SOLICITATION NOTICE
66 -- Integrated Thin Film Vacuum Deposition System
- Notice Date
- 8/7/2009
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-09-RQ-0497
- Archive Date
- 9/5/2009
- Point of Contact
- Andrea A Parekh, Phone: (301)975-6984, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
andrea.parekh@nist.gov, todd.hill@nist.gov
(andrea.parekh@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. ***This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-33 (effective 15 July 2009).*** *** The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This requirement is unrestricted and all interested Contractors may submit a quotation.*** ***The National Institute of Standards and Technology is seeking to purchase an Integrated Thin Film Vacuum Deposition System. The Semiconductor Electronics Division, EEEL is looking to purchase a vacuum deposition system which can be integrated with an existing M-Braun Glove Box Train and used to deposit thin films (average film thicknesses of 1 nm to 500 nm) of metals, insulators, and organic materials. ****All interested Contractor’s shall provide a quote for the following: Line Item 0001: Quantity One (1) Integrated Thin Film Vacuum Deposition System. The system must meet or exceed all of the minimum specifications identified herein. All equipment must be new. Used or remanufactured equipment will not be considered for award. The system must consist of all the following components: Using a conventional, stand-alone, vacuum thin film deposition tool for metal and organic thin film depositions is problematic because many materials of interest are unstable after venting the deposition chamber and exposing the thin films to room air. In addition, the power requirements (thermal budget) to deposit metals like gold, aluminum, or titanium differ significantly from those needed to deposit small molecule organic semiconductor materials like pentacene, Alq3, and copper phthalocyanine. Thus, specialized low temperature deposition (point) sources are required for the latter and proper thermal and physical isolation is necessary to prevent cross-contamination of the materials. The minimum requirements for the system are specified below. 1. System Overview To successfully perform high quality multi-material thin film depositions a specialized high vacuum thin film deposition system is required with a clean dry pumping system capable of achieving a system base pressure of 5 x 10-7 Torr or better; having multiple independently controlled deposition sources which are specifically designed for depositing the materials of interest, i.e. inorganic or organic. The base system should have three (3) thermal sources configured for metal deposition by thermal evaporation from filaments or boats, and one (1) low temperature effusion-like cell (point source) for organic semiconductor deposition. Furthermore, the deposition system must be designed and prepared to accept a second low temperature effusion-like cell (point source) for organic semiconductor deposition (to be purchased later and installed when required). The system must mate with an existing M-Braun glove box via an existing standardized vacuum flange to allow sample transfer (linear), manipulation (rotation), and pump down prior to exposure to the deposition chamber and subsequent precisely controlled thin film deposition (average thickness and rate). Drawings or photographs of the existing glove box system and flange will be provided upon request. Such a system would permit diverse materials to be deposited sequentially or simultaneously as thin films to allow the fabrication of custom test structures for specialized measurements involving organic spintronics and novel photovoltaic devices. 1.1. Basic Deposition Chamber Operating Pressure/Vacuum Requirements a.The system (clean and dry) must achieve a base pressure of 5 x 10-7 Torr or better with overnight pump down. b.The operating pressure during thin film deposition (metal or organic) must be 1 x 10-6 Torr or better. c.The deposition system must be pumped with a dry/oil free roughing/backing pump and high vacuum pump. d. Must have manual isolation valves to allow sharing of the dry/oil free roughing/backing pump between the sample manipulation/load-lock and high vacuum pump on the main deposition chamber. e.The system must come with all the necessary vacuum gauges (high vacuum and atmosphere to low vacuum) and controller(s) for independent measurement and control of system pressure at the fore-/load-lock/roughing lines and deposition chamber. f.The deposition chamber must have water cooled quartz crystal deposition monitor (film thickness and rate) positioned near the substrate holder/substrate. g.The deposition chamber must have a rotary feed through and single shutter situated between the substrate holder/substrate and quartz crystal deposition monitor. h.The deposition chamber must have a manual vent valve. i.The deposition chamber must have an access door for changing deposition sources, materials, and routine maintenance/cleaning. j.The entire system (sample transfer/load-lock, deposition chamber and electronics/control rack) is not to exceed a 3 feet deep x 5 feet wide footprint. Pre-installed pieces must not exceed 6 feet by 6 feet in height and the overall system height must be less than 8 feet.System must be on a frame or feet that allow the height to be easily adjusted to mate with flange on existing MBraun glove box. 1.2 Load Lock/Sample Manipulation Train a.Cross assembly mounted on-top of deposition chamber (through which materials are deposited on to substrates which are physically located in the load lock/cross during deposition), with a rear port with ports/flanges for roughing, venting, and vacuum gauging, and a front view port. b.Must have a transfer tube/assembly to move substrate holder/substrates from the existing glove box with an ISO 250 flange (stub with flange and clamps centered approximately 58inches above floor level) to the load-lock/sample manipulation cross assembly. c.Must have a ISO 250 flange adaptor to mate the glove box port to the transfer tube/load-lock assembly. d.Rotary/linear magnet transfer mechanism with aluminum fork capable of handling a mounted sample of size up to 4 inches x 4 inches square. e.Manual isolation gate valves to provide isolation between the glove box, sample manipulation/load-lock train, and main deposition chamber. f.Manual isolation valve to allow sharing of the dry/oil free roughing/backing pump between the sample manipulation/load-lock and the high vacuum pump on the main deposition chamber. 1.3 Basic Deposition Requirements a.Must have three (3) thermal sources configured for metal deposition from filaments or boats. b.Must have all feed-throughs (high voltage water cooled) and power connections. c.Must have 2 KVA deposition power supply with 3 (or more) position selector switch. d.Must have deposition isolation and shielding. 1.4 Low Temperature Deposition Requirements a.Must have one (1) low temperature effusion-like cell (point source) for organic semiconductor deposition w/ integrated shutter, and the following specifications: 1.Must have temperature range of 50 degrees Celsius to 600 degrees Celsius 2.Must have plug-in design to facilitate removal, maintenance, and replacement. 3.Must have 10 cc charge capacity. 4.Must have stable rate control from 0.02 nm/s to 5 nm/s, or better. 5.Must have integrated thermocouple for accurate temperature readings. 