SOLICITATION NOTICE
66 -- Electron Beam Evaporation Vacuum System
- Notice Date
- 7/29/2008
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Oceanic and Atmospheric Administration (NOAA), Western Region Acquisition Division, 7600 Sand Point Way, Northeast, Seattle, Washington, 98115-6349
- ZIP Code
- 98115-6349
- Solicitation Number
- RA1341-08-RQ-0849PB
- Point of Contact
- Pamela Ballard,, Phone: 303-497-3487, Mark E. Caban,, Phone: 303-497-6875
- E-Mail Address
-
Pamela.Ballard@noaa.gov, mark.caban@noaa.gov
- Small Business Set-Aside
- Total Small Business
- Description
- COMBINED SYNOPSIS/SOLICITATION Electron Beam Evaporation Vacuum System (I) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotations are being requested and a written solicitation will not be issued. (II) This solicitation is issued as a Request for Quotation (RFQ). Submit written quotes on RFQ Number RA1341-08-RQ-0849PB (III) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-26. (IV) This solicitation is a Total Small Business Set-Aside. The associated NAICS code is 333295. The small business size standard is 500 employees. Contractor(s) must quote all or nothing. (V) This combined solicitation/synopsis is for purchase of the following commercial item(s)/services: Electron Beam Evaporation Vacuum System to be used at the National Institute of Standards and Technology (NIST) in the Electronics and Electrical Engineering Laboratory Division - Quantum Electrical Metrology Division located in Boulder, Colorado, USA. (VI) Description of system requirements is as follows: Line Item 0001 - The Contractor shall furnish 1 Electron Beam Evaporation Vacuum System. The System shall meet or exceed all of the minimum specifications identified herein.. A. BASIC SYSTEM REQUIREMENTS NIST requires an electron beam evaporation system to deposit thin film metals. This system will be used for the development of superconducting devices, MEMS devices and magnetic devices, and be a general purpose thin film metal deposition tool in the Quantum Fabrication Facility at NIST. The vacuum system must have six pockets to hold materials for evaporation, and also have a load lock for rapid wafer interchange. Equipment shall be a current year production model or a factory reconditioned or refurbished system with warranty. There must be at least five working units of the proposed make and model operating currently in the field. Any substitutions of normally used major system components, such as software, power-supplies, load-lock mechanisms, vacuum valves, gauges and pumping equipment required to meet this specification shall be clearly noted in the specification. All equipment, excluding the rough vacuum pump, shall be Class 100 clean room compatible, designed to sit entirely within the clean room. The entire system including the vacuum chamber, load lock and control system shall be no larger than 85 inches (216 cm) by 48 inches (122 cm) and no taller than 7.5 feet tall (229 cm), including hook ups to house facilities, such as gas line connections and vacuum lines, which will pass through the wall of the clean room. This footprint excludes external pumps that may be placed in the chase space. The system shall meet OSHA standards for operator safety and SEMI standards for environmental safety. The system shall be equipped with an easily accessible emergency, red in color, mushroom button shut-off switch which when activated safely turns off any ongoing process without causing damage to a sample in process during the shut-down procedure. 1. Electron Gun The chamber will have six pockets to hold materials for evaporation, each pocket being 7 cc or larger. System will be capable of depositing thin films of the following materials: Al, Au, Ti, PdAu, and Cu. The system will be equipped with an electron gun with sufficient power to achieve deposition rate of Aluminum in acceptance criteria #3 at 10kV. 2. Load-lock Chamber The system shall be equipped with a load lock for the transfer of samples into the deposition chamber. The load-lock shall have an o-ring sealed door for ease in loading wafers. 3. Pumping and Gauging The deposition chamber shall be pumped with a cryopump. For compatibility with existing systems, we would prefer the use of a CTI on-board pump for this application, although other pumps are acceptable. The load-lock will be pumped with a turbomolecular pump backed by a dry roughing pump. The deposition chamber shall have a base pressure of less than 5 x 10-8 Torr. The load-lock chamber shall have a base pressure of less than 5 x 10-7 Torr. 4. Deposition Chamber The vacuum chamber shall consist of electropolished stainless steel. Chamber flanges shall be copper gasket conflat type or equivalent. There will be at most two elastomer o-ring sealed flanges. Replaceable shields will protect the vacuum components for easy cleaning. There will be at least one set of extra shields provided. 5. Stage The system will have a stage with rf cleaning capability that is water cooled. The substrate temperature must not exceed 90 C during an electron beam evaporation for five minutes. There will be an option for an angle deposition stage with tilt of +/- 30 degrees that can hold a SEMI standard 3 inch wafer. (rf cleaning and cooling not required on this stage). 