SOLICITATION NOTICE
66 -- ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
- Notice Date
- 8/26/2008
- Notice Type
- Presolicitation
- Contracting Office
- Department of Energy, Federal Locations, All DOE Federal Contracting Offices, 3610 Collins Ferry Road (MS-I07) P.O. Box 880 Morgantown, WV
- ZIP Code
- 00000
- Solicitation Number
- DE-RQ26-08NT000896
- Response Due
- 9/12/2008
- Archive Date
- 3/12/2009
- Point of Contact
- Robert Mohn, Contracting Officer, 412-386-4963,mohn@netl.doe.gov;Robert Mohn, Contract Specialist, 412-386-4963,<br />
- Small Business Set-Aside
- N/A
- Description
- SUBJECT: ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE WITH FIELDEMISSION SOURCE This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Part 13, Simplified Acquisitions, as supplemented with additional information included in this notice. QUOTES ARE BEING REQUESTED. Responses shall reference Request for Quotations No. DE-RQ26-08NT000896 the U.S. Department of Energy (DOE), National Energy Technology Laboratory (NETL), Pittsburgh, PA, intends to purchase the following: Specifications for Environmental Scanning Electron Microscope with Field Emission Source SEM base unit: Vacuum system Vacuum mode capabilities - High-vacuum mode (<6*10-4 Pa) - imaging and microanalysis of conductive and/or conventionally prepared or coated specimens - Low-vacuum mode (10 to 130 Pa) - imaging and microanalysis of non-conductive specimens without sample preparation - Environmental mode (10 to 4000 Pa) required for high-vacuum incompatible specimens that cannot be analyzed via conventional EM methods Vacuum system must include: - Through-the-lens differential pumping technology - 240 l/s turbomolecular drag pump - 2 rotary pumps - 2 ion getter pumps - Seamless transition between the vacuum modes. Required for very short beam-gas path lengths for optimized beam brightness under gaseous conditions and high chamber pressures typical of the Environmental SEM mode. Sample chamber, stage and stage movement specifications Minimum Chamber Dimensions: Left to right = 379 mm Height = 315 mm Depth = 280 mm 10mm analytical WD 10 ports EDX take-off angle = 35 Sample stage weight capacity: Maximum sample weight at 0 is 15 kg. Maximum sample weight at all tilt angles is 5 kg, Required motorized, computer controlled x-y-z-tilt-rotate stage with the following movements: x = y = 150 mm (motorized); z = 65 mm (motorized); Tilt +70 degrees to 5 degrees (motorized); Pseudo-tilt eucentric. Sample holders must be included. Stage control software must include the following: - Store and recall of sample position; - Double-click feature select function; - Multi-directional stage drive; - Compucentric rotation; - Stage navigation based on a pre-recorded image; - Sample navigation automated system which makes to create a sample map of large samples. This map can be use to displayed images with a large field of view and for easy navigation. Electron Optics The electron optics requirements are listed below: Source Field emission gun assembly with Schottky emitter source optimized for high brightness/high current, noise-free imaging Voltage 200 V to 30 kV Beam Current >100 nA Resolution (measured as gold particle separation on a carbon substrate) High-vacuum: - 1.2 nm at 30 kV (SE) - 2.5 nm at 30 kV (BSE) - 3.0 nm at 1 kV (SE) Low-vacuum: - 1.5 nm at 30 kV (SE) - 2.5 nm at 30 kV (BSE) - 3.0 nm at 1 kV (SE) Environmental vacuum mode - 1.5 nm at 30 kV (SE) Focus Range 2.5 99 mm Magnification7x (at longest working distance) to >2,000,000x (achievable) Field of View Identical field of view in high- and low-vacuum modes (17 mm at the longest working distance) 500 m with standard, axial, gaseous secondary electron (SE) detector Scanning System Flexible scanning system controlled from the graphical user interface: - Pixel density 512 x 442, 1024 x 884, 2048 x 1768 or 4096 x 3536, selectable; - Minimum dwell time 50 ns/pixel; maximum 1 ms/pixel. - Electronic scan rotation by n x 360 degrees. Detector Systems Required detector systems: - High-vacuum mode: conventional Everhart-Thornley detector with variable grid bias - Low-vacuum mode: large-field, gaseous SE detector which is mounted off-axis having an enhanced gain pre-amplifier, which is also suitable for use at low voltages - Environmental SEM mode: standard gaseous SE detector, axially mounted, containing an integrated second 500-m pressure-limiting aperture for operation up to 4000 Pa - Solid-state, backscattered