SOLICITATION NOTICE
66 -- Direct-Write Electron Beam Lithography System
- Notice Date
- 8/11/2008
- Notice Type
- Modification/Amendment
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-08-RQ-0492
- Response Due
- 8/22/2008 12:00:00 PM
- Archive Date
- 9/6/2008
- Point of Contact
- Darlene Dorsey-Coen, Phone: 3019753955, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
Darlene.DorseyCoen@nist.gov, todd.hill@nist.gov
- Small Business Set-Aside
- N/A
- Description
- The purpose of this amendment is to answer vendor questions. As a result, the solicitation is hereby amended as follows: 1. Question: We believe the pattern name with 100 is for checking the resolution capability in a small writing field. Please confirm the purpose of the pattern name with 1000? Answer: The 1000 GDS pattern file is for checking the resolution capability in a 1000 um x 1000 um exposure area, whereas the 100 GDS pattern file is for checking the resolution capability in a 100 um x 100 um exposure area. 2. Question: In both sets of GDS data, the cross-mark figure exists within the chip. Please confirm if that cross-mark is for the pattern placement accuracy measurement or just a reference mark. Answer: The cross-marks are used to obtain statistics on the pattern placement accuracy of the e-beam used to expose the pattern.
- Web Link
-
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=66a797ded94cb0aeafdd5778f0880ca2&tab=core&_cview=1)
- Place of Performance
- Address: 100 Bureau Drive, Mail Stop 1640, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN01636517-W 20080813/080811225016-66a797ded94cb0aeafdd5778f0880ca2 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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