MODIFICATION
66 -- Mask/Wafer Cleaning System
- Notice Date
- 4/16/2010
- Notice Type
- Modification/Amendment
- NAICS
- 339999
— All Other Miscellaneous Manufacturing
- Contracting Office
- Department of Energy, Brookhaven National Laboratory (DOE Contractor), Brookhaven, PO Box 5000, Bldg. No. 355, Upton, New York, 11973
- ZIP Code
- 11973
- Solicitation Number
- MC167834
- Archive Date
- 4/24/2010
- Point of Contact
- Michael J. Canavan, Phone: 631-344-4274
- E-Mail Address
-
canavan@bnl.gov
(canavan@bnl.gov)
- Small Business Set-Aside
- N/A
- Description
- Please review the following questions that have been asked and the answers that are provided. Question 1: The combination of Pirhana which is a VERY strong oxidant (hence the name) and Ammonium Hydroxide is problematic and will require much in the way of safety provisions to avoid any possible mixing of the two as such mixing will be highly exothermic (depending of course on concentration, which in the case of piranha is high, nothing is mentioned about the Ammonia) Answer: For effective mask cleaning, a light Pirhana (just a few percent of H2O2, and >96% sulfuric acid) cycle is a standard. Ammonium Hydroxide cleaning cycle (a different one from Pirhana) is also a standard processing for wafers and masks. In this mask cleaning system, it must satisfy: 1. Pirhana cleaning and Ammonium Hydroxide cleaning are separate cycles with DI water rinse in between --- they do not mix; 2. The quantity of chemicals used is very small (in the order of <1000mL per cycle), and chemicals are injected by nozzles; 3. There will be interlocks that will ensure the safety of the operator --- once the process is started, the system can only be open when the cleaning processing is finished (with DI water rinse as the last cycle), or when it is thoroughly rinsed by DI water after an interruption. Question 2: Regard to the concentration of Pirhana, does the end user mean dilute pirhana or does he mean low concentration peroxide in very concentrated sulfuric. Answer: 2-4%H2O2, 98-96% sulfuric acid.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOE/BHL/BNL/MC167834/listing.html)
- Place of Performance
- Address: Brookhaven National Laboratory, Upton, New York, 11973, United States
- Zip Code: 11973
- Zip Code: 11973
- Record
- SN02124984-W 20100418/100417000038-b29e27051996dda20458b82f474f696e (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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