SOLICITATION NOTICE
59 -- Atomic Layer Deposition (ALD) System
- Notice Date
- 8/31/2009
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- RDECOM Acquisition Center - Adelphi, ATTN: AMSRD-ACC, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX-09-T-0236
- Response Due
- 9/9/2009
- Archive Date
- 11/8/2009
- Point of Contact
- neal gowda, 301-394-3371
- E-Mail Address
-
RDECOM Acquisition Center - Adelphi
(neal.gowda@arl.army.mil)
- Small Business Set-Aside
- N/A
- Description
- (i) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. A Firm Fixed Price (FFP) type contract is anticipated under referenced Statement of Work, which DD 1449 form will be used. (ii) The solicitation number is W911QX-09-T-0236. This acquisition is issued as an RFQ (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 05-36. (iv) The associated NAICS code is 333295. The small business size standard is 500. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): CLIN 0001 ALD Tool, Quantity (1), Each (vi) Description of requirements: STATEMENT OF WORK ATOMIC LAYER DEPOSITION (ALD) SYSTEM C.1.0 OVERVIEW: The ALD tool is required to support electronic materials/device projects within the Army Research Laboratory (ARL) and the U.S. Army. The acquired ALD tool will provide state-of-the-art capabilities in conformal deposition of high quality semiconductor, dielectric, and metal films on high aspect features with atomically precise thickness control. C.2 REQUIREMENTS: C.2.1 The Contractor shall build an ALD tool ensuring it meets the requirements listed in C.2.2. C.2.2 ALD TOOL: The ALD tool shall include: a. Deposition chamber accommodating at least a 6 wafer and a 50mm cube b. Computer controlled vacuum and automated growth processes c. Plasma source for low (less than 100 degrees C) temperature plasma assisted ALD (including room temperature deposition of aluminum oxide (Al2O3) film ) and substrate cleaning/activation. d. Processes for thermal and plasma source deposition of hafnium oxide (HfO2), Al2O3, and a metal that have been developed on the proposed tool. e. Ability to deposit a variety of materials such as: HfO2, Al2O3, silicon oxide (SiO2), platinum(Pt), and zinc oxide (ZnO). f. Substrate heater capable of heating the substrate to 400 oC g. Liquid, solid, and gaseous precursor handling capable of mounting precursors for HfO2, SiO2, Al2O3, and a metal simultaneously h. Heated precursor lines (200 oC). i. Vacuum pumps using fombolin or oil free pumping and having input filters to prevent deposition in the pumps or particle transfer to the pumps. j. Switching valves yielding growth cycle times of 5 sec or less k. Engineering controls for protecting personnel to include an emergency off button. l. An integrated ozone generator m. Spare parts kit containing items subject to wear such as o-rings, fuses. C.3 GENERAL PROVISIONS C.3.1 Pre Shipment and Acceptance Tests C.3.1.1 The Contractor shall perform tests (demonstrating C.3.1.4.1 through C.3.1.4.3) at both the Contractor site (Pre Shipment) as well as at ARL (Acceptance Tests). The Contracting Officers Representative (COR) may waive some or all tests at either site with a modification to the basic contract. C.3.1.2 The Contractor shall provide the precursors for the Pre-Shipment tests. The Contractor shall perform the Pre Shipment tests at their site, within five (5) months after contract award. The Contractor shall provide test data and samples demonstrating successful completion of the Pre-Shipment tests to the COR within seven (7) days of test completion. C.3.1.3 The Government will provide the precursors for the Acceptance Tests performed at ARL, on the first day the contractor arrives onsite for instillation of ADL Tool.. The Contractor shall perform the Acceptance Test as part of the instillation. The Government shall have two (2) weeks to evaluate the Acceptance Test data and samples, prior to acceptance of the instrument. C.3.1.4 The Contractor shall ensure both Pre Shipment Tests and Acceptance Tests demonstrate to the COR that the equipment meets the specifications contained herein (ref. C.2). The Contractor shall ensure both Pre Shipment Tests and Acceptance Tests demonstrate the compatibility and usability of all elements of the ALD tool. The Contractor shall ensure both Pre Shipment Tests and Acceptance Tests demonstrate the following depositions using the installed ALD tool: C.3.1.4.1 Room temperature deposition of Al2O3 film onto plastic, which exhibits better than 1% thickness uniformity across a 75 mm long substrate, and carbon contamination of less than 2%. C.3.1.4.2 Deposition of HfO2 which exhibits better than 1% thickness uniformity across a 100mm wafer, a refractive index at 633nm of 1.95 or better and carbon contamination of less than 2%. C.3.1.4.3 Deposition of SiO2 which exhibits better than 1% thickness uniformity across a 100mm wafer, a refractive index at 633nm of 1.45 or better, and carbon contamination of less than 2%. C.3.2 Delivery of the Instrument: The Contractor shall deliver the ALD tool to the COR at the ARL loading dock within six (6) months after contract award. The COR will coordinate the move of the ALD tool within ARL. The Contractor shall not ship the tool until the COR has given written authorization after confirming the pre-delivery test results (ref. C.3.1). C.3.3 Installation of the Instrument The Contractor shall install the ALD tool in the clean room of the Zahl Physical Science Laboratory building in Adelphi, Maryland within one (1) month of written