SOLICITATION NOTICE
66 -- Combined Scanning Electron Microscope and Laser Interferometer SEM Stage with Stiching Software
- Notice Date
- 4/7/2010
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Other Defense Agencies, Defense Microelectronics Activity, Defense Microelectronics Activity, 4234 54th Street, McClellan, California, 95652, United States
- ZIP Code
- 95652
- Solicitation Number
- H94003-10-R-5610
- Archive Date
- 5/13/2010
- Point of Contact
- Phillip A Takacs, Phone: 9162311512, Linda Baustian, Phone: 9162311658
- E-Mail Address
-
takacs@dmea.osd.mil, baustian@dmea.osd.mil
(takacs@dmea.osd.mil, baustian@dmea.osd.mil)
- Small Business Set-Aside
- N/A
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6 as supplemented with additional information included in this notice. This announcement constitutes the solicitation. The NAICS Code is 334516 with a size standard of 500 employees. The reference number is H94003-10-R-5610. The place of performance and delivery is Defense Microelectronics Activity (DMEA), 4234 54th Street, McClellan, CA 95652. The contractor shall provide a Carl Zeiss E Line Scanning Electron Microscope (SEM) or equivalent and Raith Laser Interferometer SEM Stage with Stitching Software or equivalent. These systems must be compatible and interdependent. This award is on an All or None basis. This system combination must conform to the following salient characteristics: 1) High resolution TFE SEM column with 2nm beam size. 2) Electrostatic immersion lens. 3) Beam energy selectable between 100 ev - 30 kev. 4) Laser interferometer controlled stage with travel range 100 X 100 mm. 5) 2 nm X/Y position resolution at any working distance. 6) Able to clearly resolve and accurately stitch sample structures below 90 nm. 7) Automatic focus correction either by digital column focus or Z axis. 8) System control software and multi-user interface. 9) Fully automatic image acquisition for very large mosaics with automatic drift compensation which can be operated over multiple days. 10) Semi-automatic conversion software (images to CAD). 11) Postprocessor software for automatically created CAD optimization. 12) The microscope must not be more than 2 years old. 13) The pattern generator must not be more than 2 years old. 14) The software version released no earlier than 2009. 15) New or used tools are acceptable. The contractor shall be responsible for the installation, configuration and training. The contractor shall provide on-site hardware and software warranties for a period of 2 years for the items identified in this solicitation. Warranty shall include repair/replacement for: a) Defects in materials and workmanship b) Dust, internal overheating, internal humidity/condensation c) Power surge/fluctuations. The contractor shall propose a preventive maintenance plan that will include the following: a) Replace pump seals and/or rebuild pump b) Replace sources c) Repair chiller d) Repair stage. The contractor is required to provide a two (2) hour advance notification prior to conducting any on-site inspection, installation or maintenance for security purposes. All installation and maintenance work shall be performed by US citizens. Contractor personnel shall provide proof of citizenship in accordance with the DMEA visitor approval process in effect at the time the visit is requested and prior to being allowed entry into either location. FOB point is Destination. Award will be made to the lowest responsive, responsible offer submitted in response to this requirement. The following FAR clauses apply: 52.212-1, Instructions to Offerors - Commercial; 52.212-3, Offeror Representations and Certifications-Commercial Items; 52.212-4 Contract Terms and Conditions-Commercial Items and 52.212-5, Contract Terms and Conditions required to Implement Statutes or Executive Orders-Commercial Items. DPAS Rating is A70. For a complete copy of the Statement of Work (SOW) and a Request for Quote (RFQ) please email Phillip Takacs takacs@dmea.osd.mil Offers shall be received in DMEA by 5:00pm (PST) 28 April 2010.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/ODA/DMEA/DMEA/H94003-10-R-5610/listing.html)
- Place of Performance
- Address: 4234 54th Street, McClellan, California, 95652, United States
- Zip Code: 95652
- Zip Code: 95652
- Record
- SN02115547-W 20100409/100407235512-45445ea9986dfadb16cb188f272b5574 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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