7. Substrate Handling The deposition system shall be able to pump, load, and deposit on SEMI standard 3 inch wafers with less than a 5 mm edge exclusion region. The system shall be upgradable to both 100 mm wafers and 150 mm wafers without replacement of major components such as load-lock or gate valves. It is preferred that the system can pump, load, an deposit on any substrate from odd-shaped pieces up to 150 mm wafers with only minor system modification. 8. Gas Handling The system will have the ability to control argon gas pressure between 5 to 20 mT for the purpose of rf sputter cleaning. 9. Controls, Instrumentation and Automation System shall have thickness monitoring capability with a +/-2% accuracy on thickness. The system shall include a centralized control for all functions. While a manual system is acceptable, software automated deposition is preferred. The automation should be listed as an optional upgrade. System shall have wide range vacuum gauge in process chamber, as well as load lock chamber. System shall have Pirani gauge in foreline. 10. Installation, Documentation and Warranty The system shall be provided with a manual with complete set of system electrical, vacuum and plumbing schematics including control schematics and a complete set of operations and maintenance manuals, for the software and hardware. Any third party hardware manuals will be provided for gauges etc. All manuals shall be provided in electronic and hard copy form. Source code for software shall be provided. B. INSTALLATION/TRAINING/WARRANTY: The Contractor shall schedule and facilitate installation/set-up. Installation, at a minimum, shall include uncrating, and unpacking of all equipment, set-up and hook-up of the instrument, demonstration of all required specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Boulder, CO, within 30 calendar days of delivery to NIST. The Contractor shall schedule and facilitate 1 training session for up to 3 users at NIST. The training shall provide a thorough demonstration of all equipment functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST immediately after installation and demonstration of performance specifications, but no later than 10 days after installation. The Contractor shall provide a list of installation requirements, including house services and furniture, with explanations, as soon as the contract is awarded. NIST will provide any required connections to house services. The Contractor shall provide a minimum of a 1 Year Warranty. Quotation must include unlimited telephone/e-mail support, during the warranty period, for questions regarding operation. This warranty must cover non-consumable parts and travel/labor on-site should this become necessary within the warranty period C. INSPECTION AND ACCEPTANCE CRITERIA: NIST requests the option to inspect system prior to shipment. Contractor shall provide at a minimum 30-days advance notice in order to accommodate travel arrangements. The system shall undergo pre-acceptance testing at the manufacturers facility with testing as described below. System can not be shipped until NIST verifies the results of this testing. Pre-Ship Acceptance Testing shall demonstrate the following: 1. Base pressure of less than 5 x 10-8 torr. 2. Pumping of the load-lock from atmospheric pressure to less than 1 x 10-6 Torr in less than 20 minutes. 3. Deposition of aluminum thin film at a rate of at least 3nm/sec while maintaining a thickness uniformity of less than +/-3% over a SEMI standard 3 inch wafer with a 5 mm edge exclusion zone. 4. The substrate temperature must not exceed 90 C during an electron beam evaporation for five minutes. 5. Thickness monitoring capability of +/-2% accuracy on thickness Contractor and NIST shall complete a post delivery performance check at NIST laboratory for adherence to performance specifications. Delivery shall be FOB DESTINATION and be completed in accordance with the Contractor's commercial schedule. FOB Destination means: The Contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the contract, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The Contractor shall deliver to Department of Commerce, Building 22, Shipping and Receiving, 325 Broadway, Boulder, CO 80305-3328. D. EVALUATION AND FACTORS: Award shall be made to the Contractor whose system provides the best value to the Government. The Government will evaluate quotes based on the following factors - Technical Capability, Past Performance, and Price. Technical Capability shall have a greater value than Past Performance. Technical Capability when combined with Past performance shall be approximately equal in importance to price. If all things considered are equal, price shall be the determining factor. FACTOR 1 - TECHNICAL CAPABILITY will be to determine if the system offered meets all the specifications. Quote shall include the manufacturer and model of the products being offered. Contractor should provide manufacturer/product sales literature that addresses the specifications. Literature or quotation should clearly document if the product offered meets or exceeds the specifications identified above. Contractor must have strength in this type of manufacturing, specifically including having