SOURCES SOUGHT
66 -- Hard-Matter Three Dimensional Atomic Force microscope (3D-AFM)
- Notice Date
- 3/20/2009
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-09-SS21
- Archive Date
- 4/18/2009
- Point of Contact
- Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
todd.hill@nist.gov
- Small Business Set-Aside
- N/A
- Description
- Purchase Background The NIST Enabling Devices Group requires a Soft-Matter Nanoscale-Metrology System to support its work in Nanobiotechnology and Liposome Nanoparticles. The system will comprise three commercial instruments, 1) a Hard-Matter 3D AFM, 2) a Bio-AFM, and 3) a Nanoparticle Size-Distribution Measurement Tool. The types of samples to be measured in this system include soft and hard nano-particles, nano-lines, nano-trenches, nano-tubes, and nano-pores, as well biological surfaces and molecules. The properties of these samples will be investigated in support of Group projects, for possible use as standard reference materials, and to compare the measurement standards and capabilities of the hard-matter and soft-matter nano-measurement communities. After results of this market research are obtained and analyzed and specifications are developed for a Hard-Matter 3D AFM that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. This contemplated procurement is anticipated to utilize Recovery Act Funding if it is determined that responsible sources can satisfy the requirement. The capabilities and performance specifications that are required for the hard-matter 3D-AFM component of the Soft-Matter Nanoscale-Metrology System are defined below. This component must have the following capabilities: 1)Capability to align samples in the system optically relative to the probe tip to within plus or minus 1 micrometer. 2)An automatic or semi-automatic computer-controlled capability to rotate a sample that contains a previously measured feature through an angle defined by the user and then to move the wafer the correct distance in the x-y plane to locate the same feature for re-measurement in the new orientation. 3)Recipe positioning of samples in the system relative to the probe tip to within plus or minus 1 micrometer. 4)Sensor and probe technology capable of detecting the three dimensional structure and capable of tracking surface proximity in two orthogonal directions in order to measure the horizontal and vertical surface profiles and the transition regions between them. 5)Support measurements on particles, lines, trenches, and holes. 6)Capability to measure surface profiles and surface roughness including, but not limited to, concave and convex sidewalls and 2D shapes such as a portion of the surface of a particle. 7)Z-axis range of motion at least 5 micrometers during measurements. 8)Vertical resolution or noise level, which ever is greater, less than 0.1 nm (RMS if for noise). 9)Capability to scan regions less than or equal to 50 micrometers by 50 micrometers. 10) Deviations from flatness in X and Y scan directions less than 10 nm. 11) Line width, intermittent contact, deep trench, and contact modes of operation. 12) Stage drift less than 1nm per hour. 13) X, Y, and Z-axis linearity less than 0.01% defined as one half of the peak to valley deviations from a straight line divided by the scan range. 14) Z-axis short-term measurement reproducibility of less than plus or minus 0.1 nm. 15)XY-plane pitch measurement reproducibility of less than plus or minus 0.1 nm plus or minus 0.1% of the distance traveled for distance less than 3 micrometers. 16)Meets (SEMI E10-0304 definitions) on reliability and uptime. 17) Class 1000 clean room enclosure 18) Static discharge capability NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company’s size classification in any response to this notice. Companies that manufacture these types of systems are requested to email a detailed report describing their abilities to todd.hill@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to todd.hill@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
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- Place of Performance
- Address: NIST, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN01774492-W 20090322/090320221027-f0ae2c5a3e8bb66ec73ccda52b7f81f1 (fbodaily.com)
- Source
-
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