Next Generation Factory Sensor Network Test Bed to Address Technical Research Priorities in Data Quality, 6-19-2008. This is a solicitation for commercial services prepared in accordance with the format in FAR Parts 12 and 13, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a separate written solicitation will not be issued. Solicitation Number NB812070-8-05400mac is issued as a request for quotation. This solicitation is set aside exclusively for small business concerns. The North American Industry Classification Code (NAICS) is 541690. The NIST has a requirement for the following : The National Institute of Standards and Technology (NIST) Infrastructure for Integrated Electronic Design and Manufacturing (IIEDM) project has been involved in providing technical expertise to Semiconductor Equipment Manufacturing International (SEMI) Data Quality Task Force to develop a robust standard in addressing data quality issues, such that data from the equipment can be reliably analyzed for Advanced Process Control (APC) applications. NIST has provided expertise in time synchronization to facilitate this effort, by serving as technical lead in the SEMI Clock Object standard as well as publishing industry guidelines to ensure accurate time synchronization. To continue providing applicable recommendations to industry, NIST would like to establish a neutral Next Generation Factory (NGF) Sensor Network Test Bed (SNT) to address technical research priorities in data quality for semiconductor and photovoltaics manufacturing industries. The Contractor’s work will be in direct support of NIST IIEDM’s project goals to facilitate technical development of a neutral SNT. To better understand industry’s perspectives, it is essential to have expertise in developing semiconductor manufacturing industry data collection, analysis, and automation tools. The expertise will provide a needed perspective in guiding NIST research to be applicable to industry needs and transferable to help industry. SCOPE OF WORK - The purpose of this PWS is to support NIST in promoting a SNT to address industry research priorities in research relevant to data acquisition and APC, specifically sensors, in-situ and ex-situ metrology systems, data acquisition software and hardware, as well as control systems to ensure cost-efficient production of future generations of semiconductors and photovoltaics (PV). The primary objective of the project is to determine research priority areas in semiconductor and PV manufacturing of sensor and intelligent control paradigms (such as APC) in the next 3 to 10 years. As a result, NIST should then have an in-depth understanding of key priority areas in order to develop concrete research for addressing clear industry needs. SPECIFIC TASKS- The Contractor shall perform the following tasks: A. Provide an initial assessment of industry research priorities relevant to automation, sensors, and data quality improvement of semiconductors and PV. 1)Gather information from at least five (5) experts from the following areas: Integrated Circuits IC manufacturer, equipment supplier, sensor supplier, Advanced Process Control (APC) software supplier, equipment control systems supplier, equipment subsystems, embedded control suppliers, facilities suppliers, metrology equipment supplier (in-situ and ex-situ), etc. 2)Gather information from at least two (2) experts from Photovoltaics (PV) manufacturer or PV equipment supplier. 3)Submit a brief initial report on current status, needs, requirements, and future vision with focus on sensors, data acquisition, and equipment control systems. 4)Conduct at least four (4) data gathering sessions with APC software suppliers, metrology equipment supplier, process engineers, etc. B.Arrange site visits and industry data gathering sessions with NIST to provide in-depth understanding of research priority needs in the July to September 2008 timeframe. Participate in the site visits with NIST, allowing for discussions on industry challenges and requirements in sensors, data quality and real-time control for manufacturing automation. 1)Based on initial information gathered and knowledge of industry landscape, determine at least four (4) key site visits with semiconductor and PV manufacturers and suppliers to discuss automation needs with regards to sensors, data quality, APC, etc. 2)Compile and analyze information from site visits and own industry perspective. 3)Draft a detailed report providing an assessment of the current challenges and near-term needs and priorities in regards to data quality, sensors, actuators for enabling more efficient automation in semiconductor and PV manufacturing for current and next generation manufacturing. The report shall contain the following items: I.Challenges/Requirements discussion: a.Automation Trends b.Current trends and issues II.Key Automation Drivers and initiatives (Next Generation Factory (NGF), APC, Fault Detection Classification (FDC), Virtual Metrology (VM), Particle Prediction Model (PPM), Equipment Engineering System (EES)) III.Sources of Factory Automation requirements: IV.Cost-effective PV production V.Realizing green factory (Power, water, chemical usage, etc.) a.New materials for manufacturing - New process for manufacturing and implications of new sensor/actuator technologies VI.Sensor Integration, Data Management, and Applications VII.Key application requirements (site visits will be needed to obtain concrete applications) VIII.Enabling technologies and standards – Requirements for communications, time synchronization, data quality, and hardware IX.Current landscape a.Best practices in sensor integration infrastructure and shortcomings b.Are the current