SOLICITATION NOTICE
66 -- The National Institute of Standards and Technology is seeking to purchase a Critical Dimension (CD) measuring microscope.
- Notice Date
- 5/19/2010
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-10-RQ-0378
- Point of Contact
- Janet M. Lamb, Phone: 3019756205, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
janet.lamb@nist.gov, todd.hill@nist.gov
(janet.lamb@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. This solicitation is being issued using Simplified Acquisition Procedures under the authority of 13.5 Test Program for Certain Commercial Items. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-41, Effective 13 May 2010. The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. However this requirement is unrestricted and all interested Contractors may submit a quote. The National Institute of Standards and Technology is seeking to purchase a Critical Dimension (CD) measuring microscope. All interested Contractors shall provide a quote for the following: LINE ITEM 0001: Quantity One (1) Critical Dimension (CD) measuring microscope. New, used or remanufactured systems will be considered. Contractors shall meet or exceed the following minimum specifications: The National Institute of Standards and Technology (NIST) requires an optical microscope metrology system to use in a research-based Nanofabrication facility. The metrology system will be used to measure various critical dimensions (CD) on a wide array of substrates and materials. System shall be capable of measuring linewidths, pitch, spacing and various overlay patterns. 1.Footprint and installation •Small table top design. •Shall require minimal installation requirements. Installation should only require standard 110V electric and possibly house vacuum. Shall provide detailed installation requirements. 2.Stage •Stage shall be able to accommodate small pieces, 75mm, 100mm and 150mm wafers. Stage shall also be able to accommodate square photomasks up to 6 inch by 6 inch. •Both automated and manual stages shall be considered. (see EVALUATION CRITERIA FOR SELECTION OF QUOTE) •Stage travel of 150mm by 150mm. 3.Resolution •Measure feature sizes down to 0.4 microns or better. •Measure all types of material and substrates including photoresist. •Shall provide calibration and maintenance instructions. 4.Optics •Optics shall meet the objectives of the CD Measuring Microscope (System shall be capable of measuring linewidths, pitch, spacing and various overlay patterns). 5.Focus and automation •Automatic focus at measuring site. 6.User interface •System shall be capable of measuring linewidths, pitch, spacing and various overlay patterns. •Programmable measurement routines. •X and Y measurements. •Output data into spreadsheet or other common formats. •Modern computer monitor with graphical interface to control system. •Training and support shall be provided by Contractor. Installation: The contractor shall schedule and facilitate installation/set-up. Installation, at a minimum, shall include uncrating/unpacking of all equipment, set-up and hook-up of the instrument, demonstration of all required specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD, within 10 calendar days of delivery to NIST. Training: The contractor shall schedule and facilitate one (1) training session for up to 4 users at NIST. The training shall provide a thorough demonstration of all equipment functions, maintenance, data administration, and basic troubleshooting. The training may be completed at NIST immediately after installation and demonstration of performance specifications, but no later than 10 days after installation. The contractor shall provide a list of installation requirements, including house services and furniture, with explanations, as soon as the contract is awarded. NIST will provide any required connections to house services. Warranty: The Contractor shall provide a minimum of a One (1) Year Warranty. Quotation must include unlimited telephone/e-mail support, during the warranty period, for questions regarding operation. This warranty must cover non-consumable parts and travel/labor on-site should this become necessary within the warranty period. Delivery: Delivery shall be FOB DESTINATION and be completed in accordance with the contractor’s commercial schedule. FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-0001. EVALUATION CRITERIA FOR SELECTION OF QUOTE: Award shall be made to the Contractor whose quote offers the best value to the Government. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability factor “Meeting or Exceeding the Requirement,” 2) Past Performance, 3) Experience, and 4) Price. Technical capability, past performance, and experience, when combined, shall be approximately equal in importance to price. If technical capability, past performance, and experience are equivalent, price shall be the determining factor. Award will be made on a best-value basis. Under the Technical Capabilities factor, stronger consideration will be given for a Microscope with one or more of the following additional features or capabilities: Line Item 0001: Stronger consideration •Automated stage or upgradeable to automated stage. •Sidewall angle measurement •CAD data import •Pattern recognition •Z height measurement Technical Capability: Evaluation of Technical Capability will be based on the information provided in the quotation. Quotations shall include the make and model of the products, manufacturer sales literature or other product literature, which addresses all specifications & clearly documents that the product offered meets or exceeds the specifications identified herein. Installation should only require standard 110V electric and possibly house vacuum. Calibration and maintenance instructions which will supplement training. Past Performance: Past Performance will be evaluated to determine the overall quality of the products and services, provided by the Contractor. Evaluation of Past Performance shall be based on the references provided IAW FAR 52.212-1(b)(10) and/or information from other sources, including NIST. Offerors shall provide a list of at least three (3) references to whom the same or similar products have been sold. The list of references will include, at a minimum: the name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer, if applicable; and the date of delivery or the date services were completed. Experience: Experience will be evaluated to determine the degree of vendors’ experience in successfully providing comparable systems for the types of applications described herein. Evaluation of experience may be based on contacts used for past performance; however, the vendor should provide additional references relating to its relevant experience information, if necessary. Price: The government shall evaluate price for reasonableness. Past Performance, Experience, and Price shall not be evaluated on quotes that are determined technically unacceptable in accordance with the Technical Capability Evaluation factor. PROVISIONS AND CLAUSES: The full text of a FAR provision or clause may be accessed electronically at http://acquisition.gov/comp/far/index.html or www.acqnet.gov/far. The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items Offerors must complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. The following clauses apply to this acquisition: 52.212-4 Contract Terms and Conditions—Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders—Commercial Items including subparagraphs: 52.222-3 Convict Labor; 52.222-19 Child Labor – Cooperation with Authorities And Remedies 52.222-21 Prohibition of Segregated Facilities 52.222-26 Equal Opportunity 52.222-36 Affirmative Action for Workers with Disabilities; 52.225-3 Buy American Act—Free Trade Agreement; (ii) Alternate l of 52.225-3 52.225-13 Restriction on Certain Foreign Purchases, and 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration Department of Commerce Agency-Level Protest Procedures Level above the Contracting Officer is also incorporated. It can be downloaded at www.nist.gov/admin/od/contract/agency.htm. *** REQUIRED SUBMISSIONS: All quoters shall submit the following: 1.An original and one (1) copy of a quotation which addresses Line Item 0001 and all evaluation criteria including the technical description and/or product literature and explain how your product meets or exceeds each specification. 2.Quoters should provide a list of at least three (3) references to whom the same or similar products have been sold. The list of references shall include, at a minimum: The name of the reference contact person and the company or organization; the telephone number of the reference contact person; the contract or grant number; the amount of the contract and the address and the telephone number of the Contracting Officer if applicable; and the date of delivery or the date services were completed. 3.An original and one (1) copy of an established price list(s) for similar productions. 4.Country of Origin information for the CD Measuring Microscope. 5.Provide detailed installation requirements. 6.Provide calibration and maintenance instructions. All quotes shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Janet Lamb, Building 301, Room B175, 100 Bureau Drive, Stop 1640, Gaithersburg, MD 20899-1640. This is an Open-Market Combined Synopsis/Solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this Combined Synopsis/Solicitation that will include the terms and conditions that are set forth herein. In order to facilitate the award process, ALL quotes shall include a statement regarding the terms and conditions herein as follows: The offeror shall state “The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition.” OR The offeror shall state “The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) Please note that this procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the offeror’s FSS or GWAC contract, and the statement required above shall be included in the quotation. DUE DATE FOR QUOTE: Submission shall be received not later than 1:00 p.m. local time on June 2, 2010 at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B175, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attention: Janet Lamb. Any questions or concerns regarding this solicitation should be forwarded in writing via e-mail to the Contract Specialist (Janet Lamb) at janet.lamb@nist.gov. FAXED QUOTES WILL NOT BE ACCEPTED. EMAILED QUOTES WILL BE ACCEPTED. Offerors’ quotations shall not be deemed received by the Government until the quotation is entered in the e-mail inbox of Janet Lamb. Because of heightened security, Fed-Ex, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Janet Lamb at 301-975-6205. Notice shall include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-U.S. citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-10-RQ-0378/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02153814-W 20100521/100519234634-d8831a1bff6695d3848ad127a919ab17 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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