SOLICITATION NOTICE
99 -- HF Vapor Etcher Release System
- Notice Date
- 2/4/2010
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333999
— All Other Miscellaneous General Purpose Machinery Manufacturing
- Contracting Office
- N00174 NAVAL SURFACE WARFARE CENTER, MARYLAND 4072 North Jackson Road Suite 132 Indian Head, MD
- ZIP Code
- 00000
- Solicitation Number
- N0017410Q0050
- Point of Contact
- Dwight Deneal 3017446664 Ruth Adams3017446655
- E-Mail Address
-
DWIGHT.DENEAL@NAVY.MIL
(DWIGHT.DENEAL@NAVY.MIL)
- Small Business Set-Aside
- N/A
- Description
- This is a combined synopsis solicitation for commercial item prepared in accordance with the format in Subpart 12.6 as supplemented with additional information included in this notice. This announcement constitutes the only pre-solicitation notice; quotes are being requested and a written solicitation is attached. This request for quote (RFQ) N00174-10-Q-0050 is the only written solicitation which will be issued, unless amended. This requirement is FULL and OPEN Competition w/ 10% HUBZONE Preference. The NAICS code is 333999. The size standard is 500 employees. The FSC code is 6640. Salient Characteristics for the HF Vapor Release System GENERAL SPECIFICATIONS: The release system shall be capable of performing selective MEMS etch release of sacrificial silicon oxides accomplished by a clean, residue-free, and stiction-minimizing anhydrous vapor hydrofluoric acid (HF) and methanol etch process. The system shall be capable of loading 4" and 6" substrates and shall be capable of processing multiple substrates simultaneously (at least 3 wafers at a time). The system's process chamber gas cabinet shall be equipped with HF vapor detection and alarm system and a key-locking windowed door for monitoring component status. The HF vapor etcher system shall include all required hardware, software, and chemicals for operation, including gas cabinet, vacuum pumps, wafer loader, power distribution, computer, etc. The manufacturer shall provide performance reports (i.e. technical articles, references) for the proposed machine to demonstrate a track record in vapor etch releasing. MANDATORY MINIMUM PERFORMANCE SPECIFICATIONS: 1.Modules must be interfaced by Windows XP computer or equivalent2.Programmable automated pressure/vacuum control3.Programmable concentrations of HF and Methanol4.Programmable at different etch rates5.Capable of controlled silicon dioxide etch rates between.1 to 10 m per minute6.Stores "recipes" for different etch profiles7.HF and methanol vapor must not attack aluminum features8.Compatible with silicon and metals, including gold and gold-tin9.Capable of accommodating wafers from 50 m to 1000 m thick 10.Capable of process uniformity and repeatability (etch rates within 10% across the wafer and from wafer to wafer)11.Capable of processing individual die or chips.12.Includes Alcohol Reservoir 13.Includes Dry Vacuum Pump for Reactor IF INTERESTED, PLEASE DOWNLOAD THIS SOLITATION. Copies of solicitation N00174-10-Q-0050 will NOT be emailed, faxed, mailed or provided in person. These types of request WILL NOT BE ACKNOWLEDGED. This combine synopsis/solicitation is being posted to both Federal Business Opportunities (FBO) page located at http://www.eps.gov and Navy Electronic Commerce On-Line (NECO) site located at http://www.neco.navy.mil. While it is understood that FBO is the single point of entry for posting of synopses and solicitations to the internet, NECO is the alternative case FBO is unavailable. Please feel free to use either site to access information posted by Navy Seas Systems Command. NOTE: Offerors are ineligible for award unless registered in DOD's Central Contractor Registration Database. Information regarding registration and annual confirmation requirements is available at 1-888-227-2423 and http://www.ccr.gov/. The deadline for quotes in response solicitation is 24-Feb-2010 4:00 PM EST
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DON/NAVSEA/N00174/N0017410Q0050/listing.html)
- Record
- SN02057580-W 20100206/100204235001-5248f2002c9eb61ab9493cf7ea7b573d (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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