best practices good enough? c.What improvements would yield the greatest business values? d.Can manufacturing decisions be made in real-time? X.Data Quality a.Understand how current data quality issues are preventing optimal yield/cost-savings b."What are the factory bottlenecks for information access and what adverse effects do they have on APC applications? XI.Recommended improvements in visualization and analysis tools XII.Description of promising new technologies C.The Contractor shall meet with NIST personnel either at NIST in Gaithersburg, MD or via teleconference to discuss NIST research on automation, sensors, and data quality improvement of semiconductors and PV. The Contractor shall also discuss issues the NGF SNT test bed should address and recommended improvements for future research applicable to industry. The Contractor shall then generate written recommendations in a white paper. D.The Contractor shall generate PowerPoint slides on future research priorities in automation, sensors, and data quality improvement of semiconductors and PV. The Contractor shall present this information at AEC/APC Symposium on October 6-8, 2008 at Salt Lake City, Utah. DELIVERABLES AND REPORTS The Contractor shall provide reports in MS Word 97 up to 2007 format and his presentation in PowerPoint 97 up to 2007 format. If the reports include any experimental data, the Contractor shall report this data in SI units with uncertainty values. A.Manufacturing Challenges and Vision in Semiconductor and PVs: 1)Initial report on current status, needs, requirements, and future vision with focus on sensors, data acquisition, equipment control systems. The report is due three (3) weeks after award of this contract. 2)In-depth report on industry research priorities for sensors and control in semiconductor/PV manufacturing automation. Including industry challenges, requirements, visions of sensing and control capabilities for next generation manufacturing. The report is due fifteen (15) weeks after award of this contract. B.The Contractor shall develop PowerPoint slides on future research priorities in automation, sensors, and data quality improvement of semiconductors and PV no later than 18 weeks after award of this contract. The Contractor shall present this information at AEC/APC Symposium on October 6-8, 2008 at Salt Lake City, Utah. C.NIST research on automation, sensors, and data quality improvement of semiconductors and PV, and issues of the NGF SNT test bed and recommended improvements for future research applicable to industry. The Contractor shall submit a white paper no later than twenty (20) weeks after award of this contract. TRAVEL - The Contractor shall travel to AEC/APC Symposium on October 6-8 at Salt Lake City, Utah. PERIOD OF PERFORMANCE AND LOCATION WORK IS TO BE PERFORMED - The period of performance is 25 weeks from award of this contract. The Contractor shall perform most of the work at their site/facilities. GOVERNMENT FURNISHED PROPERTY, DATA, AND INFORMATION - None EXHIBITS AND ATTACHMENTS- None I.PERFORMANCE REQUIREMENT SUMMARY Desired OutputRequired ServicePerformance StandardMonitoring Method Initial report on current status, needs, requirements, and future vision with focus on sensors, data acquisition, equipment control systems.Collect data from industry experts from at least five (5) from semiconductor factory and equipment manufacturers and two (2) experts for PV manufacturing/equipment. Submit a brief initial report. A brief MS Word document that describes the current challenges, requirements, and visions for semiconductor and PV manufacturing in terms of sensors, data acquisition and control. The report will be reviewed by the Technical Information Contact (TIC). Report on industry research priorities for sensors and control in semiconductor/PV manufacturing automation. Utilize information from the initial report and conduct at least four (4) data gathering sessions with APC software suppliers, metrology equipment supplier, process engineers, etc. Arrange site visits for data gathering purposes with NIST to provide in-depth understanding of research priority needs. Based on initial data and knowledge of industry landscape, determine at least four (4) key site visits with semiconductor and PV manufacturers and suppliers to discuss automation needs with regards to sensors, data quality, APC, etc. Submit a detailed report. A MS Word document based on the outline specified in this contract. Report will be reviewed by the TIC. Recommendations on research priorities for NIST. Based on industry research priorities, knowledge of NIST’s mission, and industry experience, provide written recommendations on research priorities for NIST as well as specific recommendations for establishing the NGF SNT.A MS Word document on research priorities for NIST and specific recommendations for improving the NGF SNT.The report will be reviewed by the TIC. Desired OutputRequired ServicePerformance StandardMonitoring Method Presentation at AEC/APC Symposium. Disseminate information on industry research priorities targeting researchers from industry, academia, government, etc. via a PowerPoint presentation. The Contractor shall generate the PowerPoint slides. At least one 30-minute presentation focusing on findings from industry data collected on research priorities for sensors and control in semiconductor and PV manufacturing. The presentation will be reviewed by the TIC. II.CONTRACTOR QUALIFICATIONS The tasks and deliverables defined in this Performance Work Statement (PWS) require the Contractor to possess knowledge and experience in leading the development of semiconductor manufacturing equipment data acquisition