SOURCES SOUGHT
66 -- i-line Stepper Optical Lithography System
- Notice Date
- 3/17/2009
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-09-SS19
- Archive Date
- 4/16/2009
- Point of Contact
- Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
todd.hill@nist.gov
- Small Business Set-Aside
- N/A
- Description
- The National Institute of Standards & Technology (NIST) seeks information on commercial vendors that are capable of providing an i-line step-and-repeat optical lithography system in support of several on-going scientific and technical research projects in the Center for Nanoscale Science and Technology (CNST) NanoFab laboratory. The system will be sited and used in a multi-user facility. After results of this market research are obtained and analyzed and specifications are developed for an i-line stepper lithography system that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. This contemplated procurement is anticipated to utilize Recovery Act Funding if it is determined that responsible sources can satisfy the requirement. NIST has a need for a system that would meet the following requirements: 1.RESOLUTION: Capability to print resolution features of at least 0.6 microns or less in commercially available resist systems 2.SUBSTRATE CAPABILITY: System should be capable of handling substrates from small irregular shaped pieces up to and including 150mm wafer rounds with minimal retooling necessary 3.OPERATING SOFTWARE: System operating software shall facilitate ease of instrument use since installed in a multi-user facility 4.DELIVERY and INSTALLATION: System shall be delivered and installed no later than 10 months ARO 5.PAST PERFORMANCE: Any systems proposed shall have a documented history of at least three prior systems installed and operating in multi-user type facilities. All new, remanufactured, and/or refurbished systems shall be considered. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company’s size classification in any response to this notice. Companies that manufacture these types of systems are requested to email a detailed report describing their abilities to todd.hill@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to todd.hill@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
- Web Link
-
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=fc949448c8dddfeac09a1e55b745ad7b&tab=core&_cview=1)
- Place of Performance
- Address: NIST, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN01770914-W 20090319/090317220016-fc949448c8dddfeac09a1e55b745ad7b (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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