sold similar units to that proposed in their bid as addressed in Past Performance. EVALUATION OF FACTOR 1 (Technical Capability): The Government will evaluate the Technical Capability and qualifications of the proposed system by reviewing each quote. Evaluation will be made to determine if the system meets or exceeds the requirements specified above. Systems meeting all the evaluated areas will be more favorably rated. Systems that do not meet the technical qualifications will be evaluated neither favorably nor unfavorably. Under Technical Capability, higher importance may be given for a system with one or more of the additional considerations. Multiple system quotes shall be accepted and are encouraged. Contractor shall clearly identify alternate systems as appropriate. FACTOR 2 - PAST PERFORMANCE will be to determine Contractors history of products, services and experience in successfully providing comparable systems. Contractor shall include no fewer than 3 references, including address, phone number, and point-of-contact, from users who are currently operating the make and model of the proposed system in the field. Referenced models need not be of the current production year, but shall be production equipment manufactured within the past 24 months and designed for the same or similar purpose, and should be as functionally similar to the equipment being proposed. Proprietary information shall be marked as such or may be redacted prior to submission. EVALUATION OF FACTOR 2 (Past Performance): The Government will evaluate the historical delivery, Performance and Satisfaction of systems in the field to determine the degree of Experience in successfully providing comparable systems for the same or similar types of applications (in scope or complexity). References may be queried to determine if past performance, 1) exceeded expectation, 2) meet expectations, or 3) failed to meet expectation in the areas of quality of equipment, timeliness of delivery, and perceived customer satisfaction. Contractors demonstrating a higher level of successful past performance in the evaluated areas will be more favorably rated. In the case of a Contractor without a record of relevant past performance or for whom information on past performance is not available, the Contractor will be evaluated neither favorably nor unfavorably. Past Performance on contracts with the Federal Government, other public agencies, or private organizations may be considered. The past performance information submitted may be that of the Offeror's firm or its proposed subcontractors. Subcontractor past performance will only be considered if the past performance correlates to the work the contractor will be performing on the contemplated contract. The Contractor should disclose any instances in which its Past Performance on a particular contract may be considered by others to be less than fully satisfactory by attaching a narrative. The Contractor should relate pertinent facts and circumstances and describe any remedial action taken or to be taken to correct the deficiency. Failure to disclose such instances may result in a determination that the Contractor has been less than candid with the Government, which could result in an unfavorable assessment of the Offeror's past performance record. The Government reserves the right to limit the number of references it ultimately contacts and to contact references or use sources other than those provided by the Contractor to obtain information related to past performance. Other sources include, but are not limited to, the Past Performance Information Retrieval System; Federal, State or local governmental agencies; and private sector businesses. Limited exchanges between the Government and a Contractor may occur to clarify the relevance of a Contractor's past performance information and adverse past performance information to which the Contractor has not previously had an opportunity to respond. Past Performance and Price will not be evaluated on proposals that are deemed technically unacceptable. FACTOR 3 PRICE: Price shall reflect the total price, inclusive. Contractor should ensure that their quote constitutes their best offer in terms of both price and the technical solution being proposed. EVALUATION OF FACTOR 3 - (Price) The Government will evaluate PRICE to determine if the proposal is fair and reasonable. Reasonableness will be determined considering other competitive prices received and comparison to the independent Government estimate. If multiple contract line items are included in the price schedule, prices will also be evaluated to determine whether any line items are unbalanced. Contractors are cautioned to distribute costs appropriately. Contractors holding any Government Wide Acquisition Contracts (GWAC) shall provided contract number and contracting agency. (VII) Place of delivery is Department of Commerce, NIST 818 - Bldg 22, 325 Broadway, Boulder, Colorado 80305-3328. Delivery shall be FOB Destination. (VIII) Required delivery is based on Contractor lead-time, and Contractor shall state a delivery schedule based on their actual best to worst scenarios of similar equipment. (IX) FAR 52.212-1, Instructions to Offerors -- Commercial Items (JUNE 2008), applies to