electron detector mounted below the pole piece, optimized for operation down to 3 kV - CCD camera with the capability of simultaneous display with EM images System software with the ability to automatically select and display relevant SE detectors and controls based on the vacuum mode selection and automatically detect when additional detectors are mounted and configure the vacuum system as required. Imaging Images are displayed in an area of 1024 x 884 pixels, configurable for either single-frame or four-quadrant display. Images can be viewed live, averaged or integrated. Images can be saved in TIFF, BMP, JPEG or AVI file formats, and in 8-bit or 16-bit depth, to the hard disk or LAN from the graphical user interface. Image printing is also available from the user interface. In 4-quad mode, the quadrants can be used for display of electron images (SE, BSE) mixing of signals and to display the image of the standard IR-CCD camera. Images can be recorded directly to movie (AVI). A movie can also be created at a later stage from a pre-recorded series of images. Look-up tables allow image contrast, brightness or gamma to be enhanced. User-definition of preferred imaging parameter sets is available. Imaging parameters are stored in the TIFF image file and retrievable for desktop-publishing applications. Image measurements and annotations can be done live on the image and the results can be stored together with the images. System Control Computers The SEM must be controlled from a PC with MS-Windows XP graphical user interface running at a 1280 x 1024 screen resolution. A 19 or larger LCD monitor, keyboard, optical mouse and a height-adjustable office desk must be included. The microscope controller computer must be dedicated to control of the SEM and must have a DVD/RW and the option to connect directly to a LAN. Manual microscope control must be available via a control console providing direct control of microscope parameters such as focus, magnification, contrast, brightness, beam shift and stigmator. Monitor(s) must be included in system: minimum of 19 LCD. Remote diagnostics The SEM must have the capability of utilizing secure remote diagnostics to enhance trouble shooting and repair. The remote diagnostics must be under complete operator control for security. System Instruction and Support Initial operational instruction (minimum of 4 hours) by a well qualified engineer provided immediately following installation. Instruction documentation on DVD/CD. Help available within system GUI. Availability of additional, dedicated application courses specific to SEM. Additional detectors, stages and accessories to be included All accessories must be fully integrated into the SEM system with all necessary hardware and software for operation and include detailed documentation. 1500 C Heating Stage A 1500 C heating stage with full control via system software to study in-situ morphological sample changes. The system should include two 1500 C and one 1000 C heating stages, an initial supply of sample containers, integrated shielding/insulation to prevent sample heat loss and protection of SEM components, possibility of biasing the shielding and sample with control via system software for signal optimization. The heating stage must be controlled through a microprocessor-controlled power supply, providing set-point temperature control and the possibility to define ramp/soak profiles. A dedicated ceramic GSE detector must be included for use with the heating stage. The stage must be compatible with the environmental SEM mode for control of out gassing/evaporation of samples. Solid-state STEM Detector A two-segment solid-state STEM detector for high-resolution bright and dark field imaging of cross sections and critical dimension measurements. Sample mountings for 8 or more samples simultaneously. Solid-state Wet STEM Detector Used for samples moist or highly vacuum succeptible samples. Allows temperature and humidity control (up to 100% relative) during analysis. SE, BSE and transmitted electron detection; simultaneous Bright field (BF) and Dark field (DF) mode. kV range is from 30 kV down to ~5 kV for FEG systems, which is dependent on the sample thickness. Samples can be viewed. Gaseous Back-scatter Detector for environmental SEM mode A gaseous back-scattered electron detector for BSE imaging in environmental mode utilizing gas amplification. This detector can be switched from BSE mode to SE mode and the signals can