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FBO DAILY ISSUE OF FEBRUARY 04, 2009 FBO #2627
SOURCES SOUGHT

66 -- Automatic Coat and Develop Wafer Track System for Photoresist Processing

Notice Date
2/2/2009
 
Notice Type
Sources Sought
 
NAICS
334516 — Analytical Laboratory Instrument Manufacturing
 
Contracting Office
Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
 
ZIP Code
20899-1640
 
Solicitation Number
AMD-09-SS13
 
Archive Date
3/4/2009
 
Point of Contact
Todd D Hill, Phone: 301-975-8802
 
E-Mail Address
todd.hill@nist.gov
 
Small Business Set-Aside
N/A
 
Description
NIST seeks information on commercial vendors that are capable of providing an Automatic Coat and Develop Wafer Track System for Photoresist Processing. After results of this market research are received and analyzed and specifications are developed for a Wafer Track System that can meet NIST’s minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. NIST has a need for an Automated Wafer Track Coat and Develop System that would meet the following requirements: The Wafer Track System must be capable of but not limited to the following: 1.Must be able to run 3, 4, 6 and 8 inch wafers. 2.Must be able to run square substrates up to 6 inches. 3.Must be able to pre-treat, spin and spray resist, bake, and develop all wafers/substrate sizes described in #1 and #2 above. 4.Must offer Hexamethyldisilazane (HMDS) prime module. 5.No mechanical changeover required to change between substrate sizes. 6.Must offer a high degree of flexibility for use in an R&D Laboratory. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company’s size classification in any response to this notice. Companies that manufacture a system that can meet NIST's minimum requirements are requested to email a detailed report describing their abilities to todd.hill@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each system for which specifications are sent to todd.hill@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
 
Web Link
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=44f50e4e71c161a851656b175ea72ae7&tab=core&_cview=1)
 
Place of Performance
Address: NIST, Gaithersburg, Maryland, 20899, United States
Zip Code: 20899
 
Record
SN01742395-W 20090204/090202215452-44f50e4e71c161a851656b175ea72ae7 (fbodaily.com)
 
Source
FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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