SOLICITATION NOTICE
36 -- Physical Vapor Deposition System
- Notice Date
- 10/23/2009
- Notice Type
- Presolicitation
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, District of Columbia, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-10-R-KS01
- Archive Date
- 10/23/2010
- Point of Contact
- Kirsten Pilkerton, Phone: 202-767-3090
- E-Mail Address
-
kirsten.pilkerton@nrl.navy.mil
(kirsten.pilkerton@nrl.navy.mil)
- Small Business Set-Aside
- N/A
- Description
- The Naval Research Laboratory requires a physical vapor deposition system for the fabrication of thin films. The system will be a cluster tool, consisting of multiple process chambers arrayed around a robotic distribution vessel. The system must be capable of handling substrates up to 4" x 4" square. The system will include: a distribution vessel with robotic sample distribution, a glove box with an interface to a load lock chamber, a load lock chamber, a mask changing module, a sputterer chamber for oxide materials, a sputterer chamber for chalcogenide materials, an evaporator chamber for metals, an evaporator chamber for dielectrics, expansion to allow for the future installation of an XPS system, and a fully automated computer control. The complete specifications will be available as part of the solicitation. It is anticipated that a Firm Fixed Price contract will be made as a result of the solicitation with an approximate period of performance of four months. NRL uses Electronic Commerce (EC) to issue Requests for Proposals (RFPs) and amendments to RFPs. Paper copies of the RFP will not be provided. The actual closing date for proposals will be stated in the solicitation when issued. All responsible sources may submit a bid, proposal, or quotation which shall be considered by the agency. Other business opportunities for NRL are available at our website http://heron.nrl.navy.mil/contracts/rfplist.htm. The Government does not intend to use FAR Part 12, Acquisition of Commercial Items. One or more of the items under this acquisition is subject to the World Trade Organization Government Procurement Agreement and Free Trade Agreements.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DON/ONR/N00173/N00173-10-R-KS01/listing.html)
- Place of Performance
- Address: Contractor's Facility, United States
- Record
- SN01991432-W 20091025/091023235359-3c34f153187df9109bd2f0d42c95650d (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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