be mixed. GAD Low-kV, Solid-State, Back-Scattered Electron Detector A gaseous analytical solid-state, back-scattered electron detector is modified by the addition of an extension fixture with a pressure limiting aperture. This allows improved BSE detection for microanalysis by limiting the beam path length and reducing spurious x-ray production. Large Field-of-View GSED The large field-of-view Gaseous Secondary Electron Detector (GSED) has a bore of 1 mm, which is larger than that of the standard GSED. As a result, with this detector the maximum field of view in Low-vacuum mode is increased to around 1 mm, so that the minimum available magnification is reduced with a factor two to 125x, as compared to the standard GSED detector. Interchangeable with a standard GSED. The maximum specimen chamber pressure with this detector installed is 7.5 mbar. Low-kV, High Contrast Detector (vCD) High sensitivity solid state backscattered detector. This detector is mounted on a bayonet mount under the final lens. It is used in all modes of operation and requires the presence of a pre-amplifier which is included. Cathodoluminescence Detector (Example: Centaurus Detector and CL tip)This detector is a retractable, scintillator-type, back-scattered electron detector (BSED) which can be converted to a cathodoluminescence detector by exchanging the standard detector tip with a cathodoluminescence tip. This detector without the tip has atomic number discrimination allowing for a resolution better than 0.1 Z when Z = 30. This detector can be used at very high scan rates, where it behaves like the conventional SE detector. In CL-mode the spectral range extends from 300 to 650 nm. Minimum Supplied Specimen Holder Kit - One multi-specimen holder for up to 16 stubs - One analytical specimen holder accepting two 1 analytical specimens (resin or epoxy embedded and polished) with constant height location of their upper surfaces, a built-in Faraday cage for probe-current measurements, and positions for two specimen stubs - One pre-tilt stub holder accepting two stubs at 45 and 90 pre-tilts - One interface adapter for the multi-specimen stub-holder and analytical holder with locating pins for consistent positioning onto the stage - One short (height 11.5 mm) single-stub holder accepting a standard 12 mm stub - One long (height 26.2 mm) single-stub holder accepting a standard 12 mm stub - Two wafer-piece holders (3 mm adapter pin, height 10 mm, slot 5 mm wide, the specimen being clamped between two screws) - One 1 specimen adapter - One 1.25 specimen adapter Picoammeter and Switch Box Allows precise probe current measurements with computer control. Support Computer The support computer is a second PC which connects to the microscopes computer controller by an Ethernet connection taking over the data management task from the microscope controller. This computer must be upgradeable without affecting the microscope controller and accessible by on-site support personnel. The support computer enables/contains: - hosting of 3rd party software/hardware that is not part of the microscope (e.g. MsOffice). - video adapter to connect two monitors for having multiple applications visible. - a second Ethernet card to connect to the LAN or WWW. - a DVD+/-R/RW (including software). Minimum additional features of the support PC are: - 1 GB RAM, 3 GHz Pentium 4 Processor or higher. - The hard disk of the support PC has 80 GB or preferably higher storage capacity - 128 MB ATI Radeon graphics card or better - Standard Midi-tower model Remote Control/Imaging Remote control allowing full control the microscope via another computer across a network must be supplied. Acoustic Enclosure for Pre-vacuum Pump An acoustic enclosure providing noise dampening for the pre-vacuum pump(s) of the microscope system must be included. Compressor 120 V, 60 Hz with 4-liter Tank Supplies the compressed air for operating pneumatic valves and the microscopes leveling systems. Mains Matching and Isolation Transformer SEM The mains matching and isolation transformer provides a galvanic isolated, AC-regulated output voltage of 115 or 230 V, 50 or 60 Hz from the local grid. Uninterruptible Power Supply The Uninterruptible Power Supply (UPS) protects SEM instrumentation from short power grid interruptions. For longer power outages the UPS must be capable of switching the instrument to a power saving mode and when the UPS batteries are almost depleted, it will initiate a graceful shutdown