SOLICITATION NOTICE
66 -- Direct-Write Electron Beam Lithography System
- Notice Date
- 9/15/2008
- Notice Type
- Modification/Amendment
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-08-RQ-0492
- Archive Date
- 10/2/2008
- Point of Contact
- Todd D Hill,, Phone: 301-975-8802, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
todd.hill@nist.gov, todd.hill@nist.gov
- Small Business Set-Aside
- N/A
- Description
- The purpose of this amendment is to modify the specifications set forth in Section 5 of the solicitation. As a result, the table in paragraph 5a is deleted in its entirety and replaced with the following in lieu thereof: 5. Performance Specifications: (a)The following listed performance specifications shall be based upon measurements from three (3) consecutive exposures: Parameter 25mm x 25mm area50mm x 50mm area Pattern placement ± 25 nm ± 40 nm Parameter 100 µm field 500 µm field Field distortion ± 10 nm ± 20 nm Stitching ± 20 nm ± 45 nm Registration ± 30 nm ± 50 nm Overlay (tool-to-self) ± 30 nm ± 50 nm Overlay (tool-to-other) ± 30 nm ± 50 nm Resolution – loose pitch (200 nm) 10nm ± 10 %50 nm ± 10 % Resolution – equal lines and spaces 30 nm ± 10 %50 nm ± 10 % All other terms and conditions remain unchanged. The purpose of this amendment is to change the due date for quotations. As a result, the solicitation is hereby amended as follows: All other terms and conditions remain unchanged.
- Web Link
-
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=649c7e570f6b3cae0bd2337353558004&tab=core&_cview=1)
- Place of Performance
- Address: 100 Bureau Drive, Mail Stop 1640, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN01671266-W 20080917/080915222203-649c7e570f6b3cae0bd2337353558004 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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