this acquisition. In addition to written price quotes, Offers are instructed to provide literature and references as identified in the Evaluation Factors. (X) FAR 52.212-2, Evaluation - Commercial Items (JAN 1999), applies to this acquisition. Paragraph (a) is hereby completed as follows: The following factors in order of importance shall be used to evaluate offers: Technical Capability, Past Performance, and Price. See Evaluation and Factors Section D for requirements. E. EVALUATION PROCESS: The Government will use a best value trade-off process for this source selection. Award will be made to the responsible Contractor whose offer conforms to the requirements and provides the best value to the Government considering all factors. A Technical Evaluation Panel (TEP) and a1 Source Selection Authority (SSA) comprised of Government personnel, with assistance from non-Government advisors when required, will evaluate the proposal. Quotations will be evaluated against the factors set forth in Section A. The SSA will evaluate price proposals independent of the TEP evaluation. The TEP will not have access to price information until completion of the technical evaluation. The technical evaluation will be conducted in strict confidence. Proposals will be evaluated based on the factors described herein. Quotations will receive a preliminary review to determine whether the bid contains sufficient information, as required by specified herein. If the results of this preliminary review indicate that the bid lacks sufficient information to allow a meaningful evaluation to be conducted, the Government may eliminate the proposal from further evaluation and consideration for an award. After completion of the technical and price evaluations, the TEP will report the results to the SSA. The SSA will then consider all technical and price factors, including assessing the degree of risk associated with the bid, to determine the offer that provides the overall best value to the Government. The SSA's decision will be based on a comparative assessment of bid against all source selection factors specified herein. The Government may elect to accept other than the lowest priced proposal when the perceived benefits of a higher priced bid merit the additional cost. (XI) The Contractor must submit a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items (JUNE 2008), with its quote. Contractors must be registered in the Central Contractor Registration database (CCR): http://www.ccr.gov/ and to have completed the Online Representation and Certifications (ORCA) located at https://orca.bpn.gov/ (XII) The clause at FAR 52.212-4, Contract Terms and Conditions - Commercial Items (FEB 2007), applies to this acquisition. (XIII) The clause at FAR 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items (JUNE 2008) applies to this acquisition. The following clauses under subparagraph (b) apply: FAR 52.203-6 Restriction on Subcontractor Sales to the Government, with Alternate I; FAR 52,219-4 Notice of Price Evaluation Preference for HUBZone Small business Concerns; FAR 52.219-8 Utilization of Small Business Concerns; FAR 52.222-3 Convict Labor; FAR 52.222-19 Child Labor - Cooperation with Authorities and Remedies; FAR 52.222-21 Prohibition of Segregated Facilities; FAR 52-222-26 Equal Opportunity; FAR 52.222-35 Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; FAR 52.222-36 Affirmative Action for Workers with Disabilities; FAR 52.222-37 Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans; FAR 52.225-5 Trade Agreements; FAR 52.225-13 Restriction on Certain Foreign Purchases; FAR 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration. (XIV) The following clause is also applicable to this acquisition: FAR 52.252-2 Clauses Incorporated by Reference (FEB 1998) This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracts Specialist will make full text available. Also, the full text of a clause may be accessed electronically at these addresses: http://www.acquisition.gov/far/index.html or http://www.arnet.gov/far/ (XV) The Government intends to award a fixed-price contract resulting from this solicitation. (XVI) Quotes are required to be received in the contracting office no later than 01:00 P.M. MST on August 28, 2008. All quotes (less than 25 pages) may be faxed or emailed to the attention of Pamela Ballard. The fax number is (303) 497-3163 and email address is Pamela.Ballard@noaa.gov. If quote and documentation exceeds 25 pages please mail or send by private carrier to: Department of Commerce, National Oceanic and Atmospheric Administration, Mountain Region Acquisition Division, Attn: Pamela Ballard MC3, 325 Broadway, Boulder, Colorado 80305-3328. (XVII) Any questions regarding this solicitation should be directed to Pamela Ballard, (303) 497-3478, Pamela.Ballard@noaa.gov.
- Web Link
-
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=f84ec923c801d63a04958091913bf5a8&tab=core&_cview=1)
- Place of Performance
- Address: Department of Commerce, NIST 818 - Bldg 22, Boulder, Colorado, 80305-3328, United States
- Zip Code: 80305-3328
- Zip Code: 80305-3328
- Record
- SN01625306-W 20080731/080729223423-f84ec923c801d63a04958091913bf5a8 (fbodaily.com)
- Source
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