6.Alumina crucibles (minimum of 3 new delivered with system). b.Must have all feed-throughs and power connections. c.Must have low temperature evaporation source power supply with PID control. d.Must have deposition isolation and shielding. e.The deposition system must be designed and prepared to accept a second low temperature effusion-like cell w/ shutter for organic semiconductor deposition (to be purchased later and installed when required). 1.5 Documentation and Acceptance a. A complete set of engineering drawings must be provided. A preliminary engineering drawing must be submitted with the solicitation. A final drawing must be provided with the system upon delivery. b. A complete set of manuals must be provided for all controllers, deposition monitoring equipment, vacuum gauges, pumps, power supplies and deposition sources. c. Basic user instructions must be provided. d. The system must be verified, by the successful vendor, to meet performance specifications prior to shipping the system to NIST and after installation. The system check must include leak testing. Installation: The Contractor shall provide installation for the integrated thin film vacuum deposition system. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, set-up and hook-up of the system, demonstration of all required specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD. ***The Contractor shall provide a minimum one (1) year warranty on all components including on-site repair. All costs including parts, labor, travel, and other expenses necessary to repair any machine equipment will be borne soley by the contractor at no additional cost to the U.S. Government. *** ***Delivery shall be provided not later than 120 days after receipt of an order. Delivery shall be FOB Destination. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all line items to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-1640. *** Award shall be made to the Contractor whose quote offers the best value to the Government, price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability factor "Meeting or Exceeding the Requirement", 2) Past Performance, 3) Experience and 4) Price. Technical capability, past performance, and experience, when combined, shall be approximately equal to price. If Technical Capability, Past Performance, and Experience are equivalent, price shall be the determining factor. Technical Capability: Evaluation of Technical Capability shall be based on the information provided in the quotation. NIST will evaluate whether the offeror has demonstrated that its proposed equipment meets or exceeds all requirements. Quotations that do not demonstrate the proposed equipment meets all requirements will not be considered further for award. Quoters shall also include product literature which addresses all specifications & clearly documents that the product offered meets or exceeds the specifications identified herein. Note: If an offeror does not indicate whether its proposed equipment meets a certain technical requirement, NIST will determine that it does not. Past Performance Past Performance will be evaluated to determine the overall quality of the product & service provided and the Contractor’s history of meeting delivery schedules for prior deliverables. Evaluation of Past Performance shall be based on the references provided and/or the quoters recent and relevant procurement history with NIST or its’ affiliates. Offerors should provide a list of 3-5 references to whom the same or similar equipment has been provided. Experience The Contractor shall describe their experience performing similar work in specialized vacuum deposition system manufacturing, specifically having sold similar units to that proposed in offerors quotation and specializing in low temperature deposition of organic molecular solids (organic semiconductors). Quoters must explain how their experience is relevant to this project and how their experience will ensure successful completion of the project. NIST will evaluate the extent of the offeror’s experience providing similar equipment and will consider the relevance of the offeror’s experience to the current requirement. Past Performance, Experience, and Price shall not be evaluated on quotes that are determined technically unacceptable in accordance with the Technical Capability Evaluation factor. *** The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html. *** *** The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. *** *** Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. ***The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions—Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders—Commercial Items including subparagraphs: (16) 52.222-3, Convict Labor; (17) 52.222-19 Child Labor – Cooperation With Authorities And Remedies; (18) 52.222-21, Prohibition of Segregated Facilities; (19) 52-222-26, Equal Opportunity; (21) 52.222-36, Affirmative Action for Workers with Disabilities; (29) 52.225-3 Buy American Act - Free Trade Agreements - Israeli Trade Act; ALTERNATE II (31) 52.225-13 Restriction on Certain Foreign Purchases; (36) 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration. Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. *** This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The offeror shall state “The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.” OR The offeror shall state “The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) ***All quoters shall submit the following: 1) An original and one (1) copy of a quotation which addresses all of the above line items; 2) An original and one (1) copy of the technical description and/or product literature; 3) Description of commercial warranty; and 4) An original and one (1) copy of the most recent published price list(s), and 5) Past performance references which must include the company/organizations name, contact person, phone number, and e-mail address. ***All quotes shall be received not later than 12:00 PM local time, on August 21, 2009, at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B125, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Andrea Parekh. Any questions or concerns regarding this solicitation should be forwarded in writing via e-mail to the Contract Specialist (Andrea G. Parekh) @ andrea.parekh@nist.gov. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 24-hour (excluding weekends and holidays) prior notice shall be made to the Contracts Office at 301-975-6984. NIST is not responsible for late delivery due to the added security measures. In addition, offerors/quoters who do not provide 24-hour notification in order to coordinate entrance to the NIST campus shall assume the risk of not being able to deliver offers/quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, bldg., room number, etc.). If 24-hour notification was not provided, it is suggested your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitor center and complete delivery. Notice shall include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility. E-mailed quotes are acceptable. Faxed quotes will NOT be accepted. ***
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-09-RQ-0497/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Mailstop 1640, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN01903635-W 20090809/090808000521-538e8bfe885afcdaeb6b203ded17f1b6 (fbodaily.com)
- Source
-
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