of the system. UPS characteristics: - Rating = 8 kVA / 6.4 kW - Typical backup time of core instrument (i.e. at ca. 27% load) = 60 min. - Input voltage = 172 - 285 Vac - Input frequency = 40 - 70 Hz - Output voltage = 230 Vac - Output frequency = 50 / 60 Hz. Instrument specific SEM Course 3 days on site or at manufacturers site This SEM training course covers the underlying principles and practical aspects of scanning electron microscopy. Topics included: - Software and hardware overview and system operation - Formation of a SEM image - Beam/specimen interactions - Imaging - Use of the various detectors included - Use of various stages included - Environmental SEM specific training Electron Backscatter Diffraction Detector, integration kit and accessories (INCA Energy 350x-act/Synergy package/Advanced or better) INCA Energy 350 (includes Premium resolution INCAx-act peltier cooled ADD detector 133eV/10mm2 Cat X)+HKL Advanced system (NordlysII S system) for Mapping, Advanced Texture and Phase ID. Provides hardware and software for acquisition and indexing of Electron Backscatter Diffraction Patterns (EBSP) with beam and stage control. INCA Integration Kit The INCA integration kit prepares the support computer to control the Oxford Instruments the INCA Energy EDS and Wave WDX systems. In order to do so, it requires a FireWire card that connects to the Oxford hardware. The INCA Energy and/or Wave software comes with this kit. The kit limits the number of PCs, keyboards and mice to the absolute minimum and ensures smooth installation in the field as the kit was developed in close collaboration with Oxford Instruments. Addition included items Standard Installation must be conducted by qualified engineers. Standard Warranty Labor Coverage Standard Warranty Material Coverage Shipping charges included Full installation package for example (will vary depending on SEMmanufacturer): External 10-inch water filter kit Chloramine-T algaecide (250 gram jar) 8mm poly tubing IEC power cords, 6 ft. Power strip, 6 out 220 IEC type Auto Transformer to 228V 5KVA 12 gauge 3 conductor rubber power cord, 25 feet HP Photosmart printer 1 HP Inkjet cartridge for Photosmart 1 HP USB connector for Photosmart HP photo paper, 4x6, 20 sheets 10 pack DVD+R x 10 - 4.7 GB disks 50 ft. each - 3/8 inch air hose Hose clamps, Size 08 Brass reducer 1/2 NPT 3/8 NPT, Brass hose barbs 3/8 NPT to 3/8 hose 20A, 250 v twist lock plug, Hubbell 1/2 KO cable clamp, Thomas & Betts Specimen stubs (10) Haskris RO50 air-cooled water chiller or Haskris RO50 water-cooled water chiller DELIVERY: FOB Destination is required (all freight included). The provisions at 52.212-2 Evaluation Commercial Items (JAN 1999) does not apply to this acquisition. Instead, the following information will be used for evaluation of offerors: An award shall be made to the responsible offeror submitting a technically acceptable quote and offering the best value evaluated price. Evaluation is based on best value including cost and ability to meet stated requirements above. Offerors shall submit descriptive literature and drawings detailing features, technical capabilities and warranty data. Technical acceptability will be determined solely on the content and merit of the information submitted response to this provision as it compares to the minimum characteristics provided above. Therefore, it is essential that offerors provide sufficient technical literature, documentation, etc., in order for the Government evaluation team to make an adequate technical assessment of the quote as meeting technical acceptability. Best value to the government cost shall be the deciding factor among technically acceptable quotes. The North American Industry Classification (NIAC) is 334516. ALL INTERESTED PARTIES SHALL SUBMIT OFFERS WITH THE FOLLOWING INFORMATION: Federal Tax Identification (TIN); Dun & Bradstreet Number (DUNS); and remit to address if different. A Firm Fixed Priced Purchase Order shall be issued using the Simplified Acquisition Procedures FAR Part 13. All offers are due no later than 5:30 p.m. Eastern Time Zone on September 12, 2008. All quotes must be E-mailed to both Robert.Mohn@netl.doe.gov and Bret.Howard@netl.doe.gov. or and if faxing the fax must be sent to both Robert Mohn at 412-386-5770 and Bret Howard at 412-386-4604. All technical questions should be directed to the Technical Representatives Mr. Bret Howard at 412-386-5908.
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