authorization by the COR (ref. C.3.2). The Contractor shall ensure the installation includes on-site training of six (6) Government personnel. The Contractor shall ensure the training includes familiarizing them with the capabilities of the ALD tool and in the use of the entire ALD tool and associated equipment. C.3.4 Permits/Responsibilities The Contractor shall obtain all licenses and permits, for complying with all Federal, State, and municipal laws, codes, and regulations applicable to the requirement listed in this Statement of Work. In addition, the Contractor shall follow all safety procedures and remain in compliance with all Office of Safety and Health Administration (OSHA) requirements during transportation to and installation of the ALD tool at the Adelphi Laboratory Center (ALC). C.3.5 Work Force Interruptions The Contractor shall notify the COR at least 24 hours in advance of any expected work force interruptions. C.3.6 Warranty The Contractor shall ensure the warranty commences once the instrument is accepted by the COR and the Government personnel are trained. C.3.6.1 The Contractor shall provide a one (1) year warranty, to include parts, consumables, shipping, labor, emergency field service calls (96 hrs response-time), and personnel transportation for a period of at least one (1) year from the date of acceptance of the instrument by the COR. The Contractor shall ensure the service engineers are U.S. citizens or have green cards (Immigration and Naturalization Service Card; Citizenship Applied For). C.3.6.2 The Contractor shall provide to the COR all available software issues and upgrades for three (3) years after acceptance of the tool. C.3.7 Technical Support/Documentation The Contractor shall provide technical support, to the ALD tool user(s) by having technical staff members on-call for consultation by telephone during normal business hours. The Contractor shall provide two (2) copies of operating and service manuals for the equipment and two (2) copies of manuals for the system software with one (1) copy of each printed on clean room paper. The Contractor shall provide one (1) copy of circuit diagrams for the system. The Contractor shall provide the COR with a library of guaranteed optimized processes (using readily available precursors) for thermal and plasma source deposition of a wide variety of materials including HfO2, Al2O3, SiO2, and Pt or Pd upon tool delivery (C.3.2). C.3.8 Government Furnished Utilities/Services The COR will provide all hard wire electrical contacts, plumbing, and lab air according to the manufacturers specifications for the ALD tool. The Government personnel at ALC will connect all main electrical and plumbing lines to the unit. The Government personnel will move the ALD tool within ALC. C.3.9 Safety Issues The Contractor shall equip the ALD tool with engineering controls to protect users from accidental releases of the ALD precursors and process gases which are potentially hazardous (e.g. toxic, pyrophoric, corrosive, etc.). The Contractor shall ensure the ALD tool is capable of performing material depositions using small volumes (e.g. lecture bottles) of any of the hazardous precursors/gases. The Contractor shall ensure the ALD tool provides cabinet space within which to mount and store all hazardous precursor and gas bottles. The Contractor shall interface the ALD tool with any gas monitoring sensors provided by the COR as Government Furnished Equipment (GFE) at installation. The Contractor shall equip the ALD tool with an EMO (emergency off) panic button. C.3.10 Security Issues The Contractor shall ensure that all Contractor personnel are U.S. citizens or have green cards (Immigration and Naturalization Service Card; Citizenship Applied For). The Contractor shall submit to the COR in writing, the names, phone numbers, and social security numbers of all prime and subcontractor personnel who will be working at the ALC site within 96 hours prior to the Contractor employees reporting for work at ALC. The Contractor shall provide all Contractor personnel working on-site at ARL with a form of visual identification (i.e. ID Badge, contractor emblem, etc.) which they shall display at all times while on the ARL project site. The Contractor shall ensure the ID badge identifies each individual as an authorized employee of the Contractor. All Contractor personnel shall stop at the Visitor Center at the main entrance gate to the ALC facility and register themselves and their vehicles (which will be searched) before entering the installation. Under no circumstances shall the Contractor be allowed access to secured areas on an unescorted basis. The Contractor and its employees shall comply with all the post regulations. C.4 Deliverables The Contractor shall provide the following to the COR: a.ADL System which meets the performance specifications (reference C.2.2) within five (5) months after contract award (reference C.3.2) b.Installation and On-Site Training (as described in C.3.3) c.One (1) Year Warranty (as described in C.3.6) d.Two (2) copies of all manuals with one (1) copy of each printed on clean room paper (reference C.3.7) e.One (1) copy of Circuit Diagrams (reference C.3.7) f.All available software issues and upgrades for three (3) years after acceptance of the tool at no cost (C.3.6.2) g.Spare parts kit containing items subject to wear such as o-rings, chamber liners, etc. (C.2.2) C.5 Contractor Manpower Reporting The Office of the Assistant Secretary of the Army (Manpower & Reserve