SOLICITATION NOTICE
66 -- Hexamethyldisilizane (HMDS) Vacuum Bake / Vapor Prime Oven
- Notice Date
- 3/5/2009
- Notice Type
- Presolicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- NB620010-9-03272
- Archive Date
- 4/4/2009
- Point of Contact
- Paula Wilkison,, Phone: 301-975-8448, Joan M Smith,, Phone: (301)975-6458
- E-Mail Address
-
paula.wilkison@nist.gov, joan.smith@nist.gov
- Small Business Set-Aside
- N/A
- Description
- The Department of Commerce, National Institute of Standards and Technology (NIST), intends to negotiate a firm fixed price purchase order, on a sole source basis, with Yield Engineering Systems, Inc., of Livermore, California for the purchase of an HMDS Vacuum Bake / Vapor Prime Oven under other than full and open competition by the authority of FAR subpart 13.106 b(1): Only one responsible source and no other supplies or services will satisfy agency requirements. The NIST Center for Nanoscale Science and Technology requires a Hexamethyldisilizane (HMDS) Vacuum Bake / Vapor Prime Oven. An industry nanofabrication standard utilizes such a system to promote chemical adhesion of a photoresist to a substrate. A necessary process requirement in nanofabrication uses a photosensitive liquid material called photoresist which is applied to a substrate. The photoresist is used to create an image and it is very important for this resist to remain adhered to the substrate during processing. The chemical hexamethyldisilizane (HMDS) in a vapor form is the best way to create this adhesion. The required instrument can perform batch processing of multiple cassettes for 75 mm and 100 mm wafers, and is capable of handling several size wafer cassettes up to 200 mm. It can also provide dual function of delivering anhydrous ammonia to chamber for image reversal processing. The required instrument has two vessels with pressure gauges to fill with HDMS and ammonia. Yield Engineering Systems, Inc. is the only contractor who can provide a HMDS Vacuum Bake / Vapor Prime Oven that meets NIST’s requirements. Therefore, Yield Engineering Systems, Inc. is uniquely qualified to provide the required HMDS Vacuum Bake / Vapor Prime Oven. Delivery shall be FOB Destination, Gaithersburg, MD, and be completed in accordance with the Contractor’s commercial schedule. The North American Industry Classification System (NAICS) code for this acquisition is 334516, and the size standard is 500 employees. No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, interested persons may identify their interest and capability to respond to this requirement. The Government will consider responses received by 3:00 p.m. (EST) on March 20, 2009. Inquiries will only be accepted via email to paula.wilkison@nist.gov. No telephone requests will be honored. A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future.
- Web Link
-
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=c7d73a0945363c3d6d7d687b19253e53&tab=core&_cview=1)
- Place of Performance
- Address: 100 Bureau Drive, Mail Stop 1640, Gaithersburg, Maryland, 20889, United States
- Zip Code: 20889
- Zip Code: 20889
- Record
- SN01762755-W 20090307/090305220558-c7d73a0945363c3d6d7d687b19253e53 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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