interface, specifically SEMI Equipment Data Acquisition, and where the software is currently being used in industry. The Contractor shall also possess at least 15 years of experience in working with a broad range of equipment systems in semiconductor manufacturing as well as other automation software relevant to APC, information and control standards development and industry road mapping in order to ensure both a technical understanding and broad perspective of industry needs. If further information is required about the facilities, please refer to the NIST website, www.nist.gov. Deliverables: See Deliverables and Reports above. NIST Technical Point of Contact: to be determined, National Institute of Standards and Technology. Place of Performance: NIST 100 Bureau Drive, Gaithersburg, Maryland 20899-1640. Price Quote – The contractor shall submit the best potential fixed monthly price to provide the services of the PWS. The resulting purchase order will be negotiated on a fixed price basis. The award shall be made on a best value basis. The best value evaluation factors while relatively equal are listed in order of importance, include the following: 1) Approach - The likelihood of effectively meeting the requirements; 2) Past Performance - The relevance and quality of prior performance; and 3) Price - The amount, realism and consistency of the evaluated price. The evaluation shall be based on use of the adjectival scheme as follows: Outstanding (O) - Conspicuously striking in eminence; Excellent (E) - Very good of its kind; eminently good, superior or first class; Good (G) - Beneficial and worthwhile; sound and valid; Adequate (A) - Reasonably sufficient and suitable; Marginal (M) - Minimally suitable at the lower limit; Unsatisfactory (U) - Not acceptable, not adequate to carry out. The solicitation document and incorporated clauses are those in effect through Federal Acquisition Circular Number 2005-26. The provisions and clauses may be downloaded at http://www.acqnet.gov.far. The following provisions and clauses shall apply to this solicitation. FAR 52.212-1, Instructions to Offerors – Commercial, applies to this acquisition and there is no addenda to this provision; FAR 52,212-2, Evaluation - Commercial Items. The Government shall award a purchase order resulting from this solicitation to the responsible offeror whose offer conforming to the solicitation will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: (i) approach, (ii) past performance, (iii) price; FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, applies to this acquisition and there is no addenda to this provision; FAR 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition and there is no addenda to this provision; FAR 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items, applies to this acquisition; FAR 52.204-9, Personal Identity Verification of Contractor Personnel; FAR 52.227-14, Rights in Data – General; 52.217-9 Option to Extend the Term of the Contract and other appropriate Department of Commerce clauses. All interested contractors must be actively registered in the Central Contractor Registration (CCR) at the CCR website www.ccr.gov and must provide a completed copy of the Offeror Representations and Certifications. Interested contractors are invited to review the above Performance Work Statement “NIST - Technical Support Services for Next Generation Factory Sensor Network Test Bed to Address Technical Research Priorities in Data Quality, 6-19-2008” and provide an electronic response to be received no later than July 2, 2008 addressed to mario.checchia@nist.gov, Mario Checchia, Contract Specialist, National Institute of Standards and Technology, 100 Bureau Drive, Stop 1640Gaithersburg, Maryland 20899-1640. Contractors must submit a complete response. Responses that are not substantially complete will be returned. Offers of partial performance shall be rejected. An original and four copies shall be submitted as well as an electronic version in MS Word or Adobe Acrobat. The electronic version shall be in the form of an email with attachments. A one page letter shall transmit the quotation signed by an individual authorized to commit the organization. Each response shall be on 8 1/2-inch x 11-inch paper, in a commercially standard font, not smaller than a size 12 font. The response shall be secured by simple stapling and shall not contain elaborate binding. Each page in the response shall be separately numbered. A page of paper printed on both sides is considered two pages. The quote shall include the letter of transmittal, shall be limited to twelve(12) single sided pages. Submit quotes arranged in three sections as follows: Section I - Approach, which includes identification and qualifications of relevant personnel and technical management approach; Section II - Past Performance for relevant experience which describes at least three (3) relevant projects performed in the last three years and quality of performance providing contact individuals names and telephone numbers; Section III - Price, firm fixed price for the required technical consulting services. Each firm fixed price shall include sufficient data to allow the Government to determine the amount, realism and consistency of the fixed price. Award shall be made to the responsible contractor that offers the best value to the Government. The Government shall not be liable for any costs incurred in response to this request. The Government reserves the right to make a single award, multiple awards, or no award as a result of this RFQ. It is the responsibility of the contractor to confirm NIST's receipt of quote.
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