Affairs) operates and maintains a secure Army data collection site where the contractor shall report ALL contractor manpower (including subcontractor manpower) required for performance of this contract. The contractor is required to completely fill in all the information in the format using the following web address https://contractormanpower.army.pentagon.mil. The required information includes: (1) Contracting Office, Contracting Officer, Contracting Officer's Technical Representative; (2) Contract number, including task order and delivery order number; (3) Beginning and ending dates covered by reporting period; (4) Contractor name, address, phone number email address identify of contractor employee entering data; (5) Estimated direct labor hours (including sub-contractors); (6) Estimated direct labor dollars paid this reporting period (including subcontractors); (7) Total payments (including sub-contractors); (8) Predominant Federal Service Code (FSC) reflecting services provided by contractor (and separate predominant FSC for each sub-contractor if different); (9) Estimated data collection cost; (10) Organizational title associated with the Unit Identification Code (UIC) for the Army Requiring Activity (the Army Requiring Activity is responsible for providing the contractor with its UIC for the purposes of reporting this information); (11) Locations where contractor and sub-contractors perform the work (specified by zip code in the United States and nearest city, country, when in an overseas location using standardized nomenclature provided on website); (12) Presence of deployment or contingency contract language; and (13) Number of contractor and sub-contractor employees deployed in theater this reporting period (by country). As part of its submission, the contractor will also provide the estimated total cost (if any) incurred to comply with this reporting requirement. Reporting period will be the period of performance not to exceed 12 months ending September 30 of each government fiscal year and must be reported by 31 October of each calendar year. Contractors may use a direct XML data transfer to the database server or fill in the fields on the website. The XML direct transfer is a format for transferring files from a contractor's systems to the secure web site without the need for separate data entries for each required data element at the web site. The specific formats for the XML direct transfer may be downloaded from the web site. (End Statement of Work) (vii) Delivery is required by six (6) months after date of award. Delivery shall be made to US Army Research, Development and Engineering Command, Acquisition Center, Adelphi Contracting Division, 2800 Powder Mill Rd (Zahle Physical Science Building), Adelphi, MD, 20783-1197. Acceptance shall be performed at Adelphi, MD. The FOB point is destination. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: None (ix) The provision at FAR 52.212-2, Evaluation - The Government will award a contract resulting from this solicitation to the responsible Offeror whose offer conforms to the solicitation and will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: Technical, Past Performance, and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications (including the proposed delivery schedule) in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the Offeror proposes to modify a product so as to conform to the requirement of this solicitation, the Offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the Offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the Offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable), records of servicing this product and the providers technical support element for trouble shooting and process development support. Offerors shall include at least three (3) records of sales from the previous 36 months. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Price will be evaluated based on the total proposed price. Offerors shall provide pricing on both Pre Shipment Tests and Acceptance Tests, in the proposed quote. Technical, and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause. None (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.203-3, 52.212-5, 52.222-3, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.222-39, DFARS 252.212-7001,252.225-7001, 252.232-7003, 252.247-7023, and 252.247-7023 Alt III. (xiv) The following local provision apply: ARL Provisions 52.005-4401, 52.011-4401, 52.032-4418, 52.032-4427, 52.037-4402, 52.037-4403, 52.037-4400 ATL, and AMC-Level of Protest Program (Oct 1996) and the US Army RDECOM. Provisions can be obtained by contacting the Contract Specialist, Mr. Neal Gowda at Neal.Gowda@arl.army.mil. (xv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as NONE. (xvi) The following notes apply to this announcement: NONE. (xvii) Offers are due on 09 September 2009, 11:59 PM ET by email to NEAL.GOWDA@ARL.ARMY.MIL. (xviii) For information regarding this solicitation, please contact Neal Gowda, NEAL.GOWDA@ARL.ARMY.MIL, 301-394-3371.
- Web Link
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FBO.gov Permalink
(https://www.fbo.gov/spg/USA/USAMC/DAAD17/W911QX-09-T-0236/listing.html)
- Place of Performance
- Address: RDECOM Acquisition Center - Adelphi ATTN: AMSRD-ACC, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Zip Code: 20783-1197
- Record
- SN01934986-W 20090902/090901003429-db664c35940497b308ecfadad2344386 (fbodaily.com)
- Source
-
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